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Vacuum technology finds itself in many areas of industry and research. These include materials handling, packaging, gas sampling, filtration, degassing of oils and metals, thin-film coating, electron microscopy, particle acceleration, and impregnation of electrical components. It is vital to design systems that are appropriate to the application, and with so many potential solutions this can become overwhelming. Vacuum Technique provides an overview of vacuum technology, its different design methodologies, and the underlying theory. The author begins with a summary of the properties of low-pressure gases, then moves on to describe mathematical modeling of gas transfer in the vacuum system, the operation of pumps and gauges, computer-aided synthesis and analysis of systems, and the design of different vacuum systems. In particular, the author discusses the structure and characteristics of low, middle, high, and superhigh vacuum systems, as well as the characteristics of joints, materials, movement inputs, and all aspects of production technology and construction standards. Using specific examples rather than describing the various elements, Vacuum Technique supplies engineers, technicians, researchers, and students with needed expertise and a comprehensive guide to designing, selecting, and using an appropriate vacuum system for a specific purpose.
This comprehensive, standard work has been updated to remain an important resource for all those needing detailed knowledge of the theory and applications of vacuum technology. The text covers the existing knowledge on all aspects of vacuum science and technology, ranging from fundamentals to components and operating systems. It features many numerical examples and illustrations to help visualize the theoretical issues, while the chapters are carefully cross-linked and coherent symbols and notations are used throughout the book. The whole is rounded off by a user-friendly appendix of conversion tables, mathematical tools, material related data, overviews of processes and techniques, equipment-related data, national and international standards, guidelines, and much more. As a result, engineers, technicians, and scientists will be able to develop and work successfully with the equipment and environment found in a vacuum.
Practical information about today's vacuum technology The purpose of this book is to help scientists, engineers and technicians learn about and better understand the vacuum technology found in science and industry today. It is written so that anyone, whether new to the art or an experienced practitioner, who wishes to learn about vacuum engineering can do so quickly and easily. It provides an undercut to the many classic texts that are still available today. Armed with the information contained within, the technologist will be able to go to the more advanced materials, if needed, and absorb that knowledge quickly and efficiently. This second edition contains the absolute latest technology, some not found in any vacuum technology book to date. It has updated information about pressure measurement, pumping and residual gas analysis. You will find information about the cutting edge research being done by NIST to develop quantum based standards. Understanding Modern Vacuum Technology explains concepts and methods by presenting the historical background of the development of the technology and how it has evolved into the technology we use today. It draws on historical papers and patents to show how the technology was conceived and then brings the topic up to modern times. In this way the reader will gain full conceptual understandings so that he or she will be able to then create sound vacuum solutions for the technical challenges that they face. A partial list of topics: Gas Laws Microscopic Description of a Gas Flows and Conductance Pressure Measurement Partial Pressure and Mass Analysis Vapor Pressure Photonic Pressure Measurement Flow Characteristics in Vacuum Rough Vacuum Pumps Diffusion Pumps Turbomolecular Pumps Cryopumps Ion Pumps Getter Pumps Calibrated Leaks Leaks and their Detection In order to learn more, visit www.ModernVacuumTechnology.com.
An indispensable resource for scientists and engineers concerned with high vacuum technology Vacuum technology has evolved significantly over the past thirty years and is now indispensable to various fields of scientific research as well as the medical technology, food processing, aerospace, and electronics industries. Foundations of Vacuum Science and Technology offers a comprehensive survey of the physical and chemical principles underlying the production, measurement, and use of high vacuums. It also provides a valuable critical survey of important developments that have occurred in the field over the past several decades. Comprising contributions from many of the world's leading specialists in vacuum techniques, Foundations of Vacuum Science and Technology: * Reviews the laws of kinetics, the principles of gas flow over a wide range of pressures, and the behaviors of both compressible and turbulent flows * Features exhaustive coverage of vacuum pump technology, including liquid ring pumps, dry pumps, turbo pumps, getter pumps, and cryo pumps * Describes leak detectors used in industry * Examines all types of pressure measurement techniques, including the latest quadrupole mass spectrometer techniques for partial pressure analysis * Explores the state of the art in calibration and standards.
Market: Scientists, engineers, and graduate students in vacuum technology. This volume presents numerous techniques developed in the early 1960s for the efficient construction of reliable vacuum seals, and provides critical insights into the design, construction, and assembly of vacuum systems. Extensively researched, this work covers a variety of sealing techniques and design concepts that remain as technologically relevant now as they were nearly three decades ago.
Vacuum Physics and Technology
This third updated and enlarged edition includes about 350 new papers added to the previous list of references. The contents have been revised and updated in the areas of: Thermonuclear pumping; Throughput; Transmission probability; Electronic circuit simulation; Sorption on charcoal; Desorption from porous materials; Desorption from stainless steel, A1 alloys (outgassing rates); Ion bombardment (glow discharge) cleaning; Clay - type pumps; Turbomolecular pumps-improvements; Cryosorption; NEG (Nonevaporable getter) linear pumps; Standards for measurement of pumping speed (Recommended practice, test domes); Spinning rotor gauges; Quartz friction gauges; Increase of sensitivity of thermocouple gauges; Lubrication in vacuum; Calibration of diffusion leaks; Improvements in leak detection. Besides its role in educational activities, the book will also serve as a handbook for those working in this field, or in fields connected to Vacuum Technology.Comments from the press on the second edition:"A valuable reference work for undergraduate libraries...well organized and clearly written and strikes an appropriate balance between completeness and attention to fundamentals. The index and references are unusually complete. Recommended." (Choice) "Roth's new book contains a comprehensive collection of information on rarefied-gas flow, physical and chemical phenomena associated with vacuum technology, the production and measurement of high vacuum and sealing and leak-detection techniques. One finds a wealth of equations, numerical examples, tables, graphs and monographs. The book is more a handbook than a source book of latest developments. It is suitable for teaching, but the wealth of organized data should also make the book highly useful to engineers..." (Physics Today)
Vacuum technology has enormous impact on human life in many aspects and fields, such as metallurgy, material development and production, food and electronic industry, microelectronics, device fabrication, physics, materials science, space science, engineering, chemistry, technology of low temperature, pharmaceutical industry, and biology. All decorative coatings used in jewelries and various daily products—including shiny decorative papers, the surface finish of watches, and light fixtures—are made using vacuum technological processes. Vacuum analytical techniques and vacuum technologies are pillars of the technological processes, material synthesis, deposition, and material analyses—all of which are used in the development of novel materials, increasing the value of industrial products, controlling the technological processes, and ensuring the high product quality. Based on physical models and calculated examples, the book provides a deeper look inside the vacuum physics and technology.
This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.