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Physical sciences and engineering, as well as biological sciences have recently made great strides in their respective fields. More importantly, the cross-fertilization of ideas, paradigms and methodologies have led to the unprecedented technological developments in areas such as information processing, full colour semiconductor displays, compact biosensors and controlled drug discovery to name a few. Top experts in their respective fields have come together to discuss the latest developments and the future of micro-nano electronics. They investigate issues to be faced in ultimate limits such as single electron transitors; zero dimensional systems for unique properties; thresholdless lasers, electronics based on inexpensive and flexible plastic chips; cell manipulation; biosensors; DNA based computers; quantum computing; DNA sequencing chips; micro fluidics; nanomotors based on molecules; molecular electronics and recently emerging wide bandgap semiconductors for emitters, detectors and power amplifiers. Contributions from top experts in this field Covers a wide range of topics
The world is on the threshold of a revolution that will change medicine and how patients are treated forever. Bringing together the creative talents of electrical, mechanical, optical and chemical engineers, materials specialists, clinical-laboratory scientists, and physicians, the science of biomedical microelectromechanical systems (bioMEMS) promises to deliver sensitive, selective, fast, low cost, less invasive, and more robust methods for diagnostics, individualized treatment, and novel drug delivery. This book is an introduction to this multidisciplinary technology and the current state of micromedical devices in use today. The first text of its kind dedicated to bioMEMS training. Fundamentals of BioMEMS and Medical Microdevices is Suitable for a single semester course for senior and graduate-level students, or as an introduction to others interested or already working in the field.
219 8. 2 Sensors 221 8. 3 Physical Sensors 222 8. 3. 1 Electrical Sensing Means 223 8. 3. 2 Magnetic Field Methods 231 8. 3. 3 Optical Methods 232 8. 4 Chemical Sensors 241 8. 4. 1 Electrical Gas and Chemical Sensors 243 8. 4. 2 Guided-Optics Intrinsic Chemical Sensors 246 8. 4. 3 Extrinsic Chemical Sensors 250 8. 4. 4 Polymer Waveguide Chemical Sensors 251 8. 4. 5 Surface Plasmon Chemical Sensors 252 8. 4. 6 Indicator-Mediated Extrinsic Sensing 253 8. 4. 7 Optical Biosensors 256 8. 4. 8 Ultrasonic Gas and Chemical Sensors 257 8. 4. 9 Intelligent Sensors 258 8. 5 Connections/Links and Wiring 258 8. 5. 1 Optical Links 260 8. 5. 2 Requirement on the Processing Unit/Intelligence 262 8. 6 Actuators 263 8. 7 Signal Processing/Computing 264 8. 7. 1 Implicit Computation 266 8. 7. 2 Explicit Computation 267 8. 8 References 274 Subject Index 279 Micro-Actuators (Electrical, Magnetic, Thermal, Optical, Mechanical, and Chemical) It has become quite apparent that sensors and actuators are the main bottleneck of the modem information processing and control systems. Microprocessors and computers used to be the main limiting element in most information processing systems. But thanks to the enonnous progress in the microelectronics industry, most information analysis tasks can be processed in real time. The data has to be acquired by the processor in some form and processed and used to produce some useful function in the real world.
The Eighth International Conference on Miniaturized Systems in Chemistry and Life Science - B5Tas 2004 - is an annual meeting focusing on the research, development and application of miniaturized technologies and methodologies in chemistry and life science. The conference is celebrating its tenth anniversary after the first workshop at the University of Twente, The Netherlands in 1994. This research field is rapidly developing and changing towards a domain where core competence areas such as microfluidics, micro- and nanotechnology, materials science, chemistry, biology, and medicine are melting together to a truly interdisciplinary meeting place. This volume is the first in a two volume set, a valuable reference collection to all working in this field.
The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.