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Silane pyrolysis in a continuous flow pyrolyzer is a simple process that is currently being developed for producing solar cell grade silicon. The process involves complex phenomena, however, including thermal decomposition of silane, nucleation and growth of silicon particles, and mass and heat transfer. Modeling the effects of transport phenomena on silane pyrolysis in a continuous flow pyrolyzer is discussed. One- and two-dimensional models are developed to predict velocity, temperature, and concentration profiles in the reactor. The one-dimensional model has been implemented as a computer code.
Silane produced via the redistribution of dichlorosilane and purified by distillation followed by adsorption of residual chlorosilane on activated carbon yields 50 ohm-cm silicon on epitaxial deposition. Extended operation of a small process-development unit routinely produced high-quality silane in 97+% yield from dichlorosilane. The production rate was consistent with design loadings for the fractionating column and for the redistribution reactor. Laboratory and process-development reactor systems were built to study the hydrogenation of co-product silicon tetrachloride. An integrated unit for converting hydrogen and silicon to silane is also under construction. A glass fluid-bed reactor was constructed for room-temperature operation. The behavior of a bed of silicon particles was observed as a function of various feedstocks, component configurations, and operating conditions. For operating modes other than spouting, the bed behaved in an erratic and unstable manner. A second reactor with a modified gas-feed system for increased bed stability is being constructed. In some free-space reactor experiments, friable clusters of silicon particles formed on the tip of the gas injector and on the reactor wall. The temperature at the growth sites was the major parameter controlling the extent of these formations. It was also shown that within limits, the particle size of the reactor product can be modified by controlling the temperatures of the reactor and of the injected silane. A method was developed for casting molten silicon powder into crack-free solid pellets for process evaluation. The silicon powder was melted and cast into thin-walled quartz tubes that sacrificially broke on cooling. The samples are intended for resistance and spark-source mass spectroscopic analysis.
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