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We describe here a novel technique for surface modification in which metal plasma is employed and by which various blends of plasma deposition and ion implantation can be obtained. The new technique is a variation of the plasma immersion technique described by Conrad and co-workers. When a substrate is immersed in a metal plasma, the plasma that condenses on the substrate remains there as a film, and when the substrate is then implanted, qualitatively different processes can follow, including' conventional' high energy ion implantation, recoil implantation, ion beam mixing, ion beam assisted deposition, and metallic thin film and multilayer fabrication with or without species mixing. Multiple metal plasma guns can be used with different metal ion species, films can be bonded to the substrate through ion beam mixing at the interface, and multilayer structures can be tailored with graded or abrupt interfaces. We have fabricated several different kinds of modified surface layers in this way. 22 refs., 4 figs.
Intense energetic beams of metal ions can be produced by using a metal vapor vacuum arc as the plasma discharge from which the ion beam is formed. We have developed a number of ion sources of this kind and have built a metal ion implantation facility which can produce repetitively pulsed ion beams with mean ion energy up to several hundred key, pulsed beam current of more than an ampere, and time averaged current of several tens of milliamperes delivered onto a downstream target. We've also done some preliminary work on scaling up this technology to very large size. For example, a 50-cm diameter (2000 cm[sup 2]) set of beam formation electrodes was used to produce a pulsed titanium beam with ion current over 7 amperes at a mean ion energy of 100 key. Separately, a dc embodiment has been used to produce a dc titanium ion beam with current over 600 mA, power supply limited in this work, and up to 6 amperes of dc plasma ion current was maintained for over an hour. In a related program we've developed a plasma immersion method for applying thin metallic and compound films in which the added species is atomically mixed to the substrate. By adding a gas flow to the process, well-bonded compound films can also be formed; metallic films and multilayers as well as oxides and nitrides with mixed transition zones some hundreds of angstroms thick have been synthesized. Here we outline these parallel metal-plasma-based research programs and describe the hardware that we've developed and some of the surface modification research that we've done with it.
POLYMER SURFACE MODIFICATION TO ENHANCE ADHESION This unique, comprehensive and groundbreaking book is the first on this important subject. Polymer Surface Modification to Enhance Adhesion comprises 13 chapters and is divided into two parts: Part 1: Energetic Treatments; and Part 2: Chemical Treatments. Topics covered include atmospheric pressure plasma treatment of polymers to enhance adhesion; corona treatment of polymer surfaces to enhance adhesion; flame surface treatment of polymers to enhance adhesion; vacuum UV photo-oxidation of polymer surfaces to enhance adhesion; optimization of adhesion of polymers using photochemical surface modification UV/Ozone surface treatment of polymers to enhance adhesion; adhesion enhancement of polymer surfaces by ion beam treatment; polymer surface modification by charged particles; laser surface modification of polymeric materials; competition in adhesion between polysort and monosort functionalized polyolefinic surfaces; amine-terminated dendritic materials for polymer surface modification; arginine-glycine-aspartic acid (RGD) modification of polymer surfaces; and adhesion promoters for polymer surfaces. Audience The book will be of great interest to polymer scientists, surface scientists, adhesionists, materials scientists, plastics engineers, and to those involved in adhesive bonding, packaging, printing, painting, metallization, biological adhesion, biomedical devices, and polymer composites.
Metal Plasma Immersion Ion Implantation and Deposition (MePIIID) is a hybrid process combining cathodic arc deposition and plasma immersion ion implantation. The properties of metal plasma produced by vacuum arcs are reviewed and the consequences for MePIIID are discussed. Different version of MePIIID are described and compared with traditional methods of surface modification such as ion beam assisted deposition (IBAD). MePIIID is a very versatile approach because of the wide range of ion species and energies used. In one extreme case, films are deposited with ions in the energy range 20--50 eV, and at the other extreme, ions can be implanted with high energy (100 keV or more) without film deposition. Novel features of the technique include the use of improved macroparticle filters; the implementation of several plasma sources for multi-element surface modification; tuning of ion energy during implantation and deposition to tailor the substrate-film intermixed layer and structure of the growing film; simultaneous pulsing of the plasma potential (positive) and substrate bias (negative) with a modified Marx generator; and the use of high ion charge states.
Presentations from the Symposium on Low Energy Ion Beam and Plasma Modification of Materials held at the Spring 1991 Materials Research Society Conference.
Plasma immersion techniques of surface modification are known under a myriad of names. The family of techniques reaches from pure plasma ion implantation, to ion implantation and deposition hybrid modes, to modes that are essentially plasma film deposition with substrate bias. In the most general sense, all plasma immersion techniques have in common that the surface of a substrate (target) is exposed to plasma and that relatively high substrate bias is applied. The bias is usually pulsed. In this review, the roots of immersion techniques are explored, some going back to the 1800s, followed by a discussion of the groundbreaking works of Adler and Conrad in the 1980s. In the 1990s, plasma immersion techniques matured in theoretical understanding, scaling, and the range of applications. First commercial facilities are now operational. Various immersion concepts are compiled and explained in this review. While gas (often nitrogen) ion implantation dominated the early years, film-forming immersion techniques and semiconductor processing gained importance. In the 1980s and 1990s we have seen exponential growth of the field but signs of slowdown are clear since 1998. Nevertheless, plasma immersion techniques have found, and will continue to have, an important place among surface modification techniques.
Navigating through an extensive compilation of surface modification reactions and processes for specific tribological results, this reference compiles detailed studies, many not found in other texts, on various residual stresses, reaction processes and mechanisms, heat treatment methods, plasma-based techniques, laser impingement, nanometer scale surface modification, and more. Surface Modification and Mechanisms: Friction, Stress, and Reaction Engineering offers guidelines for the consideration and design of wear and frictional performance and provides a unique understanding of surface structural changes that occur during various engineering procedures.
In current materials R&D, high priority is given to surface modification techniques to achieve improved surface properties for specific applications requirements. Plasma treatment and polymerization are important technologies for this purpose. This book provides a basic and thorough presentation of this subject. This is probably the first book
Despite advances in alternative materials, metals are still the biomaterial of choice for a number of clinical applications such as dental, orthopedic and cardiac implants. However, there are a number of intrinsic problems associated with implanting metal in the biological environment, such as wear, corrosion, biocompatibility and toxicity, which must be addressed. Modern technology has enabled scientists to modify metal surfaces or apply special coatings to metals to improve their performance safety. Surface Coating and Modification of Metallic Biomaterials will discuss the most important modification techniques and coatings for metals, first covering the fundamentals of metals as a biomaterial and then exploring surface modification techniques and coatings. An expansive overview of surface modification techniques for biomedical use In-depth exploration of issues arising from metal biomaterial use Includes examples of applications in a clinical setting