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Phenomenological Modeling of Plasma Generation for the Real-time Control of RIE Systems

Manish Chandhok

Published: 1996

Total Pages: 570

Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing

M. Meyyappan

Published: 1995

Total Pages: 644

Phenomenological Modeling of Reactive Ion Etching for Real-time Feedback Control

Peter Duane Hanish

Published: 1996

Total Pages: 398

Real-time Feedback Control and Fault Detection in Deep-submicron Plasma Etch

Hyun-Mog Park

Published: 2000

Total Pages: 294

Proceedings of the 1995 American Control Conference

Published: 1995

Total Pages: 610

Nonlinear Estimation with Applications to In-situ Etch Rate and Film Thickness Measurements in Reactive Ion Etching

Tyrone Lange Vincent

Published: 1997

Total Pages: 294

Improved Optical Methods for Characterizing Polycrystalline Silicon, with Emphasis on Optical Scattering Losses

Tyrone E. Benson

Published: 1996

Total Pages: 414

American Doctoral Dissertations

Published: 1996

Total Pages: 872

Science Abstracts

Published: 1995

Total Pages: 1360

Index to IEEE Publications

Institute of Electrical and Electronics Engineers

Published: 1994

Total Pages: 1168