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Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. - Provides a basic introduction to measurement and instruments - Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force - Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) - Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) - Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. - Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology - Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components - Assesses the best techniques for repairing micro-defects
Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques. The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology. - Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research - Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty - Fully updated to cover the latest technological developments, standards, and regulations
This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas.
This book contains reviews of recent experimental and theoretical results related to nanomaterials. It focuses on novel functional materials and nanostructures in combination with silicon on insulator (SOI) devices, as well as on the physics of new devices and sensors, nanostructured materials and nano scaled device characterization. Special attention is paid to fabrication and properties of modern low-power, high-performance, miniaturized, portable sensors in a wide range of applications such as telecommunications, radiation control, biomedical instrumentation and chemical analysis. In this book, new approaches exploiting nanotechnologies (such as UTBB FD SOI, Fin FETs, nanowires, graphene or carbon nanotubes on dielectric) to pave a way between “More Moore” and “More than Moore” are considered, in order to create different kinds of sensors and devices which will consume less electrical power, be more portable and totally compatible with modern microelectronics products.
The manufacturing industry is a cornerstone of national economy and people’s livelihood. It is the way of transforming resources into products or goods which are required to cater to the needs of the society. Traditional manufacturing companies currently face several challenges such as rapid technological changes, inventory problem, shortened innovation, short product life cycles, volatile demand, low prices, highly customized products, and ability to compete in the global markets. Modern manufacturing is highly competitive due to globalization and fast changes in the global market. This book reviews emerging technologies in manufacturing. These technologies include artificial intelligence, smart manufacturing, lean manufacturing, robotics, automation, 3D printing, nanotechnology, industrial Internet of things, and augmented reality. The use of these technologies will have a profound impact on the manufacturing industry. The book consists of 19 chapters. Each chapter addresses a single emerging technology in depth and describes how manufacturing organizations are adopting the technology. The book fills an important niche for manufacturing. It is a comprehensive, jargon-free introductory text on the issues, ideas, theories, and problems on emerging technologies in manufacturing. It is a must-read book for beginners or anyone who wants to be updated about emerging technologies.
Handbook of Manufacturing provides a comprehensive overview of fundamental knowledge on manufacturing, covering various processes, manufacturing-related metrology and quality assessment and control, and manufacturing systems. Many modern processes such as additive manufacturing, micro- and nano-manufacturing, and biomedical manufacturing are also covered in this handbook. The handbook will help prepare readers for future exploration of manufacturing research as well as practical engineering applications.
Written by the leading authority in the subject, Handbook of Surface Metrology covers every conceivable aspect of measuring and characterizing a surface. Focusing both on theory and practice, the book provides useful guidelines for the design of precision instruments and presents data on the functional importance of surfaces. It also clearly explains the essential theory relevant to surface metrology. The book defines most terms and parameters according to national and international standards. Many examples and illustrations are drawn from the esteemed author's large fund of groundbreaking research work. This unparalleled, all-encompassing "metrology bible" is beneficial for engineering postgraduate students and researchers involved in tribology, instrumentation, data processing, and metrology.
The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained wit