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This work focuses on a variety of issues that impact the electrical properties of Silicon-on-insulator FET-based sensor devices. Biological solutions consist of protein or DNA in an electrolytic solution containing salt ions. Some of these ions, such as Na, have long been known to cause instabilities in MOS devices. The effect of mobile ions on SOI-based sensors is studied. Na is shown to cause permanent hysteresis in the devices while K is not. Devices with the gate oxide protected by self-assembled monolayers (SAMs) do not show hysteresis.
This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. There are three objectives that applied to this research work. The first objective is to design masks using GDSII Editor Software and AutoCAD, respectively. The second objective is to apply a top-down approach method consists of electron beam and conventional mixed lithography process for device fabrication. Then, the final objective of this work is to analyze the electrical characteristic of the fabricated device in terms of I-V relations using semiconductor parameter analyzer (SPA).
Abstract: Highly sensitive biological sensors are important to the development of biological and medical science. The purpose of this work is to develop highly sensitive AlGaN/GaN heterostructure field-effect transistors (HFETs) and silicon on insulator (SOI) nanowire biosensors. Impedance based lipid membrane characterization is also discussed.
This book presents recent advances in the design, fabrication and implementation of flexible printed sensors. It explores a range of materials for developing the electrode and substrate parts of the sensors, on the basis of their electrical and mechanical characteristics. The sensors were processed using laser cutting and 3D printing techniques, and the sensors developed were employed in a number of healthcare, environmental and industrial applications, including: monitoring of physiological movements, respiration, salinity and nitrate measurement, and tactile sensing. The type of sensor selected for each application depended on its dimensions, robustness and sensitivity. The sensors fabricated were also embedded in an IoT-based system, allowing them to be integrated into real-time applications.