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Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,
Fourteen technical reports of research activity at (what used to the called) the Lebedev Physics Institute. Most of the research derives from stellarator work. The Russian edition appeared in 1985. Production work acceptable, though the crispness of the printing is surpassed by most newspapers. (NW)
Plasma engineering is a rapidly expanding area of science and technology with increasing numbers of engineers using plasma processes over a wide range of applications. An essential tool for understanding this dynamic field, Plasma Physics and Engineering provides a clear, fundamental introduction to virtually all aspects of modern plasma science and technology, including plasma chemistry and engineering, combustion, chemical physics, lasers, electronics, methods of material treatment, fuel conversion, and environmental control. The book contains an extensive database on plasma kinetics and thermodynamics, many helpful numerical formulas for practical calculations, and an array of problems and concept questions.
Introducing the principles and applications of plasma physics, this new edition is ideal as an advanced undergraduate or graduate-level text.
"This text on plasma physics is written for students at the senior or first-year graduate level ... It is intended to serve both as an introduction to the theory of plasmas for students planning to do further work in the subject and as a survey for students with out research interests who want to have some knowledge of plasmas"--Preface.
There has been an increase in interest worldwide in fusion research over the last decade and a half due to the recognition that a large number of new, environmentally attractive, sustainable energy sources will be needed to meet ever increasing demand for electrical energy. Based on a series of course notes from graduate courses in plasma physics and fusion energy at MIT, the text begins with an overview of world energy needs, current methods of energy generation, and the potential role that fusion may play in the future. It covers energy issues such as the production of fusion power, power balance, the design of a simple fusion reactor and the basic plasma physics issues faced by the developers of fusion power. This book is suitable for graduate students and researchers working in applied physics and nuclear engineering. A large number of problems accumulated over two decades of teaching are included to aid understanding.
This rigorous explanation of plasmas is relevant to diverse plasma applications such as controlled fusion, astrophysical plasmas, solar physics, magnetospheric plasmas, and plasma thrusters. More thorough than previous texts, it exploits new powerful mathematical techniques to develop deeper insights into plasma behavior. After developing the basic plasma equations from first principles, the book explores single particle motion with particular attention to adiabatic invariance. The author then examines types of plasma waves and the issue of Landau damping. Magnetohydrodynamic equilibrium and stability are tackled with emphasis on the topological concepts of magnetic helicity and self-organization. Advanced topics follow, including magnetic reconnection, nonlinear waves, and the Fokker–Planck treatment of collisions. The book concludes by discussing unconventional plasmas such as non-neutral and dusty plasmas. Written for beginning graduate students and advanced undergraduates, this text emphasizes the fundamental principles that apply across many different contexts.
A general introduction designed to present a comprehensive, logical and unified treatment of the fundamentals of plasma physics based on statistical kinetic theory. Its clarity and completeness make it suitable for self-learning and self-paced courses. Problems are included.
Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.