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As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection
Recent years have seen silicon integrated circuits enter into an increasing number of technical and consumer applications, until they now affect everyday life, as well as technical areas. Polycrystalline silicon has been an important component of silicon technology for nearly two decades, being used first in MOS integrated circuits and now becoming pervasive in bipolar circuits, as well. During this time a great deal of informa tion has been published about polysilicon. A wide range of deposition conditions has been used to form films exhibiting markedly different properties. Seemingly contradictory results can often be explained by considering the details of the structure formed. This monograph is an attempt to synthesize much of the available knowledge about polysilicon. It represents an effort to interrelate the deposition, properties, and applications of polysilicon so that it can be used most effectively to enhance device and integrated-circuit perfor mance. As device performance improves, however, some of the proper ties of polysilicon are beginning to restrict the overall performance of integrated circuits, and the basic limitations of the properties of polysili con also need to be better understood to minimize potential degradation of circuit behavior.
IMRET 5 featured more than 80 oral and poster communications, covering the entire interdisciplinary field from design, production, modeling and characterization of microreactor devices to application of microstructured systems for production, energy and transportation, including many analytical and biological applications. A particularly strong topic was the investigation of the potential of microstructuring of reactors and systems components for process intensification. Perspectives of combining local, in situ, data acquisition with appropriate microstructuring of actuators and components within chemical and biological devices were explored in order to enhance process performance and facilitate process control.
What kind of science do we need today and tomorrow? In a game that knows no boundaries, a game that contaminates science, democracy and the market economy, how can we distinguish true needs from simple of fashion? How can we distinguish between necessity and fancy? whims How can we differentiate conviction from opinion? What is the meaning of this all? Where is the civilizing project? Where is the universal outlook of the minds that might be capable of counteracting the global reach of the market? Where is the common ground that links each of us to the other? We need the kind of science that can live up to this need for univer sality, the kind of science that can answer these questions. We need a new kind of knowledge, a new awareness that can bring about the creative destruction of certainties. Old ideas, dogmas, and out-dated paradigms must be destroyed in order to build new knowledge of a type that is more socially robust, more scientifically reliable, stable and above all better able to express our needs, values and dreams. What is more, this new kind of knowledge, which will be challenged in turn by ideas yet to come, will prove its true worth by demonstrating its capacity to dialogue with these ideas and grow with them.
To honour the remarkable contribution of Michel David in the inception, establishment and development of Geostatistics, and to promote the essence of his work, an international Forum entitled Geostatistics for the Next Century was convened in Montreal in June 1993. In order to enhance communication and stimulate geostatistical innovation, research and development, the Forum brought together world leading researchers and practitioners from five continents, who discussed-debated current problems, new technologies and futuristic ideas. This volume contains selected peer-reviewed papers from the Forum, together with comments by participants and replies by authors. Although difficult to capture the spontaneity and range of a debate, comments and replies should further assist in the promotion of ideas, dialogue and criticism, and are consistent with the spirit of the Forum. The contents of this volume are organized following the Forum's thematic sessions. The role of theme sessions was not only to stress important topics of tOday but in addition, to emphasize common ground held among diverse areas of geostatistical work and the need to strengthen communication between these areas. For this reason, any given section of this book may include papers from theory to applications, in mining, petroleum, environment, geohydrology, image processing.
Design Automation Methods and Tools for Microfluidics-Based Biochips deals with all aspects of design automation for microfluidics-based biochips. Experts have contributed chapters on many aspects of biochip design automation. Topics covered include: device modeling; adaptation of bioassays for on-chip implementations; numerical methods and simulation tools; architectural synthesis, scheduling and binding of assay operations; physical design and module placement; fault modeling and testing; and reconfiguration methods.
over to nominal operations and began making our groundbreaking science observations. Remarkably, the IBEX project was able to do all this work including developing an entirely new launch capability, building and ying a unique and highly specialized spacecraft and instrument suite, and maintaining full funding for our Education and Public Outreach and Phase E science activities, while still under-running our original cost cap (as modi ed by NASA-directed changes), by roughly three-quarters of a million dollars. This book comprises a set of papers that describe the IBEX science, instruments, and mission and put these in the context of the existing knowledge of the interstellar interaction at the time of the launch. The book sets the stage for research that will be based on data from the IBEX mission. We sincerely hope that future researchers, authors and students will use this information to help in their studies. Chapter 1 [McComas et al. ] provides an overview of the entire IBEX program including the IBEX science, hardware, and mission. Chapter 2 describes the IBEX spacecraft and ight system [Scherrer et al. ]. Chapters 3–4 provide the details of the IBEX-Hi instrument [Funsten et al. ] and background monitor that is built into it [Allegrini et al. ], while Chapters 5–7 describe the IBEX-Lo instrument [Fuselier et al. ], how IBEX-Lo can measure the interstellar neutrals directly entering the heliosphere [Möbius et al.
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.