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The Second International Conference on Vacuum Microelectronics was h eld in Bath from 24 to 26 July. There were over 160 participants from all over the world, with all the top names in the field attending. The conference brought together both solid state and vacuum scientists in the rapidly developing field of micron, sub-micron and nanometer size electronic structures. New advances in solid state fabrication technology offer the prospect of exciting new devices capable of ultra-high speed operation and development is proceeding quickly at present. The topics covered at the conference included experimental and theoretical studies science and technology, including basic physics, fabrication and processing, electron sources, devices and measurement systems. These proceedings provide a timely and comprehensive overview of the current state of research in this new field, which promises to extend appreciably the limits of both solid state and vacuum devices. This book will be of interest to all scientists and engineers working in the area.
This conference included these topics: Microfabrication of wedge-shaped silicon field emitting cathode arrays using high temperature lateral oxidation; Fabrication of sharp field emission structures using ion beam milling; Fabrication of densely packed sharp silicon field emitters using dry etching techniques; Silicon field emitting array: Fabrication and operation; Fabrication of ultra-thin insulator films on n-Si substrate for electron tunnelling emitter arrays; Top-layer scandate cathodes by plasma-activated CVD; Lateral cold cathode triode structures fabricated on glass substrate; Back-biased junction sold cathodes: History and present state of the art; Photoemission from back-biased schottky diodes. (jes).
The proceedings of the 14th International Conference on Vacuum Microelectronics, held in 2001. Topics include: theory, simulation and modelling of vacuum microelectronic devices and field emission electron sources; technologies for material and surface modifications; applications; and more.