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Offering a basic understanding of each important topic in vacuum science and technology, this book concentrates on pumping issues, emphasizes the behavior of vacuum pumps and vacuum systems, and explains the relationships between pumps, instrumentation and high-vacuum system performance. The book delineates the technical and theoretical aspects of the subject without getting in too deep. It leads readers through the subtleties of vacuum technology without using a dissertation on mathematics to get them there. An interesting blend of easy-to-understand technician-level information combined with engineering data and formulae, the book provides a non-analytical introduction to high vacuum technology.
In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.
The approach taken in this book is to approach vacuum systems from a pressure regime viewpoint. That is, after covering some basic chemistry, the first pressure regime covered is the rough vacuum regime. Within the study of rough vacuum systems, the following topics are covered: the gas load, the pumping mechanism, pressure measurement and vacuum system construction. The discussion of rough vacuum is then followed by the study of high-vacuum systems. The same topics are revisited, but this time from a high vacuum perspective. Once both rough vacuum and high vacuum systems are covered, then the topics of leak detection and residual gas analysis are introduced. This approach lends itself to laboratory experimentation. During the review of gas laws from chemistry, there are a number of experiments and demonstrations that can be performed to reinforce basic laws and concepts. Then, during the study of rough vacuum systems, pumpdown times can be calculated and pumpdowns performed in the laboratory. Likewise, during the study of high-vacuum systems, pumpdowns as well as other lab exercises, such as outgassing and residual gas analysis, can be conducted. Coverage of vacuum systems from a pressure regime viewpoint, rather than from a topical viewpoint. Focus on the fundamental science behind vacumm system components. This book is written for users of vacuum systems, especially the technicians that are responsible for maintaining them.
Vacuum systems are in wide spread use in the petrochemical plants, petroleum refineries and power generation plants. The existing texts on this subject are theoretical in nature and only deal with how the equipment functions when in good mechanical conditions, from the viewpoint of the equipment vendor. Also, the existing texts fail to consider the interaction of the vacuum system with the process equipment it serves and the variability of the motive steam conditions, change in cooling water temperature condenser fouling and erosion of the ejectors. Here are some of the many questions answered in this groundbreaking volume: Why does my first stage jet make a surging sound during hot weather? Why does the vacuum suddenly break? I've seen moisture condensing on the jet's body! What’s causing that? Why do I have to steam-out the drain legs from our condensers? Superheated steam is making our vacuum worse. Is this normal? How can I locate and measure air leaks? Reducing the steam pressure to my jets improves vacuum. But why? I can't pull the pre-condenser bundle. The shell side is fouling. What should I do? We're not getting our normal horsepower from our steam turbine. Could this be a jet problem? Raising the seal drum level improves vacuum! Is there an explanation for this? Our turbine exhaust steam pressure to our surface condenser has doubled in the last two years. What should we do? Restricting cooling water flow from our elevated condensers improves vacuum! Is this possible? What's a converging-diverging ejector all about? What's the difference between a barometric condenser and a surface condenser? Which is better?
This comprehensive, standard work has been updated to remain an important resource for all those needing detailed knowledge of the theory and applications of vacuum technology. The text covers the existing knowledge on all aspects of vacuum science and technology, ranging from fundamentals to components and operating systems. It features many numerical examples and illustrations to help visualize the theoretical issues, while the chapters are carefully cross-linked and coherent symbols and notations are used throughout the book. The whole is rounded off by a user-friendly appendix of conversion tables, mathematical tools, material related data, overviews of processes and techniques, equipment-related data, national and international standards, guidelines, and much more. As a result, engineers, technicians, and scientists will be able to develop and work successfully with the equipment and environment found in a vacuum.
Total Pressure Measurements in Vacuum Technology focuses on the measurement of low total pressure in hostile environments or in the presence of magnetic fields. This book emphasizes the general processes and problems involved in measurement techniques and physical principles on which vacuum gauges operate, rather than on the detailed description of the gauges. The design and techniques involved in the use of special instruments that determine "pressure or gas density, such as pressure converters or radioactive gauges, are also described. This publication is mainly intended for graduate students and research scientists who have a good general background in physics and engineering.
Vacuum plays an important role in science and technology. The study of interaction of charged particles, neutrals and radiation with each other and with solid surfaces requires a vacuum environment for reliable investigations. Vacuum has contributed to major advancements made in nuclear science, space, metallurgy, electrical/electronic technology, chemical engineering, transportation, robotics and many other fields. This book is intended to assist students, scientists, technicians and engineers with understanding the basics of vacuum science and technology for application in their projects. The fundamental theories, concepts, devices, applications, and key inventions are discussed.
Ultrahigh Vacuum Practice covers topics about components suitable for ultrahigh vacuum applications, their theory of operation, their assembly and use, and their performance and calibration. The book starts by discussing the fundamentals of vacuum science and technology. The text then describes the physical properties and methods of preparing the materials for ultrahigh vacuum and the various pumps and their performance and application to ultrahigh vacuum systems. The mechanism and performance of the various ultrahigh vacuum gauges and the problem of gauge calibration at low pressures, as well as the accuracy that can be expected are discussed as well. Partial pressure measurements, ultrahigh vacuum components, and liquid nitrogen replenisher are also considered. The book tackles the system requirements and applications, as well as methods for detecting leak. Users or potential users of ultrahigh vacuum equipment and expert vacuum engineers will find the book useful.