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This thesis presents the design, fabrication and experimental validation of an integrated dual-mode scanning microwave microscopy (SMM)/Atomic Force Microscopy (AFM) system that does not require the use of a conventional laser-based AFM or external scanners. Microfabricated SMM probes are collocated with strain-based piezoresistive AFM probes in a CMOS-MEMS process, and are actuated by integrated electrothermal scanners. Integration of AFM enables dual-mode imaging (topography and electrical properties); it also enables control over tip-sample distance, which is crucial for accurate SMM imaging. The SMM (also known as Scanning Near-field Microwave Microscope and Scanning Evanescent Microwave Microscope) is the most well-known type of Scanning Probe Microscopes (SPM) that can quantify local dielectric and conductivity of materials. It has emerged as the most promising means for the fast, non-contact, and non-destructive study of materials and semiconductor devices. The CMOS-MEMS SMM devices are fabricated by using a standard foundry CMOS process, followed by an in-house mask-less post-processing technique to release them. Single-chip SMM/AFM devices with integrated 1-D and 3-D actuation are introduced. The CMOS-MEMS fabrication process allows external bulky scanners to be replaced with integrated MEMS actuators that are small and immune to vibration and drift. In this work, electrothermal MEMS actuators are utilized to scan the tip over the sample in 3 degrees of freedom, over a 13 [mu]m x 13 [mu]m x 10 [mu]m scan range in the x, y, and z directions, respectively. Furthermore, the availability of polysilicon layers on the CMOS processes allows for on-chip integrated piezoresistive position sensing that obviates the need for the laser system. Vertical tip-sample distance control of a few nanometers is achieved with the integrated piezoresistive position sensors. These devices are used to modulate the tip-sample separation to underlying samples with a periodic signal, improving immunity to long-term system drifts. To improve the sensitivity of the CMOS-MEMS SMM, different types of matching networks for SMMs are thoroughly analyzed and closed form formulas are presented for each type. Based on the analyses, the stub matching method is selected to match the high tip-to-sample impedance to the 50 ohm characteristic impedance of the system. After that, with the help of lumped models and EM simulations, different sections of the CMOS-MEMS SMM system are analyzed and suggestions for selecting the best micro-transmission line and bonding-pad transmission lines are given. A measurement circuit for SMM is then presented and explained, showing how this measurement system can improve the output-signal-to-noise ratio and hence the sensitivity of microwave imaging. Calculations for the entire SMM system indicate that sub-attofarad tip-sample impedance can be measured. It is noteworthy that most of the analyses and suggestions given in this thesis can be applied to any Scanning Microwave Microscopes or, even more generally, to any microwave system that needs to sense a small signal. Finally, the measurement results for the fabricated CMOS-MEMS SMM are presented to verify the proposed methods. Several samples with sub-micron and nanometer feature sizes are imaged. A special test sample with no topography but with buried dielectric materials in grid and stripes is also designed and measured.
This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.
The Kelvin Probe Force Microscope is a type of scanning probe instrument that is used to discern the different work functions of a sample. A sharp probe at the end of a cantilever is lowered onto a substrate where electrostatic forces, caused by the difference in work function cause the cantilever to oscillate at the modulated frequency. Using this instrument, high resolution images can be obtained, mapping the surface electronic characteristics. However, developments of this instrument have generally been limited to obtaining higher resolution images as well as reducing noise in the output, limiting the widespread appeal of this expensive instrument. There exist many applications where extremely cheap, low footprint and easy-to-use Kelvin Probe Force Microscopes would be beneficial. In order to cheaply produce this microscope in batch, a post-processed CMOS-MEMS device is utilized. The polysilicon resistors act as a strain gauge such that a conventional optical system will not have to be employed. The ability to use integrated bimorph actuators on chip allow for movement of the cantilever without the employment of large piezoelectric stages with creep effects. Embedded electronics can be fabricated with the CMOS process alongside the MEMS device, allowing full integration of an on board amplifier and read out system. In general, a large table top system can be minimized onto the size of a
Combining robotics with nanotechnology, this ready reference summarizes the fundamentals and emerging applications in this fascinating research field. This is the first book to introduce tools specifically designed and made for manipulating micro- and nanometer-sized objects, and presents such examples as semiconductor packaging and clinical diagnostics as well as surgery. The first part discusses various topics of on-chip and device-based micro- and nanomanipulation, including the use of acoustic, magnetic, optical or dielectrophoretic fields, while surface-driven and high-speed microfluidic manipulation for biophysical applications are also covered. In the second part of the book, the main focus is on microrobotic tools. Alongside magnetic micromanipulators, bacteria and untethered, chapters also discuss silicon nano- and integrated optical tweezers. The book closes with a number of chapters on nanomanipulation using AFM and nanocoils under optical and electron microscopes. Exciting images from the tiniest robotic systems at the nano-level are used to illustrate the examples throughout the work. A must-have book for readers with a background ranging from engineering to nanotechnology.
Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical hints given for all RF-MEMS development stages. Provides researchers and engineers with invaluable practical hints on how to develop novel RF-MEMS device concepts Covers all critical steps, dealing with design, simulation, optimization, characterization and fabrication of MEMS for radio-frequency applications Addresses frequently disregarded issues, explicitly treating the hard to predict interplay between the three-dimensional device structure and its electromagnetic functionality Bridges theory and experiment, fundamental concepts are introduced with the application in mind, and simulation results are validated against experimental results Appeals to the practice-oriented R&D reader: design and simulation examples are based on widely known software packages such as ANSYS and the hardware description language Verilog.
Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the book's relevance and appeal to both researchers and engineers keen to evaluate the potential of digital holography for integration into their existing machines and processes. Addresses particle characterization where digital holography has proven capability for dynamic measurement of particles in 3D for sizing and shape characterization, with applications in microfluidics as well as crystallization and aerosol detection studies. Discusses digital reflection holography, digital transmission holography, digital in-line holography, and digital holographic tomography and applications. Covers other applications including micro-optical and diffractive optical systems and the testing of these components, and bio-imaging.
This book describes a full range of contemporary techniques for the design of transmitters and receivers for communications systems operating in the range from 1 through to 300 GHz. In this frequency range there is a wide range of technologies that need to be employed, with silicon ICs at the core but, compared with other electronics systems, a much greater use of more specialist devices and components for high performance – for example, high Q-factor/low loss and good power efficiency. Many text books do, of course, cover these topics but what makes this book timely is the rapid adoption of millimetre-waves (frequencies from 30 to 300 GHz) for a wide range of consumer applications such as wireless high definition TV, “5G” Gigabit mobile internet systems and automotive radars. It has taken many years to develop low-cost technologies for suitable transmitters and receivers, so previously these frequencies have been employed only in expensive military and space applications. The book will cover these modern technologies, with the follow topics covered; transmitters and receivers, lumped element filters, tranmission lines and S-parameters, RF MEMS, RFICs and MMICs, and many others. In addition, the book includes extensive line diagrams to illustrate circuit diagrams and block diagrams of systems, including diagrams and photographs showing how circuits are implemented practically. Furthermore, case studies are also included to explain the salient features of a range of important wireless communications systems. The book is accompanied with suitable design examples and exercises based on the Advanced Design System – the industry leading CAD tool for wireless design. More importantly, the authors have been working with Keysight Technologies on a learning & teaching initiative which is designed to promote access to industry-standard EDA tools such as ADS. Through its University Educational Support Program, Keysight offers students the opportunity to request a student license, backed up with extensive classroom materials and support resources. This culminates with students having the chance to demonstrate their RF/MW design and measurement expertise through the Keysight RF & Microwave Industry-Ready Student Certification Program. www.keysight.com/find/eesof-university www.keysight.com/find/eesof-student-certification