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In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.
This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.
Here is a textbook for senior undergraduate and graduate level students that offers a novel and systematic look into the dynamics of MEMS. It includes numerous solved examples together with the proposed problems. The material to be found here will also be of interest to researchers with a non-mechanical background. The book focuses on the mechanical domain, specifically the dynamic sub-domain, and provides an in-depth treatment of problems that involve reliable modeling, analysis and design.
MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.
Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science. Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development. Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.
This volume contains an archival record of the NATO Advanced Study Institute on Microfluidics Based Microsystems – Fundamentals and App- cations held in Çe ?me-Izmir, Turkey, August 23–September 4, 2009. ASIs are intended to be high-level teaching activity in scientific and technical areas of current concern. In this volume, the reader may find interesting chapters and various microsystems fundamentals and applications. As the world becomes increasingly concerned with terrorism, early - spot detection of terrorist’s weapons, particularly bio-weapons agents such as bacteria and viruses are extremely important. NATO Public Diplomacy division, Science for Peace and Security section support research, Advanced Study Institutes and workshops related to security. Keeping this policy of NATO in mind, we made such a proposal on Microsystems for security. We are very happy that leading experts agreed to come and lecture in this important NATO ASI. We will see many examples that will show us Microfluidics usefulness for rapid diagnostics following a bioterrorism attack. For the applications in national security and anti-terrorism, microfluidic system technology must meet the challenges. To develop microsystems for security and to provide a comprehensive state-of-the-art assessment of the existing research and applications by treating the subject in considerable depth through lectures from eminent professionals in the field, through discussions and panel sessions are very beneficial for young scientists in the field.
Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.
This book formulates and consolidates a coherent understanding of how harnessing the dynamics of bistable structures may enhance the technical fields of vibration control, energy harvesting, and sensing. Theoretical rigor and practical experimental insights are provided in numerous case studies. The three fields have received significant research interest in recent years, particularly in regards to the advantageous exploitation of nonlinearities. Harnessing the dynamics of bistable structures--that is, systems with two configurations of static equilibria--is a popular subset of the recent efforts. This book provides a timely consolidation of the advancements that are relevant to a large body of active researchers and engineers in these areas of understanding and leveraging nonlinearities for engineering applications. Coverage includes: Provides a one-source reference on how bistable system dynamics may enhance the aims of vibration control, energy harvesting, and sensing with a breadth of case studies Includes details for comprehensive methods of analysis, numerical simulation, and experimentation that are widely useful in the assessment of the dynamics of bistable structures Details approaches to evaluate, by analytical and numerical analysis and experiment, the influences of harmonic and random excitations, multiple degrees-of-freedom, and electromechanical coupling towards tailoring the underlying bistable system dynamics Establishes how intelligently utilizing bistability could enable technology advances that would be useful in various industries, such as automotive engineering, aerospace systems, microsystems and microelectronics, and manufacturing
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The last two decades have witnessed a rapid development of microelectromechanical systems (MEMS) involving gas microflows in various technical fields. Gas microflows can, for example, be observed in microheat exchangers designed for chemical applications or for cooling of electronic components, in fluidic microactuators developed for active flow control purposes, in micronozzles used for the micropropulsion of nano and picosats, in microgas chromatographs, analyzers or separators, in vacuum generators and in Knudsen micropumps, as well as in some organs-on-a-chip, such as artificial lungs. These flows are rarefied due to the small MEMS dimensions, and the rarefaction can be increased by low-pressure conditions. The flows relate to the slip flow, transition or free molecular regimes and can involve monatomic or polyatomic gases and gas mixtures. Hydrodynamics and heat and mass transfer are strongly impacted by rarefaction effects, and temperature-driven microflows offer new opportunities for designing original MEMS for gas pumping or separation. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel theoretical and numerical models or data, as well as on new experimental results and technics, for improving knowledge on heat and mass transfer in gas microflows. Papers dealing with the development of original gas MEMS are also welcome.