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The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.
Modern electrostatics impact a diverse range of fields, from micromachines and microsystems to the development of protective clothing for the electronics manufacturing industry. Electrostatics 2003 provides coverage on applications of electrostatics in various areas of physics and technology. It also presents recent research and developments in electrostatics. The book provides an overview of the latest advances in electrostatics, covering areas such as new measurement, testing, and characterization techniques; instrumentation design; numerical modeling; electrostatics hazards; and the applications of electrostatics in the environment. This book is an authoritative reference for all scientists and engineers researching techniques and applications of electrostatics.
This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.