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Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and circuits are seldom processed with less than 10 implantation steps. Controlled doping at controlled depths is an essential feature of implantation. Ion beam processing can also be used to improve corrosion resistance, to harden surfaces, to reduce wear and, in general, to improve materials properties. This book presents the physics and materials science of ion implantation and ion beam modification of materials. It covers ion-solid interactions used to predict ion ranges, ion straggling and lattice disorder. Also treated are shallow-junction formation and slicing silicon with hydrogen ion beams. Topics important for materials modification, such as ion-beam mixing, stresses, and sputtering, are also described.
This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.
This Workshop gathered engineers and scientists to discuss their recent research and issues related to photonic networks and their topologies, the enabling devices and applications these networks support. Optical communication, neural, sensor and computer networks were considered. Another part of the workshop was devoted to network components based on optical fibre, semiconductor and organic materials such as lasers, amplifiers and detectors, integrated optic and optoelectronic circuits. Applications in communications, optical sensing and signal processing were addressed, with particular emphasis on avionics, submarine, space as well as office, residential, medical and specialized (captive) services.