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This text aims at providing a comprehensive and up to date treatment of the new and rapidly expanding field of laser pro cessing of thin films, particularly, though by no means exclu sively, of recent progress in the dielectrics area. The volume covers all the major aspects of laser processing technology in general, from the background and history to its many potential applications, and from the theory to the necessary experimental considerations. It highlights and compares the vast array of processing conditions now available with intense photon beams, as well as the properties of the films and microstructures pro duced. Separate chapters deal with the fundamentals of laser interactions with matter, and with experimental considerations. Detailed consideration is also given to film deposition, nuclea tion and growth, oxidation and annealing, as well as selective and localized. etching and ablation, not only in terms of the various photon-induced processes, but also with respect to traditional as well as other competing new technologies.
Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This fourth edition has been revised and enlarged to cover new topics such as 3D microfabrication, advances in nanotechnology, ultrafast laser technology and laser chemical processing (LCP). Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.
The first book on this hot topic includes such major research areas as printed electronics, sensors, biomaterials and 3D cell printing. Well-structured and with a strong focus on applications, the text is divided in three sections with the first describing the fundamentals of laser transfer. The second provides an overview of the wide variety of materials that can be used for laser transfer processing, while the final section comprehensively discusses a number of practical uses, including printing of electronic materials, printing of 3D structures as well as large-area, high-throughput applications. The book is rounded off by a look at the future for laser printed materials. Invaluable reading for a broad audience ranging from material developers to mechanical engineers, from academic researchers to industrial developers and for those interested in the development of micro-scale additive manufacturing techniques.
An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.
The book presents up-to-date thermal control film materials, technologies and applications in spacecraft. Commonly used thermal control film materials and devices for spacecraft are discussed in detail, including single-structure passive thermal control film materials, composite structure passive thermal control film materials, intelligent thermal control film materials, and microstructure thermal control thin film devices.
This concise reference summarizes the latest results in nano-structured thin films, the first to discuss both deposition methods and electronic applications in detail. Following an introduction to this rapidly developing field, the authors present a variety of organic and inorganic materials along with new deposition techniques, and conclude with an overview of applications and considerations for their technology deployment.
A follow-on to Micro- and Nanotechnology for Space Systems, this second monograph in the series uses the more universal term microengineering to define the discipline and processes that lead to the development of an integrated and intelligent microinstrument. Microengineering Technology for Space Systems addresses specific issues concerning areas for ASIM application in current space systems, operation in the space environment, ultra-high-density packaging and nonsilicon materials-processing tools, and the feasibility of the nanosatellite concept.
Laser materials interaction and processing is an established and growing field within the materials science community. By taking a detailed look at the fundamentals of laser matter interaction, Recent Advances in Laser Processing of Materials charts the recent progress of laser materials interaction and processing in various emerging materials science domains. With special emphasis placed on nanostructures and future developments, this book provides an interdisciplinary support for basic and applied photo-assisted processing research. Coverage includes: - laser assisted synthesis of new materials (nanoparticles, nanotubes, active molecules, new phases...) - laser assisted surface transformation (nanostructuring, lithography, etching...) - laser assisted bulk material transformation (doping, marking, crystallisation...) - Laser assisted synthesis of new materials (nanoparticles, nanotubes, active molecules, new phases...) - Laser assisted surface transformation (nanostructuring, lithography, etching...) - Laser assisted bulk material transformation (doping, marking, crystallisation...)