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Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.
This book presents an extensive review of the optical- and laser-based techniques that are available for quality control and process monitoring in the industrial production environment. The physical principles of each technique are explained in simple terms, and their applicability to specific industrial needs is discussed on the basis of wide hands-on experience. A large number of practical applications to in-process industrial sensing and metrology are described, and more than onethousand references are included. Topics include on-line surface inspection, 3-D imaging, nondestructive testing, fiber-optic sensors, robot guidance, as well as spectroscopic and light-scattering process analyzers. Key Features * Describes a large number of practical applications to in-process industrial sensing and metrology * Includes more than one thousand references * Covers on-line surface inspection, 3-D imaging, nondestructive testing, fiber-optic sensors, robot guidance, and more
Contents of this volume include: on-line glossmeter for stainless steel sheets; in process optical measurement of micro profile on cold rolled steel plates; optical profile transducer; and optical profilers for surface roughness.
"This book instructs inspectors and designers of optical elements and assemblies with the primary means of inspection and testing, as well as the relevant tools and instruments"--
Optical science and engineering affect almost every aspect of our lives. Millions of miles of optical fiber carry voice and data signals around the world. Lasers are used in surgery of the retina, kidneys, and heart. New high-efficiency light sources promise dramatic reductions in electricity consumption. Night-vision equipment and satellite surveillance are changing how wars are fought. Industry uses optical methods in everything from the production of computer chips to the construction of tunnels. Harnessing Light surveys this multitude of applications, as well as the status of the optics industry and of research and education in optics, and identifies actions that could enhance the field's contributions to society and facilitate its continued technical development.
The book offers a thorough introduction to machine vision. It is organized in two parts. The first part covers the image acquisition, which is the crucial component of most automated visual inspection systems. All important methods are described in great detail and are presented with a reasoned structure. The second part deals with the modeling and processing of image signals and pays particular regard to methods, which are relevant for automated visual inspection.
Devoted to new optical measurement techniques in industry as well as the life sciences, this book has a fresh perspective on the development of modern optical sensors, which are essential for the control of parameters in industrial and biomedical applications.
This new resource explains the principles and applications of today’s digital optical measurement techniques. From start to finish, each chapter provides a concise introduction to the concepts and principles of digital optical metrology, followed by a detailed presentation of their applications. The development of all these topics, including their numerous methods, principles, and applications, has been illustrated using a large number of easy-to-understand figures. This book aims to not only help the reader identify the appropriate techniques in function of the measurement requirements, but also assess modern digital measurement systems.
This pioneering text/reference presents a detailed focus on the use of machine vision techniques in industrial inspection applications. An internationally renowned selection of experts provide insights on a range of inspection tasks, drawn from their cutting-edge work in academia and industry, covering practical issues of vision system integration for real-world applications. Topics and features: presents a comprehensive review of state-of-the-art hardware and software tools for machine vision, and the evolution of algorithms for industrial inspection; includes in-depth descriptions of advanced inspection methodologies and machine vision technologies for specific needs; discusses the latest developments and future trends in imaging and vision techniques for industrial inspection tasks; provides a focus on imaging and vision system integration, implementation, and optimization; describes the pitfalls and barriers to developing successful inspection systems for smooth and efficient manufacturing process.
Devoted to novel optical measurement techniques that are applied both in industry and life sciences, this book contributes a fresh perspective on the development of modern optical sensors. These sensors are often essential in detecting and controlling parameters that are important for both industrial and biomedical applications. The book provides easy access for beginners wishing to gain familiarity with the innovations of modern optics.