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Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
Industry 4.1 Intelligent Manufacturing with Zero Defects Discover the future of manufacturing with this comprehensive introduction to Industry 4.0 technologies from a celebrated expert in the field Industry 4.1: Intelligent Manufacturing with Zero Defects delivers an in-depth exploration of the functions of intelligent manufacturing and its applications and implementations through the Intelligent Factory Automation (iFA) System Platform. The book’s distinguished editor offers readers a broad range of resources that educate and enlighten on topics as diverse as the Internet of Things, edge computing, cloud computing, and cyber-physical systems. You’ll learn about three different advanced prediction technologies: Automatic Virtual Metrology (AVM), Intelligent Yield Management (IYM), and Intelligent Predictive Maintenance (IPM). Different use cases in a variety of manufacturing industries are covered, including both high-tech and traditional areas. In addition to providing a broad view of intelligent manufacturing and covering fundamental technologies like sensors, communication standards, and container technologies, the book offers access to experimental data through the IEEE DataPort. Finally, it shows readers how to build an intelligent manufacturing platform called an Advanced Manufacturing Cloud of Things (AMCoT). Readers will also learn from: An introduction to the evolution of automation and development strategy of intelligent manufacturing A comprehensive discussion of foundational concepts in sensors, communication standards, and container technologies An exploration of the applications of the Internet of Things, edge computing, and cloud computing The Intelligent Factory Automation (iFA) System Platform and its applications and implementations A variety of use cases of intelligent manufacturing, from industries like flat-panel, semiconductor, solar cell, automotive, aerospace, chemical, and blow molding machine Perfect for researchers, engineers, scientists, professionals, and students who are interested in the ongoing evolution of Industry 4.0 and beyond, Industry 4.1: Intelligent Manufacturing with Zero Defects will also win a place in the library of laypersons interested in intelligent manufacturing applications and concepts. Completely unique, this book shows readers how Industry 4.0 technologies can be applied to achieve the goal of Zero Defects for all product
WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems
For courses in Semiconductor Manufacturing Technology, IC Fabrication Technology, and Devices: Conventional Flow. This up-to-date text on semiconductor manufacturing processes takes into consideration the rapid development of the industry's technology. It thoroughly describes the complicated and new IC chip fabrication processes in detail with minimum mathematics, physics, and chemistry. Advanced technologies are covered along with older ones to assist students in understanding the development processes from a historic point of view.
From Simon & Schuster, Microcosm is the provocative national bestseller by the author of Wealth and Poverty. George Gilder's Microcosm is the crystal ball of the next technological era. Leading scientists, engineers, and entrepreneurs provide vivid accounts of the latest inventions, revealing how the new international balance of power really lies in information technology.
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
This book has resulted from the activities of IFAC TC 5.2 “Manufacturing Modelling for Management and Control”. The book offers an introduction and advanced techniques of scheduling applications to cloud manufacturing and Industry 4.0 systems for larger audience. This book uncovers fundamental principles and recent developments in the theory and application of scheduling methodology to cloud manufacturing and Industry 4.0. The purpose of this book is to present recent developments in scheduling in cloud manufacturing and Industry 4.0 and to systemize these developments in new taxonomies and methodological principles to shape this new research domain. This book addresses the needs of both researchers and practitioners to uncover the challenges and opportunities of scheduling techniques’ applications to cloud manufacturing and Industry 4.0. For the first time, it comprehensively conceptualizes scheduling in cloud manufacturing and Industry 4.0 systems as a new research domain. The chapters of the book are written by the leading international experts and utilize methods of operations research, industrial engineering and computer science. Such a multi-disciplinary combination is unique and comprehensively deciphers major problem taxonomies, methodologies, and applications to scheduling in cloud manufacturing and Industry 4.0.
The "Students' Version is a "black and white" only version with a slightly reduced number of pages as compared to the full version of this text book. The primary purpose of our book is to provide the "fast lane" to practical quality engineering and management in the semi-conductor industries. In line with this objective, this book is meant to be more a guide to practical quality engineering and management, rather than a scientific treatise. Although it has been written for the semiconductor technology community, it goes without saying that it is useful for almost all other industrial areas, since in a way semiconductor technology (in particular micro-electronics) is a good model case how 100% stringent QM can be implemented in practice.
Program PIC microcontrollers to drive small motors Get your motors running in no time using this easy-to-follow guide. Detailed circuit diagrams and hands-on tutorials show you, step by step, how to program PIC microcontrollers to power a wide variety of small motors. You'll learn how to configure all the hardware and software components and test, troubleshoot, and debug your work. Running Small Motors with PIC Microcontrollers is filled with more than 2,000 lines of PicBasic Pro code you can use right away. Use PIC microcontrollers to control all kinds of small motors, including: Model aircraft R/C servos Small DC motors Servo DC motors with quadrature encoders Bipolar stepper motors Small AC motors, solenoids, and relays