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Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
les Houches This Winter School on "The Physics and Fabrication of Microstructures" originated with a European industrial decision to investigate in some detail the potential of custom-designed microstructures for new devices. Beginning in 1985, GEC and THOMSON started a collaboration on these subjects, supported by an ESPRIT grant from the Commission of the European Com munity. To the outside observer of the whole field, it appears clear that the world effort is very largely based in the United States and Japan. It also appears that cooperation and dissemination of results are very well organised outside Europe and act as a major influence on the development of new concepts and devices. In Japan, a main research programme of the Research and Development for Basic Technology for Future Industries is focused on "Future Electron Devices". In Japan and in the United States, many workshops are organised annually in order to bring together the major specialists in industry and academia, allowing fast dissemination of advances and contacts for setting up cooperative efforts.
The practical properties of many materials are dominated by surface and near-surface composition and structure. An understanding of how the surface region affects material properties starts with an understanding of the elemental composition of that region. Since the most common contaminants are light elements (for example, oxygen, nitrogen, carbon, and hydrogen), there is a clear need for an analytic probe that simultaneously and quantitatively records elemental profiles of all light elements. Energy recoil detection using high-energy heavy ions is unique in its ability to provide quantitative profiles of light and medium mass elements. As such this method holds great promise for the study of a variety of problems in a wide range of fields. While energy recoil detection is one of the newest and most promising ion beam analytic techniques, it is also the oldest in terms of when it was first described. Before discussing recent developments in this field, perhaps it is worth reviewing the early days of this century when the first energy recoil detection experiments were reported.
The first international symposium on the subject "The Physics and Chemistry of Si02 and the Si-Si02 Interface," organized in association with the Electrochemical Society, Inc. , was held in Atlanta, Georgia on May 15- 20, 1988. This symposium contained sixty papers and was so successful that the sponsoring divisions decided to schedule it on a regular basis every four years. Thus, the second symposium on "The Physics and Chemistry of Si02 and the Si02 Interface was held May 18-21, 1992 in St. Louis, Missouri, again sponsored by the Electronics and Dielectrics Science and Technology Divisions of The Electrochemical Society. This volume contains manuscripts of most of the fifty nine papers presented at the 1992 symposium, and is divided into eight chapters - approximating the organization of the symposium. Each chapter is preceded with an introduction by the session organizers. It is appropriate to provide a general assessment of the current status and understanding of the physics and chemistry of Si02 and the Si02 interface before proceeding with a brief overview of the individual chapters. Semiconductor devices have continued to scale down in both horizontal and vertical dimensions. This has resulted in thinner gate and field oxides as well as much closer spacing of individual device features. As a result, surface condition, native oxide composition, and cleaning and impurity effects now provide a much more significant contribution to the properties of oxides and their interfaces.
During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.
From the bestselling author of the acclaimed Chaos and Genius comes a thoughtful and provocative exploration of the big ideas of the modern era: Information, communication, and information theory. Acclaimed science writer James Gleick presents an eye-opening vision of how our relationship to information has transformed the very nature of human consciousness. A fascinating intellectual journey through the history of communication and information, from the language of Africa’s talking drums to the invention of written alphabets; from the electronic transmission of code to the origins of information theory, into the new information age and the current deluge of news, tweets, images, and blogs. Along the way, Gleick profiles key innovators, including Charles Babbage, Ada Lovelace, Samuel Morse, and Claude Shannon, and reveals how our understanding of information is transforming not only how we look at the world, but how we live. A New York Times Notable Book A Los Angeles Times and Cleveland Plain Dealer Best Book of the Year Winner of the PEN/E. O. Wilson Literary Science Writing Award
A comprehensive collection of overview articles on novel microscopy methods for imaging magnetic structures on the nanoscale. Written by leading scientists in the field, the book covers synchrotron based methods, spin-polarized electron methods, and scanning probe techniques. It constitutes a valuable source of reference for graduate students and newcomers to the field.
th th Mars, the Red Planet, fourth planet from the Sun, forever linked with 19 and 20 Century fantasy of a bellicose, intelligent Martian civilization. The romance and excitement of that fiction remains today, even as technologically sophisticated - botic orbiters, landers, and rovers seek to unveil Mars’ secrets; but so far, they have yet to find evidence of life. The aura of excitement, though, is justified for another reason: Mars is a very special place. It is the only planetary surface in the Solar System where humans, once free from the bounds of Earth, might hope to establish habitable, self-sufficient colonies. Endowed with an insatiable drive, focused motivation, and a keen sense of - ploration and adventure, humans will undergo the extremes of physical hardship and danger to push the envelope, to do what has not yet been done. Because of their very nature, there is little doubt that humans will in fact conquer Mars. But even earth-bound extremes, such those experienced by the early polar explorers, may seem like a walk in the park compared to future experiences on Mars.
Landmark contributions to science and mechanisms for the origin of the phenomena, and technology are rarely recognized at the time of reached important conclusions about the physical publication. Few people, even in technical areas, nature of the materials at equilibrium and their recogni zed the importance of developments such as electronic nonequilibrium properties. Many of these the transistor, the laser, or electrophotography ideas were condensed into a publication for Physical until well after their successful demonstration. Review Letters, paper 1 in this collection. This So-called experts, in fact, tend to resist new paper immediately attracted attention to the field, inventions, a natural instinct based on a combina and directly lead to the initiation of large research tion of fear of obsolescent expertise and jealousy efforts at both industrial laboratories and univer- arising from lack of active participation in the ties throughout the world. Inevitably, there was discovery. the usual amount of controversy, with many experts Denigration of new ideas is a relatively simultaneously taking positions (2) and (3) above. safe modus operandi, since the vast majority It has now been well over 20 years since eventually are abandoned well short of commerciality. the original publication date, and an objective view However, a successful device can be identified by can be taken in hindsight.