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An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.
Due to their flexible and efficient capabilities, lasers are often used over more traditional machining technologies, such as mechanical drilling and chemical etching, in manufacturing a wide variety of products, from medical implants, gyroscopes, and drug delivery catheters to aircraft engines, printed circuit boards, and fuel cells. Fundamentals
Explaining principles underlying the main micromachining practices currently being used and developed in industrial countries around the world, Micromachining of Engineering Materials outlines advances in material removal that have led to micromachining, discusses procedures for precise measurement, includes molecular-level theories, describes vaporizing workpiece material with spark discharges and photon light energy, examines mask-based and maskless anodic dissolution processes, investigates nanomachining by firing ions at surfaces to remove groups of atoms, analyzes the conversion of kinetic to thermal energy through a controlled fine-focused beam of electrons, and more.
To present their work in the field of micromachining, researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. Their articles will give you the opportunity to understand the concepts of micromachining of advanced materials. Surface texturing using pico- and femto-second laser micromachining is presented, as well as the silicon-based micromachining process for flexible electronics. You can learn about the CMOS compatible wet bulk micromachining process for MEMS applications and the physical process and plasma parameters in a radio frequency hybrid plasma system for thin-film production with ion assistance. Last but not least, study on the specific coefficient in the micromachining process and multiscale simulation of influence of surface defects on nanoindentation using quasi-continuum method provides us with an insight in modelling and the simulation of micromachining processes. The editors hope that this book will allow both professionals and readers not involved in the immediate field to understand and enjoy the topic.
In this volume, Micromachining - New Trends and Applications, researchers from distant parts of the world have combined efforts and contributed their ideas and research work on micromachining. Their chapters will give you the opportunity to learn about materials, techniques, applications, challenges, and recent advancements in micromachining technology as well as about the state of the current micromachining market. Chapters also discuss concepts of micro-scale electronic component manufacturing, advancements in micromachining techniques of micro-electromechanical system (MEMS) piezoresistive pressure sensors to minimize offset drift due to humidity and temperature, the principles and classifications of force measuring systems with zero-compliance suspension, and triangular microcavity fabrication using micro-electrical discharge machining.
Contains useful process details, recipes, tables, charts and includes numerous device applications.
Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)
HYBRID MICROMACHINING and MICROFABRICATION TECHNOLOGIES The book aims to provide a thorough understanding of numerous advanced hybrid micromachining and microfabrication techniques as well as future directions, providing researchers and engineers who work in hybrid micromachining with a much-appreciated orientation. The book is dedicated to advanced hybrid micromachining and microfabrication technologies by detailing principals, techniques, processes, conditions, research advances, research challenges, and opportunities for various types of advanced hybrid micromachining and microfabrication. It discusses the mechanisms of material removal supported by experimental validation. Constructional features of hybrid micromachining setup suitable for industrial micromachining applications are explained. Separate chapters are devoted to different advanced hybrid micromachining and microfabrication to design and development of micro-tools, which is one of the most vital components in advanced hybrid micromachining, and which can also be used for various micro and nano applications. Power supply, and other major factors which influence advanced hybrid micromachining processes, are covered and research findings concerning the improvement of machining accuracy and efficiency are reported.
Bridging the gap between the need for micro elements and the profitable microfabrication of goods, this new book provides an informative overview of the electro-micromachining and microfabrication processes, varieties, and important applications. Opening with an overview of a variety of micromachining technologies, with an emphasis on nontraditional approaches and recent advances in each, the volume discusses the ultrasonic micromachining processes for producing a variety of micro-shapes, such as micro-holes, micro-slots, and micro-walls, as well as assisted hybrid micromachining with ultrasonic vibration of the tool or workpiece, all which help to improve precision and to advance research. Computer-aided design and computer-aided manufacturing dental micromachining technologies are discussed. Micro-electrical discharge machining, laser micro grooving, and laser micromachining are among the advanced micro-manufacturing processes addressed as well. The volume also covers the use of an electrochemical micromachining method to improve micro texturing and the use of nano-additives to enhance MQL and micromachining process optimization.
Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.