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Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.
This book contains the Proceedings of the 13th World Conference on Titanium.
Volume 1 of a two-volume work publishes studies of scientific from a number of countries in the area of plasma torch design and properties. Topics covered include mathematical modelling of transformer discharge, physical phenomena in a hollow cathode, modelling of electric arc plasma, problems of turbulent arc modelling, erosion of multiarc cathodes, integrated methods of research of processes in thermal plasma, trends in thermal plasma technology, plasma metallurgy, analysis of induction plasma systems, and many others.
An indispensable volume detailing the current and potential applications of atmospheric pressure plasma treatment by experts practicing in fields around the world Polymers are used in a wide variety of industries to fabricate legions of products because of their many desirable traits. However, polymers in general (and polyolefins, in particular) are innately not very adhesionable because of the absence of polar or reactive groups on their surfaces and concomitant low surface energy. Surface treatment of polymers, however, is essential to impart reactive chemical groups on their surfaces to enhance their adhesion characteristic. Proper surface treatment can endow polymers with improved adhesion without affecting the bulk properties. A plethora of techniques (ranging from wet to dry, simple to sophisticated, vacuum to non-vacuum) for polymer surface modification have been documented in the literature but the Atmospheric Pressure Plasma (APP) treatment has attracted much attention because it offers many advantages vis-a-vis other techniques, namely uniform treatment, continuous operation, no need for vacuum, simplicity, low cost, no environmental or disposal concern, and applicability to large area samples. Although the emphasis in this book is on the utility of APP treatment for enhancement of polymer adhesion, APP is also applicable and effective to modulate many other surface properties of polymers: superhydrophilicity, superhydrophobicity, anti-fouling, anti-fogging, anti-icing, cell adhesion, biocompatibility, tribological behavior, etc. The key features of Atmospheric Pressure Plasma Treatment of Polymers: Address design and functions of various types of reactors Bring out current and potential applications of APP treatment Represent the cumulative wisdom of many key academic and industry researchers actively engaged in this key and enabling technology
A panel of internationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and an overview of the newest achievements for industrial applications. It is divided into two main sections. One is focused on fundamental technology, including plasma production and control, high-pressure discharges, modeling and simulation, diagnostics, dust control, and etching. The section on application technology covers polymer treatments, silicon solar cell, coating and spray, biomaterials, sterilization and waste treatment, plasma propulsion, plasma display panels, and anti-corrosion coatings. The result is an indispensable work for physicists, chemists and engineers involved in the field of plasma technology.