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Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications. Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The text concludes with an up-to-date discussion of the need for integrated MEMS design and opportunities to leverage new materials, processes and MEMS technology. Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.
Drawing on their experiences in successfully executing hundreds of MEMS development projects, the authors present the first practical guide to navigating the technical and business challenges of MEMS product development, from the initial concept stage all the way to commercialization. The strategies and tactics presented, when practiced diligently, can shorten development timelines, help avoid common pitfalls, and improve the odds of success, especially when resources are limited. MEMS Product Development illuminates what it really takes to develop a novel MEMS product so that innovators, designers, entrepreneurs, product managers, investors, and executives may properly prepare their companies to succeed.
Doctoral Thesis / Dissertation from the year 2013 in the subject Design (Industry, Graphics, Fashion), grade: N/A, Cranfield University, language: English, abstract: This work aims at the advancement of state-of-art accelerometer design and optimization methodology by developing an ear-plug accelerometer for race car drivers based on a novel mechanical principle. The accelerometer is used for the measurements of head acceleration when an injurious event occurs. Main requirements for such sensor are miniaturization (2×2 mm), because the device must be placed into the driver earpiece, and its measurement accuracy (i.e. high sensitivity, low crosstalk and low nonlinearity) since the device is used for safety monitoring purpose. A micro-electro-mechanical system (MEMS)-based (bulk micromachined) piezoresistive accelerometer was selected as enabling technology for the development of the sensor. The primary accelerometer elements that can be manipulated during the design stage are: the sensing element (piezoresistors), the micromechanical structure and the measurements circuit. Each of these elements has been specifically designed in order to maximize the sensor performance and to achieve the miniaturization required for the studied application. To achieve accelerometer high sensitivity and miniaturization silicon nanowires (SiNWs) as nanometer scale piezoresistors are adopted as sensing elements. Currently this technology is at an infancy stage, but very promising through the exploitation of the “Giant piezoresistance effect” of SiNWs. This work then measures the potential of the SiNWs as nanoscale piezoresistors by calculating the major performance indexes, both electrical and mechanical, of the novel accelerometer. The results clearly demonstrate that the use of nanoscale piezoresistors boosts the sensitivity by 30 times in comparison to conventional microscale piezoresistors. A feasibility study on nanowires fabrication by both top-down and bottom-up approaches is also carried out. The micromechanical structure used for the design of the accelerometer is an optimized highly symmetric geometry chosen for its self-cancelling property. This work, for the first time, presents an optimization process of the accelerometer micromechanical structure based on a novel mechanical principle, which simultaneously increases the sensitivity and reduces the cross-sensitivity progressively. In the open literature among highly symmetric geometries no other study has to date reported enhancement of the electrical sensitivity and reduction of the cross-talk at the same time.
This two volumes constitute the refereed proceedings of the First International Conference on Intelligent Robotics and Applications, ICIRA 2008, held in Wuhan, China, in October 2008. The 265 revised full papers presented were thoroughly reviewed and selected from 552 submissions; they are devoted but not limited to robot motion planning and manipulation; robot control; cognitive robotics; rehabilitation robotics; health care and artificial limb; robot learning; robot vision; human-machine interaction & coordination; mobile robotics; micro/nano mechanical systems; manufacturing automation; multi-axis surface machining; realworld applications.
This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.
Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.
This book presents a comprehensive and in-depth analysis of electrical circuit theory in biomedical engineering, ideally suited as textbook for a graduate course. It contains methods and theory, but the topical focus is placed on practical applications of circuit theory, including problems, solutions and case studies. The target audience comprises graduate students and researchers and experts in electrical engineering who intend to embark on biomedical applications.
Microbolometers: Fundamentals, Materials, and Recent Developments describes the fundamentals of microbolometers, their historic evolution, operational principles and material choices. It also explains the impact of materials on the processing and development of device characteristics. Sections address various aspects of optical properties and recommend models of properties of materials of interest for the fabrication of the uncooled microbolometers. In addition, the book presents two case studies, Honeywell and Texas Instruments, that focus on the design and manufacture of microbolometers. Finally, recent developments, applications, patents and future trends are presented. The chapter on patents will summarize the strengths and weaknesses of each of the technologies. "Please note that there is an error on the Dedication page, it should read: "To my sister, Math. G.Y. Premalatha, and my brother-in-law, the late Professor G.N. Yoganarasimhan, Professor of Water Resources Engineering and Management, for showing me the direction - Describes the fundamentals of uncooled infrared detectors, operational principles and material approaches - Includes case studies based on Honeywell and Texas Instruments' work on microbolometers - Provides analyses of current patents with a look towards their strengths and weaknesses
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Fresh? Juice? Paste? Canned? Stewed? Diced? Pureed? Sun Dried? Salsa? Sauce? Ketchup? Rare is the cuisine that does not make use of the tomato in some way, shape, or form, and the resulting culinary popularity of the tomato has led to its proliferation in fields and farms around the world. While some may still argue whether the tomato is a fruit or a vegetable, few would argue that tomato crops are highly lucrative, attractive to farmers in both developing and developed countries and on large and small farms alike. In fact, for those crops with significant global volume and market share, tomatoes are the highest valued among those crops that lack an affiliation to mind-altering drugs. But, the tomato can be a persnickety critter. The tomato doesn’t like it too hot, too chilly, too wet, too dry, or too fertile. Many don’t ripen at the same time. Most are easily bruised. And, the selective breeding that has yielded a larger, more attractive, and deep red tomato has also mercilessly drained much of the taste and flavor from a once sweet and delectable fruit. Enter the world of sensors and modern sensing technology. The Internet of Things (IOT), when using well chosen, well networked, and well aggregated sensors, has shown tremendous potential to support precision agriculture, providing a more detailed picture of crops than was previously possible using conventional crop monitoring techniques. But, the stringent resources and tight profit margins that are a fact of life among many tomato growing operations, large and small, mean that sensor technologies must be chosen and used carefully. There is no doubt that each sensor must earn its keep in producing the perfect tomato. With that in mind, this book explores key opportunities to marry the potential of sensors that are networked within the IOT to the needs of tomato production in ways that are economically fruitful, technologically robust, and sustainable overall.