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This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.
Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.
This book provides a comprehensive description of microsensors for mechanical quantities (flow, pressure, force, inertia) fabricated by silicon micromachining. Since the design of such sensors requires interdisciplinary teamwork, the presentation is made accessible to engineers trained in electrical and mechanical engineering, physics and chemistry. The reader is guided through the micromachining fabrication process. A chapter on microsensor packaging completes the discussion of technological problems. The description of the basic physics required for sensor design includes the mechanics of deformation and the piezoresistive transduction to electrical signals. There is also a comprehensive discussion of resonant sensors, the hydrodynamics and heat transfer relevant for flow sensors, and, finally, electronic interfacing and readout circuitry. Numerous up-to-date case studies are presented, together with the working, fabrication and design of the sensors.
Light on physics and math, with a heavy focus on practical applications, Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies discusses the developments necessary to realize the growth of truly integrated sensors for use in physical, biological, optical, and chemical sensing, as well as future micro- and nanotechnologies. Used to pick up sound, movement, and optical or magnetic signals, portable and lightweight sensors are perpetually in demand in consumer electronics, biomedical engineering, military applications, and a wide range of other sectors. However, despite extensive existing developments in computing and communications for integrated microsystems, we are only just now seeing real transformational changes in sensors, which are critical to conducting so many advanced, integrated tasks. This book is designed in two sections—Optical and Acoustic Sensors and Magnetic and Mechanical Sensors—that address the latest developments in sensors. The first part covers: Optical and acoustic sensors, particularly those based on polymer optical fibers Potential of integrated optical biosensors and silicon photonics Luminescent thermometry and solar cell analyses Description of research from United States Army Research Laboratory on sensing applications using photoacoustic spectroscopy Advances in the design of underwater acoustic modems The second discusses: Magnetic and mechanical sensors, starting with coverage of magnetic field scanning Some contributors’ personal accomplishments in combining MEMS and CMOS technologies for artificial microsystems used to sense airflow, temperature, and humidity MEMS-based micro hot-plate devices Vibration energy harvesting with piezoelectric MEMS Self-powered wireless sensing As sensors inevitably become omnipresent elements in most aspects of everyday life, this book assesses their massive potential in the development of interfacing applications for various areas of product design and sciences—including electronics, photonics, mechanics, chemistry, and biology, to name just a few.
Volume 18 of the Handbook of Magnetic Materials, as the preceding volumes, has a dual purpose. As a textbook it is intended to help those who wish to be introduced to a given topic in the field of magnetism without the need to read the vast amount of literature published. As a work of reference it is intended for scientists active in magnetism research. To this dual purpose, Volume 18 is composed of topical review articles written by leading authorities. In each of these articles an extensive description is given in graphical as well as in tabular form, much emphasis being placed on the discussion of the experimental material in the framework of physics, chemistry and material science. It provides readers with novel trends and achievements in magnetism. - Composed of topical review articles written by leading authorities - Intended to be of assistance to those who wish to be introduced to a given topic in the field of magnetism - As a work of reference it is intended for scientists active in magnetism research - Provide the readership with novel trends and achievements in magnetism
Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic” effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry.
The first book on this topic provides a comprehensive and well-structured overview of the fundamentals, synthesis and emerging applications of magnetoelectric polymer materials. Following an introduction to the basic aspects of polymer based magnetoelectric materials and recent developments, subsequent chapters discuss the various types as well as their synthesis and characterization. There then follows a review of the latest applications, such as memories, sensors and actuators. The book concludes with a look at future technological advances. An essential reference for entrants to the field as well as for experienced researchers.
MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.
This textbook introduces readers to mixed-signal, embedded design and provides, in one place, much of the basic information to engage in serious mixed-signal design using Cypress' PSoC. Designing with PSoC technology can be a challenging undertaking, especially for the novice. This book brings together a wealth of information gathered from a large number of sources and combines it with the fundamentals of mixed-signal, embedded design, making the PSoC learning curve ascent much less difficult. The book covers, sensors, digital logic, analog components, PSoC peripherals and building blocks in considerable detail, and each chapter includes illustrative examples, exercises, and an extensive bibliography.
Nanosensors are innovative devices that exploit the unique properties exhibited by matter at the nanoscale. A growing and exciting field, nanosensors have recently spurred considerable research endeavors across the globe, driving a need for the development of new device concepts and engineering nanostructured materials with controlled properties. Nanosensors: Physical, Chemical, and Biological, Second Edition offers a panoramic view of the field and related nanotechnologies with extraordinary clarity and depth. Presenting an interdisciplinary approach, blending physics, chemistry and biology, this new edition is broad in scope and organised into six parts; beginning with the fundamentals before moving onto nanomaterials and nanofabrication technologies in the second part. The third and fourth parts provide a critical appraisal of physical nanosensors, and explore the chemical and biological categories of nanosensors. The fifth part sheds light on the emerging applications of nanosensors in the sectors of society, industry, and defense and details the cutting-edge applications of state-of-the-art nanosensors in environmental science, food technology, medical diagnostics, and biotechnology. The final part addresses self-powering and networking issues of nanosensors, and provides glimpses of future trends. This is an ideal reference for researchers and industry professionals engaged in the frontier areas of material science and semiconductor fabrication as well as graduate students in physics and engineering pursuing electrical engineering and electronics courses with a focus on nanoscience and nanotechnology. Key features: Provides an updated, all-encompassing exploration of contemporary nanosensors and highlights the exclusive nanoscale properties on which nanosensors are designed. Presents an accessible approach with a question-and-answer format to allow an easy grasp of the intricacies involved in the complex working mechanisms of devices. Contains clear, illustrative diagrams enabling the visualization of nanosensor operations, along with worked examples, end of chapter questions, and exhaustive up-to-date bibliographies appended to each chapter.