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Ultrasonic nano/microfabrication, handling and driving is an emerging actuation technology, which utilizes ultrasonic vibration and the physical effects of ultrasonic vibration in fluids and solids to implement the fabrication, handling and driving of nano/micro scale objects. This book provides readers with the fundamentals, principles and characteristics of the ultrasonic devices for nano/micro fabrication, handling and driving, and design methods of the devices. • Introduces fundamental concepts and offers examples of ultrasonic nano fabrication, including ultrasonic nano rolling, cutting and coating methods. • Features a wealth of examples to illustrate the ultrasonic concentration and ultrasonic tweezers. • Explains the principles of ultrasonic driving of gas molecules and demonstrates their applications in high-performance gas sensor systems and metal-air flow batteries. • Teaches the principles of ultrasonic driving of microfluids and their applications in metal-air flow batteries and cooling of small solid heat sources. • Provides examples for the finite element method (FEM) modeling and computation of ultrasonic devices for nano/micro fabrication, handling and driving. • Summarizes the current and future trends in ultrasonic nano/microfabrication, handling, and driving. This book shares the advances, methods and applications of ultrasonic micro/nano fabrication techniques for entry-level and advanced readers working on nano/microfabrication, gas sensing, biological sensing, metal-air batteries, electronic component cooling, and other related areas.
Ultrasonic nano/microfabrication, handling and driving is an emerging actuation technology, which utilizes ultrasonic vibration and the physical effects of ultrasonic vibration in fluids and solids to implement the fabrication, handling and driving of nano/micro scale objects. This book provides readers with the fundamentals, principles and characteristics of the ultrasonic devices for nano/micro fabrication, handling and driving, and design methods of the devices. Introduces fundamental concepts and offers examples of ultrasonic nano fabrication, including ultrasonic nano rolling, cutting and coating methods Features a wealth of examples to illustrate the ultrasonic concentration and ultrasonic tweezers Explains the principles of ultrasonic driving of gas molecules and demonstrates their applications in high-performance gas sensor systems and metal-air flow batteries Teaches the principles of ultrasonic driving of microfluids and their applications in metal-air flow batteries and cooling of small solid heat sources Provides examples for the finite element method (FEM) modeling and computation of ultrasonic devices for nano/micro fabrication, handling and driving Summarizes the current and future trends in ultrasonic nano/microfabrication, handling, and driving This book shares the advances, methods and applications of ultrasonic micro/nano fabrication techniques for entry-level and advanced readers working on nano/microfabrication, gas sensing, biological sensing, metal-air batteries, electronic component cooling, and other related areas.
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Ultrasonic imaging is an economic, reliable diagnostic technique. Owing to recent therapeutic applications, understanding the physical principles of medical ultrasonics is becoming increasingly important. Covering the basics of elasticity, linear acoustics, wave propagation, nonlinear acoustics, transducer components, ultrasonic imaging modes, basi
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.