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Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Synthetic diamond is diamond produced by using chemical or physical processes. Like naturally occurring diamond it is composed of a three-dimensional carbon crystal. Due to its extreme physical properties, synthetic diamond is used in many industrial applications, such as drill bits and scratch-proof coatings, and has the potential to be used in many new application areas A brand new title from the respected Wiley Materials for Electronic and Optoelectronic Applications series, this title is the most up-to-date resource for diamond specialists. Beginning with an introduction to the properties of diamond, defects, impurities and the growth of CVD diamond with its imminent commercial impact, the remainder of the book comprises six sections: introduction, radiation sensors, active electronic devices, biosensors, MEMs and electrochemistry. Subsequent chapters cover the diverse areas in which diamond applications are having an impact including electronics, sensors and actuators and medicine.
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. - Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications - Discusses wireless techniques and applications of wireless MEMS, including biomedical applications - Describes monitoring structures and the environment with wireless MEMS
What Is the Third Estate? was the most influential pamphlet of 1789. It did much to set the French Revolution on a radically democratic course. It also launched its author, the Abbé Sieyes, on a remarkable political career that spanned the entire revolutionary decade. Sieyes both opened the revolution by authoring the National Assembly's declaration of sovereignty in June of 1789 and closed it in 1799 by engineering Napoleon Bonaparte's coup d'état. This book studies the powerful rhetoric of the great pamphlet and the brilliant but enigmatic thought of its author. William H. Sewell's insightful analysis reveals the fundamental role played by the new discourse of political economy in Sieyes's thought and uncovers the strategies by which this gifted rhetorician gained the assent of his intended readers--educated and prosperous bourgeois who felt excluded by the nobility in the hierarchical social order of the old regime. He also probes the contradictions and incoherencies of the pamphlet's highly polished text to reveal fissures that reach to the core of Sieyes's thought--and to the core of the revolutionary project itself. Combining techniques of intellectual history and literary analysis with a deep understanding of French social and political history, Sewell not only fashions an illuminating portrait of a crucial political document, but outlines a fresh perspective on the history of revolutionary political culture.