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This collection of papers examines education in microelectronics and microelectromechanical systems (MEMS).
This is the third edition of the European Workshop on Microelectronics Education (EWME). A steady-state regime has now been reached. An international community of university teachers is constituted; they exchange their experience and their pedagogical tools. They discuss the best ways to transfer the rapidly changing techniques to their students, and to introduce them to the new physical and mathematical concepts and models for the innovative techniques, devices, circuits and design methods. The number of abstracts submitted to EWME 2000 (about one hundred) enabled the scientific committee to proceed to a clear selection. EWME is a European meeting. Indeed, authors from 20 different European countries contribute to this volume. Nevertheless, the participation of authors from Brazil, Canada, China, New Zealand, and USA, shows that the workshop gradually attains an international dimension. th The 20 century can be characterized as the "century of electron". The electron, as an elementary particle, was discovered by J.J. Thomson in 1897, and was rapidly used to transfer energy and information. Thanks to electron, universe and micro-cosmos could be explored. Electron became the omnipotent and omnipresent, almost immaterial, angel of our W orId. This was made possible thanks to electronics and, for the last 30 years, to microelectronics. Microelectronics not only modified and even radically transformed the industrial and the every-day landscapes, but it also led to the so-called "information revolution" with which begins the 21 st century.
The 1st EWME is an International Tribune where: The Education in Microelectronics in 15 universities from 10 different countries are presented. The International Cooperation using the available multimedia is discussed. Pedagogical problems concerning the teaching of 'classical' microelectronics (technology, devices and CAD) as well as those concerning the sensors, microsystems and advanced materials are examined. Besides more general pedagogical views relative to the extended use of models, CAD and simulations are exposed.
In this book key contributions on developments and challenges in research and education on microelectronics, microsystems and related areas are published. Topics of interest include, but are not limited to: emerging fields in design and technology, new concepts in teaching, multimedia in microelectronics, industrial roadmaps and microelectronic education, curricula, nanoelectronics teaching, long distance education. The book is intended for academic education level and targets professors, researchers and PhDs involved in microelectronics and/or more generally, in electrical engineering, microsystems and material sciences. The 2004 edition of European Workshop on Microelectronics Education (EWME) is particularly focused on the interface between microelectronics and bio-medical sciences.
The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
A complete guide to MEMS engineering, fabrication, and applications This comprehensive engineering guide shows, step by step, how to incorporate cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) functionality in your designs. Written by an experienced educator and microelectronics expert, Fundamentals of Microelectromechanical Systems (MEMS) clearly explains the latest technologies and methods. Real-world examples, illustrations, and in-depth questions and problems reinforce key topics throughout. Readers will also take a look at the future of MEMS in the workforce and explore MEMS research and development. Coverage includes: Basic microfabrication Micromachining Transduction principles RF and optical MEMS Mechanics and inertial sensors Thin film properties and SAW/BAW sensors Pressure sensors and microphones Piezoelectric films Material properties expressed as tensor Microfluidic systems and BioMEMS Power MEMS Electronic noises, interface circuits, and oscillators
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.* Presents the analysis and design principles of MEMS devices more systematically than ever before.* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures* A problem section is included at the end of each chapter with answers provided at the end of the book.
Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of all types from small scale systems, but also to affect changes in systems and the environment at that scale. “RF MEMS Switches and Integrated Switching Circuits” builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits, and presents a unified framework of coverage. This volume includes, but is not limited to, RF MEMS approaches, developments from RF MEMS switches to RF switching circuits, and MEMS switch components in circuit systems. This book also: -Presents RF Switches and switching circuit MEMS devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation -Discusses RF switch devices in detail, with both system and component-level circuit integration using micro- and nano-fabrication techniques -Includes an emphasis on design innovation and experimental relevance rather than basic electromagnetic theory and device physics “RF MEMS Switches and Integrated Switching Circuits” is perfect for engineers, researchers and students working in the fields of MEMS, circuits and systems and RFs.