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In recent years, micro- and nanotechnologies became key technologies, having a significant effect on the development of new products and production technologies, as well as on novel medical diagnosis and treatment methods. Moreover, due to their enormous potential for new applications, micro- and nanotechnologies, in future, will increasingly affect our every days life, with an impact, comparable to that of the industrial revolution in the 19th century, or the developments in microelectronics in the 20th century. Although, micro- and nanotechnologies, in general, are regarded as two independent disciplines, there is obviously an intense interaction between these two fascinating technologies. The term "MicroNano Integration", in this context, addresses the enormous potential of synergy effects, provided by the combination and mutual integration of micro- and nanotechnological elements. In order to discuss the integration aspects of micro- and nanotechnologies, the "International Forum on MicroNano Integration", a conference, held in Potsdam, Germany on December 3-4, 2003 brought together researchers from both communities - from industries as well as from scientific institutions. The contributions to this book reflect the discussions during the conference.
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
Space Microsystems and Micro/Nano Satellites covers the various reasoning and diverse applications of small satellites in both technical and regulatory aspects, also exploring the technical and operational innovations that are being introduced in the field. The Space Microsystem developed by the author is systematically introduced in this book, providing information on such topics as MEMS micro-magnetometers, MIMUs (Micro-inertia-measurement unit), micro-sun sensors, micro-star sensors, micro-propellers, micro-relays, etc. The book also examines the new technical standards, removal techniques or other methods that might help to address current problems, regulatory issues and procedures to ameliorate problems associated with small satellites, especially mounting levels of orbital debris and noncompliance with radio frequency and national licensing requirements, liabilities and export controls, Summarizing the scientific research experiences of the author and his team, this book holds a high scientific reference value as it gives readers comprehensive and thorough introductions to the micro/nano satellite and space applications of MEMS technology. - Covers various reasoning and diverse applications for small satellites in both technical and regulatory aspects - Represents the first publication that systematically introduces the Space Microsystem developed by the author - Examines new technical standards, removal techniques and other methods that might help to address current problems, regulatory issues and procedures
A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.
An introduction to micro and nano replication processes and applications Micro/Nano Replication: Processes and Applications provides an overview of the fundamentals, processes, and applications involved in micro and nano replication in the manufacturing of product parts. A major field of nanotechnology, the study of micro/nano replication is sure to become one of increasing importance as the construction of completely new devices based on innovative concepts and crafted at the molecular level increases. Designed to help the reader understand and learn to work with the growing number of tools for molding plastic components, the book covers the key topics related to replication, including patterning technology, the modification of mold surface properties, and much more. In addition, it addresses the strengths and weaknesses of different molding processes. With a strong focus not only on how micro/nano replication works, but also the broader implications for the industry, the book is packed with examples of real world applications. These are drawn from a variety of fields, including information storage devices, optoelectronic elements, optical communication, and biosensors, in order to provide a complete view of the importance of micro and nano processes. A valuable introduction to a new but fast-growing field, Micro/Nano Replication is an essential resource for anyone looking to get a head start on understanding this emerging discipline.
Micro/Nano mechatronics is currently used in broader spectra, ranging from basic applications in robotics, actuators, sensors, semiconductors, automobiles, and machine tools. As a strategic technology highlighting the 21st century, this technology is extended to new applications in bio-medical systems and life science, construction machines, and aerospace equipment, welfare/human life engineering, and other brand new scopes. Basically, the miniaturizing technology is important to realize high performance, low energy consumption, low cost performance, small space instrumentation, light-weight, and so on. This book presents the summary of our project Center of Excellence for Education and Research of Micro-Nano Mechatronics. The project implements a strategy to realize applications of micro-nano mechatronics, which are based on mechanical engineering or materials science, control systems engineering, and advanced medical engineering. The chapters describe the research advances in micro/nano measurement and control, micro/nano design and manufacturing, nano materials science, and their applications in biomedical engineering. The publication of this book was supported by Nagoya University, the 21st COE program "Micro- and NanoMechatronics for Information-Based Society," and the global COE program “COE for Education and Research of Micro-Nano Mechatronics.”
This book focuses on cell- and molecule-based biosensors using micro/nano devices as transducers. After providing basic information on micro/nano cell- and molecule-based biosensors, it introduces readers to the basic structures and properties of micro/nano materials and their applications. The topics covered provide a comprehensive review of the current state of the art in micro/nano cell- and molecule-based biosensors as well as their future development trends, ensuring the book will be of great interest to the interdisciplinary community active in this area: researchers, engineers, biologists, medical scientists, and all those whose work involves related interdisciplinary research and applications. Dr. Ping Wang is a Professor in Department of Biomedical Engineering at Zhejiang University, Hangzhou, China. Dr. Chunsheng Wu is a Professor in Medical School at Xi’an Jiaotong University, Xi’an, China. Dr. Ning Hu is an Assistant researcher in Department of Biomedical Engineering at Zhejiang University and a Postdoctoral researcher in Medical School at Harvard University, Boston, USA. Dr. K. Jimmy Hsia is a Professor in Department of Biomedical Engineering at Carnegie Mellon University, Pittsburgh, USA.
The development of micro- and nanodevices for blood analysis is an interdisciplinary subject that demands the integration of several research fields, such as biotechnology, medicine, chemistry, informatics, optics, electronics, mechanics, and micro/nanotechnologies. Over the last few decades, there has been a notably fast development in the miniaturization of mechanical microdevices, later known as microelectromechanical systems (MEMS), which combine electrical and mechanical components at a microscale level. The integration of microflow and optical components in MEMS microdevices, as well as the development of micropumps and microvalves, have promoted the interest of several research fields dealing with fluid flow and transport phenomena happening in microscale devices. Microfluidic systems have many advantages over their macroscale counterparts, offering the ability to work with small sample volumes, providing good manipulation and control of samples, decreasing reaction times, and allowing parallel operations in one single step. As a consequence, microdevices offer great potential for the development of portable and point-of-care diagnostic devices, particularly for blood analysis. Moreover, the recent progress in nanotechnology has contributed to its increasing popularity, and has expanded the areas of application of microfluidic devices, including in the manipulation and analysis of flows on the scale of DNA, proteins, and nanoparticles (nanoflows). In this Special Issue, we invited contributions (original research papers, review articles, and brief communications) that focus on the latest advances and challenges in micro- and nanodevices for diagnostics and blood analysis, micro- and nanofluidics, technologies for flow visualization, MEMS, biochips, and lab-on-a-chip devices and their application to research and industry. We hope to provide an opportunity to the engineering and biomedical community to exchange knowledge and information and to bring together researchers who are interested in the general field of MEMS and micro/nanofluidics and, especially, in its applications to biomedical areas.
This book is a printed edition of the Special Issue "Micro/Nano Devices for Chemical Analysis" that was published in Micromachines
This tutorial book offers an in-depth overview of the fundamental principles of micro/nano technologies and devices related to sensing, actuation and diagnosis in fluidics and biosystems. Research in the MEMS/NEMS and lab-on-chip fields has seen rapid growth in both academic and industrial domains, as these biodevices and systems are increasingly replacing traditional large size diagnostic tools. This book is unique in describing not only the devices and technologies but also the basic principles of their operation. The comprehensive description of the fabrication, packaging and principles of micro/nano biosystems presented in this book offers guidance for researchers designing and implementing these biosystems across diverse fields including medical, pharmaceutical and biological sciences. The book provides a detailed overview of the fundamental mechanical, optical, electrical and magnetic principles involved, together with the technologies required for the design, fabrication and characterization of micro/nano fluidic systems and bio-devices. Written by a collaborative team from France and Korea, the book is suitable for academics, researchers, advanced level students and industrial manufacturers.