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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.
The analysis of nonlinear hybrid electromagnetic systems poses significant challenges that essentially demand reliable numerical methods. In recent years, research has shown that finite-difference time-domain (FDTD) cosimulation techniques hold great potential for future designs and analyses of electrical systems. Time-Domain Computer Analysis of Nonlinear Hybrid Systems summarizes and reviews more than 10 years of research in FDTD cosimulation. It first provides a basic overview of the electromagnetic theory, the link between field theory and circuit theory, transmission line theory, finite-difference approximation, and analog circuit simulation. The author then extends the basic theory of FDTD cosimulation to focus on techniques for time-domain field solving, analog circuit analysis, and integration of other lumped systems, such as n-port nonlinear circuits, into the field-solving scheme. The numerical cosimulation methods described in this book and proven in various applications can effectively simulate hybrid circuits that other techniques cannot. By incorporating recent, new, and previously unpublished results, this book effectively represents the state of the art in FDTD techniques. More detailed studies are needed before the methods described are fully developed, but the discussions in this book build a good foundation for their future perfection.
Examines both mined and synthetic diamonds and diamond films. The text offers coverage on the use of diamond as an engineering material, integrating original research on the science, technology and applications of diamond. It discusses the use of chemical vapour deposition grown diamonds in electronics, cutting tools, wear resistant coatings, thermal management, optics and acoustics, as well as in new products.