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Vacuum technology is widely used in many manufacturing and developmental processes and its applications grow in scope and sophistication. It is an inter-disciplinary subject, embracing aspects of mechanical, electrical and chemical engineering, chemistry, and materials science while having a broad foundation in physics. In spite of its technological importance, and perhaps because of its cross-disciplinary nature, substantial teaching and training is not widely available. Basic Vacuum Technology aims to give readers a firm foundation of fundamental knowledge about the subject and the ability to apply it. This book is an introductory text on how to use vacuum techniques. It provides a good grounding in the basic scientific principles and concepts that underlie the production and measurement of vacua. The authors describe how these are applied in representative low, medium, high, and ultra-high vacuum systems and explain the most important practical aspects of the operation of a large variety of pumps, components, and measuring instrumentation. The book introduces numerical methods for analysis and prediction of the behavior of vacuum systems in terms of the properties of their individual elements and enables readers to recognize and resolve problems with malfunctioning systems.
A USERS GUIDE TO VACUUM TECHNOLOGY Choose and understand the vacuum technology that fits your project’s needs with this indispensable guide Vacuum technology is used to provide process environments for other kinds of engineering technology, making it an unsung cornerstone of hundreds of projects incorporating analysis, research and development, manufacturing, and more. Since it is very often a secondary technology, users primarily interested in processes incorporating it will frequently only encounter vacuum technology when purchasing or troubleshooting. There is an urgent need for a guide to vacuum technology made with these users in mind. For decades, A User’s Guide to Vacuum Technology has met this need, with a user-focused introduction to vacuum technology as it is incorporated into semiconductor, optics, solar sell, and other engineering processes. With an emphasis on otherwise neglected subjects and on accessibility to the secondary user of vacuum technology, it balances treatment of older systems that are still in use with a survey of the latest cutting-edge technologies. The result promises to continue as the essential guide to vacuum systems. Readers of the fourth edition of A User’s Guide to Vacuum Technology will also find: Expanded treatment of gauges, pumps, materials, systems, and best??operating practices Detailed discussion of cutting-edge topics like ultraclean vacuum and contamination control An authorial team with decades of combined research and engineering experience A User’s Guide to Vacuum Technology is essential for those entering emerging STEM programs, engineering professionals and graduate students working with a huge range of engineering technologies.
The approach taken in this book is to approach vacuum systems from a pressure regime viewpoint. That is, after covering some basic chemistry, the first pressure regime covered is the rough vacuum regime. Within the study of rough vacuum systems, the following topics are covered: the gas load, the pumping mechanism, pressure measurement and vacuum system construction. The discussion of rough vacuum is then followed by the study of high-vacuum systems. The same topics are revisited, but this time from a high vacuum perspective. Once both rough vacuum and high vacuum systems are covered, then the topics of leak detection and residual gas analysis are introduced. This approach lends itself to laboratory experimentation. During the review of gas laws from chemistry, there are a number of experiments and demonstrations that can be performed to reinforce basic laws and concepts. Then, during the study of rough vacuum systems, pumpdown times can be calculated and pumpdowns performed in the laboratory. Likewise, during the study of high-vacuum systems, pumpdowns as well as other lab exercises, such as outgassing and residual gas analysis, can be conducted. Coverage of vacuum systems from a pressure regime viewpoint, rather than from a topical viewpoint. Focus on the fundamental science behind vacumm system components. This book is written for users of vacuum systems, especially the technicians that are responsible for maintaining them.
In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.
Foundations of Molecular-Flow Networks for Vacuum System Analysis is the only book that covers desorption, adsorption and outgassing in relation to molecular-flow networks. It will be beneficial for academics, students and industry personnel working in the field of ultra-high vacuums for designing the equipment/set-up and as a guide to understand the processes relating to vacuums. The book is fully supported with equations and case studies from industry. Vacuum technology is extensively used in large synchrotrons and other large accelerators, as well as in many other smaller industrial and scientific facilities. Hence, this book is a welcome addition to the literature. - Explains how to design, model and simulate vacuum systems to obtain satisfactory pressure distributions - Offers a practical description of molecular flow, providing techniques to design molecular flow networks of vacuum systems and processes - Explores equivalence with electrical components to help readers with simulation using free software such as LTSPICE
The Newnes Know It All Series takes the best of what our authors have written to create hard-working desk references that will be an engineer's first port of call for key information, design techniques and rules of thumb. Guaranteed not to gather dust on a shelf!Field Application engineers need to master a wide area of topics to excel. The Test and Measurement Know It All covers every angle including Machine Vision and Inspection, Communications Testing, Compliance Testing, along with Automotive, Aerospace, and Defense testing. - A 360-degree view from our best-selling authors - Topics include the Technology of Test and Measurement, Measurement System Types, and Instrumentation for Test and Measurement - The ultimate hard-working desk reference; all the essential information, techniques and tricks of the trade in one volume
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This book presents a comprehensive and up-to-date account of the theory (physical principles), design, and practical implementations of various sensors for scientific, industrial, and consumer applications. This latest edition focuses on the sensing technologies driven by the expanding use of sensors in mobile devices. These new miniature sensors will be described, with an emphasis on smart sensors which have embedded processing systems. The chapter on chemical sensors has also been expanded to present the latest developments. Digital systems, however complex and intelligent they may be, must receive information from the outside world that is generally analog and not electrical. Sensors are interface devices between various physical values and the electronic circuits that "understand" only a language of moving electrical charges. In other words, sensors are the eyes, ears, and noses of silicon chips. Unlike other books on sensors, the Handbook of Modern Sensors is organized according to the measured variables (temperature, pressure, position, etc.). This book is a reference text for students, researchers interested in modern instrumentation (applied physicists and engineers), sensor designers, application engineers and technicians whose job it is to understand, select and/or design sensors for practical systems.