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Expert coverage of vacuum microelectronics-principles, devices, and applications The field of vacuum microelectronics has advanced so swiftly that commercial devices are being fabricated, and applications are being developed in displays, wireless communications, spacecraft, and electronics for use in harsh environments. It is a rapidly evolving, interdisciplinary field encompassing electrical engineering, materials science, vacuum engineering, and applied physics. This book surveys the fundamentals, technology, and device applications of this nascent field. Editor Wei Zhu brings together some of the world's foremost experts to provide comprehensive and in-depth coverage of the entire spectrum of vacuum microelectronics. Topics include: * Field emission theory * Metal and silicon field emitter arrays * Novel cold cathode materials * Field emission flat panel displays * Cold cathode microwave devices Vacuum Microelectronics is intended for practitioners in the display, microwave, telecommunications, and microelectronics industries and in government and university research laboratories, as well as for graduate students majoring in electrical engineering, materials science, and physics. It provides cutting-edge, expert coverage of the subject and serves as both an introductory text and a professional reference.
The Second International Conference on Vacuum Microelectronics was h eld in Bath from 24 to 26 July. There were over 160 participants from all over the world, with all the top names in the field attending. The conference brought together both solid state and vacuum scientists in the rapidly developing field of micron, sub-micron and nanometer size electronic structures. New advances in solid state fabrication technology offer the prospect of exciting new devices capable of ultra-high speed operation and development is proceeding quickly at present. The topics covered at the conference included experimental and theoretical studies science and technology, including basic physics, fabrication and processing, electron sources, devices and measurement systems. These proceedings provide a timely and comprehensive overview of the current state of research in this new field, which promises to extend appreciably the limits of both solid state and vacuum devices. This book will be of interest to all scientists and engineers working in the area.
Field emission is a phenomenon described by quantum mechanics. Its emission capability is millions times higher than that of any other known types of electron emission. Nowadays this phenomenon is experiencing a new life due to wonderful applications in the atomic resolution microscopy, in electronic holography, and in the vacuum micro- and nanoelectronics in general. The main field emission properties, and some most remarkable experimental facts and applications, are described in this book.
Advances in Electronics and Electron Physics
This conference included these topics: Microfabrication of wedge-shaped silicon field emitting cathode arrays using high temperature lateral oxidation; Fabrication of sharp field emission structures using ion beam milling; Fabrication of densely packed sharp silicon field emitters using dry etching techniques; Silicon field emitting array: Fabrication and operation; Fabrication of ultra-thin insulator films on n-Si substrate for electron tunnelling emitter arrays; Top-layer scandate cathodes by plasma-activated CVD; Lateral cold cathode triode structures fabricated on glass substrate; Back-biased junction sold cathodes: History and present state of the art; Photoemission from back-biased schottky diodes. (jes).