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Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices. Sample Chapter(s). Chapter 1: Atom, Molecule, and Nanocluster Manipulations for Nanostructure Fabrication Using Scanning Probe Microscopy (3,320 KB). Contents: Atomic Force Microscope Lithography (N Kawasegi et al.); Nanowire Assembly and Integration (Z Gu & D H Gracias); Extreme Ultraviolet Lithography (H Kinoshita); Electron Projection Lithography (T Miura et al.); Electron Beam Direct Writing (K Yamazaki); Electron Beam Induced Deposition (K Mitsuishi); Focused Ion Beams and Interaction with Solids (T Ishitani et al.); Nanofabrication of Nanoelectromechanical Systems (NEMS): Emerging Techniques (K L Ekinci & J Brugger); and other papers. Readership: Researchers, professionals, and graduate students in the fields of nanoengineering and nanoscience.
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Intensive research on fullerenes, nanoparticles, and quantum dots in the 1990s led to interest in nanotubes and nanowires in subsequent years. Handbook of Nanophysics: Nanotubes and Nanowires focuses on the fundamental physics and latest applications of these important nanoscale materials and structures. Each peer-reviewed chapter contains a broad-
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
A comprehensive coverage of the physical properties and real-world applications of magnetic nanostructures This book discusses how the important properties of materials such as the cohesive energy, and the electronic and vibrational structures are affected when materials have at least one length in the nanometer range. The author uses relatively simple models of the solid state to explain why these changes in the size and dimension in the nanometer regime occur. The text also reviews the physics of magnetism and experimental methods of measuring magnetic properties necessary to understanding how nanosizing affects magnetism. Various kinds of magnetic structures are presented by the author in order to explain how nanosizing influences their magnetic properties. The book also presents potential and actual applications of nanomaterials in the fields of medicine and computer data storage. Physics of Magnetic Nanostructures: Covers the magnetism in carbon and born nitride nanostructures, bulk nanostructured magnetic materials, nanostructured magnetic semiconductors, and the fabrication of magnetic nanostructures Discusses emerging applications of nanomaterials such as targeted delivery of drugs, enhancement of images in MRI, ferrofluids, and magnetic computer data storage Includes end-of-chapter exercises and five appendices Physics of Magnetic Nanostructures is written for senior undergraduate and graduate students in physics and nanotechnology, material scientists, chemists, and physicists.
A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today's research and technology, providing examples of its applications. The remainder of the book is split into two sections. The first section contains the most important and established nanolithography techniques. As well as a detailed description of each technique, the reader can obtain useful information about the main advantages and drawbacks of each technique in terms of resolution, throughput, number of steps needed, cost, etc. At the end of this section, the reader will be able to decide which technique to use for different applications. The second section explores more specific applications of the nanolithography techniques previously described; as well as new techniques and applications. In some cases, the processes described in these chapters involve a combination of several nanolithography techniques. This section is less general but provides the reader with real examples.
Advanced magnetic nanostructures is an emerging field in magnetism and nanotechnology, but the literature consists of a rich variety of original papers and parts of reviews and books whose scope is comparatively broad. This calls for a book with specific emphasis on state-of-the-art synthetic methods for fabricating, characterizing and theoretically modeling new magnetic nanostructures. This book is intended to provide a comprehensive overview of the present state of the field. Leading researchers world-wide have contributed a survey of their special ties to guide the reader through the exploding literature in nanomagnetic structures. The focus is on deliberately structured nanomagnets. It includes cluster assembled, self-organized and patterned thin films but excludes, for example, multilayered thin films. We target both industrial and academic researchers in magnetism and related areas, such as nanotechnology, materials science, and theoretical solid-state physics.
Nanostructured materials take on an enormously rich variety of properties and promise exciting new advances in micromechanical, electronic, and magnetic devices as well as in molecular fabrications. The structure-composition-processing-property relationships for these sub 100 nm-sized materials can only be understood by employing an array of modern microscopy and microanalysis tools. Handbook of Microscopy for Nanotechnology aims to provide an overview of the basics and applications of various microscopy techniques for nanotechnology. This handbook highlights various key microcopic techniques and their applications in this fast-growing field. Topics to be covered include the following: scanning near field optical microscopy, confocal optical microscopy, atomic force microscopy, magnetic force microscopy, scanning turning microscopy, high-resolution scanning electron microscopy, orientational imaging microscopy, high-resolution transmission electron microscopy, scanning transmission electron microscopy, environmental transmission electron microscopy, quantitative electron diffraction, Lorentz microscopy, electron holography, 3-D transmission electron microscopy, high-spatial resolution quantitative microanalysis, electron-energy-loss spectroscopy and spectral imaging, focused ion beam, secondary ion microscopy, and field ion microscopy.
This book presents scanning electron microscopy (SEM) fundamentals and applications for nanotechnology. It includes integrated fabrication techniques using the SEM, such as e-beam and FIB, and it covers in-situ nanomanipulation of materials. The book is written by international experts from the top nano-research groups that specialize in nanomaterials characterization. The book will appeal to nanomaterials researchers, and to SEM development specialists.