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Due to their speed, data density, and versatility, optical metrology tools play important roles in today's high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods
Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text: Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements Addresses interferometry, holography, and speckle methods and applications Explains Moiré metrology and the optical heterodyne measurement method Delves into the specifics of diffraction, scattering, polarization, and near-field optics Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.
Introduction to Optical Metrology examines the theory and practice of various measurement methodologies utilizing the wave nature of light. The book begins by introducing the subject of optics, and then addresses the propagation of laser beams through free space and optical systems. After explaining how a Gaussian beam propagates, how to set up a collimator to get a collimated beam for experimentation, and how to detect and record optical signals, the text: Discusses interferometry, speckle metrology, moiré phenomenon, photoelasticity, and microscopy Describes the different principles used to measure the refractive indices of solids, liquids, and gases Presents methods for measuring curvature, focal length, angle, thickness, velocity, pressure, and length Details techniques for optical testing as well as for making fiber optic- and MEMS-based measurements Depicts a wave propagating in the positive z-direction by ei(ωt – kz), as opposed to ei(kz – ωt) Featuring exercise problems at the end of each chapter, Introduction to Optical Metrology provides an applied understanding of essential optical measurement concepts, techniques, and procedures.
Choosing from the numerous 3D vision methods available can be frustrating for scientists and engineers, especially without a comprehensive resource to consult. Filling this gap, this handbook gives an in-depth look at the most popular 3D imaging techniques. Written by key players in the field and inventors of important imaging technologies, it helps you understand the core of 3D imaging technology and choose the proper 3D imaging technique for your needs. For each technique, the book provides its mathematical foundations, summarizes its successful applications, and discusses its limitations.
This Springer Handbook of Metrology and Testing presents the principles of Metrology – the science of measurement – and the methods and techniques of Testing – determining the characteristics of a given product – as they apply to chemical and microstructural analysis, and to the measurement and testing of materials properties and performance, including modelling and simulation. The principal motivation for this Handbook stems from the increasing demands of technology for measurement results that can be used globally. Measurements within a local laboratory or manufacturing facility must be able to be reproduced accurately anywhere in the world. The book integrates knowledge from basic sciences and engineering disciplines, compiled by experts from internationally known metrology and testing institutions, and academe, as well as from industry, and conformity-assessment and accreditation bodies. The Commission of the European Union has expressed this as there is no science without measurements, no quality without testing, and no global markets without standards.
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay
"The Measurement Quality Division, ASQ."
Engineering Metrology and Measurements is a textbook designed for students of mechanical, production and allied disciplines to facilitate learning of various shop-floor measurement techniques and also understand the basics of mechanical measurements.
This handbook is a both a description of the current practice at the National Institute of Standards and Technology, and a compilation of the theory and lore of gauge block calibration. Most of the chapters are nearly self-contained so that the interested reader can, for example, get information on the cleaning and handling of gauge blocks without having to read the chapters on measurement schemes or process control, etc. This partitioning of the material has led to some unavoidable repetition of material between chapters. The basic structure of the handbook is from the theoretical to the practical. Chapter 1: basic concepts and definitions of length and units; Chapter 2: history of gauge blocks, appropriate definitions and a discussion of pertinent national and international standards; Chapter 3: physical characteristics of gauge blocks, including thermal, mechanical and optical properties; Chapter 4: a description of statistical process control (SPC) and measurement assurance (MA) concepts; and Chapters 5 and 6: details of the mechanical comparisons and interferometric techniques used for gauge block calibrations. Full discussions of the related uncertainties and corrections are included. Finally, the appendices cover in more detail some important topics in metrology and gauge block calibration.
This tutorial presents optomechanical modeling techniques to effectively design and analyze high-performance optical systems. It discusses thermal and structural modeling methods that use finite-element analysis to predict the integrity and performance of optical elements and optical support structures. Includes accompanying CD-ROM with examples.