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This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike. www.wiley.com/go/Franssila_Micro2e
This multi-authored volume provides a comprehensive and in-depth account of the highly interdisciplinary science and technology of liquid film coating. The book covers fundamental principles from a wide range of scientific disciplines, including fluid mechanics aand transport phenomena, capillary hydrodynamics, surface and colloid science. The authors, all acknowledged eperts in their fields, represent a balance between industrial and academic points of view. Throughout the text, many case studies illustrate how scientific principles together with advanced experimental and theoretical methods are applied to develop and optimize manufacturing processes of eve increasing sophiatication and efficiency. In the first part of the book, the authors systematically recount the underlying physical principles and important material properties. The second part of the book gives a comprehensive overview of the most advanced experimental, mathematical and computational methods available today to investigate coating processes. The third part provides an overview and critical literature review for all major classes of liquid film coating processes of industrial importance.
This conference provided a forum where researchers and industrialists working with glass and thin films, could meet and discuss common, complex problems. Many apparently old fundamental procedures and processes are still under investigation, due to their complexity. In particular it is often so that experience dictates the operating conditions, e.g. a special glass treatment or a special coating process rather than the understanding of the treatment or the process itself. It was therefore the aim of this conference to discuss the various problems and to deepen the knowledge that is useful for industrial situations. Based on the fundamental steps of glass fabrication, modification and film deposition, and property studies and the search for possible applications, a wide range of glass and plastic treatments have been carefully considered in this book by experts working in the field.
Free surface flows arise in the natural world, physical and biological sciences and in some areas of modern technology and engineering. Exam ples include the breaking of sea waves on a harbour wall, the transport of sloshing fluids in partly filled containers, and the design of micronozzles for high speed ink-jet printing. Apart from the intrinsic mathematical challenge in describing and solving the governing equations, there are usually important environmental, safety and engineering features which need to be analysed and controlled. A rich variety of techniques has been developed over the past two decades to facilitate this analysis; singular perturbations, dynamical systems, and the development of sophisticated numerical codes. The extreme and sometimes violent nature of some free surface flows taxes these methods to the limit. The work presented at the symposium addressed these limits and can be loosely classified into four areas: (i) Axisymmetric free surface flows. There are a variety of problems in the printing, glass, fertiliser and fine chemical industries in which threads of fluid are made and controlled. Presentations were made in the areas of pinch-off for inviscid and viscous threads of fluid, recoil effects after droplet formation and the control of instability by forced vibration. (ii) Dynamic wetting. The motion of three phase contact lines, which are formed at the junction between two fluids and a solid, plays an important role in fluid mechanics.
Detailing the properties of specific coatings, problems related to adhesion onto various substrates, and potential commercial applications, this text surveys up-to-date techniques involved in preparing intermetallic and ceramic coatings. The book features a list of selected applications covering the latest industrially available practices.
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors