Download Free Sputtering Of Metals By Mass Analyzed N2 And N Book in PDF and EPUB Free Download. You can read online Sputtering Of Metals By Mass Analyzed N2 And N and write the review.

Low-energy sputtering studies were conducted with the help of a specially designed ion accelerator. A high-intensity rf ion source was developed for use in conjunction with electrostatic acceleration and magnetic mass separation of ion beams in the 0 to 8 kev energy range. Beams of N+ or N2+ ions have been produced with intensities of 200 to 500 μa (̃1 cm2 in cross section) and energy half-widths of about 20 ev. The sputtering yields of five metals (Cu, Ni, Fe, Mo, and W) were obtained as a function of energy (0-8 kev), bombarding ion (N+ and N2+), and angle of incidence (normal and 45°). Results are presented and some of their theoretical implications are discussed.
An annotated survey of articles and technical papers appearing in the engineering, scientific and industrial journals and books here and abroad.