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An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.
In this volume, Micromachining - New Trends and Applications, researchers from distant parts of the world have combined efforts and contributed their ideas and research work on micromachining. Their chapters will give you the opportunity to learn about materials, techniques, applications, challenges, and recent advancements in micromachining technology as well as about the state of the current micromachining market. Chapters also discuss concepts of micro-scale electronic component manufacturing, advancements in micromachining techniques of micro-electromechanical system (MEMS) piezoresistive pressure sensors to minimize offset drift due to humidity and temperature, the principles and classifications of force measuring systems with zero-compliance suspension, and triangular microcavity fabrication using micro-electrical discharge machining.
Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.
Explaining principles underlying the main micromachining practices currently being used and developed in industrial countries around the world, Micromachining of Engineering Materials outlines advances in material removal that have led to micromachining, discusses procedures for precise measurement, includes molecular-level theories, describes vaporizing workpiece material with spark discharges and photon light energy, examines mask-based and maskless anodic dissolution processes, investigates nanomachining by firing ions at surfaces to remove groups of atoms, analyzes the conversion of kinetic to thermal energy through a controlled fine-focused beam of electrons, and more.
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Due to their flexible and efficient capabilities, lasers are often used over more traditional machining technologies, such as mechanical drilling and chemical etching, in manufacturing a wide variety of products, from medical implants, gyroscopes, and drug delivery catheters to aircraft engines, printed circuit boards, and fuel cells. Fundamentals
This book presents some of the recent hybrid micro-machining processes used to manufacture miniaturized products with micro level precision. The current developed technologies to manufacture the micro dimensioned products while meeting the desired precision level are described within the text. The authors especially highlight research that focuses on the development of new micro machining platforms while integrating the different technologies to manufacture the micro components in a high throughput and cost effective manner.
This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.
Bridging the gap between the need for micro elements and the profitable microfabrication of goods, this new book provides an informative overview of the electro-micromachining and microfabrication processes, varieties, and important applications. Opening with an overview of a variety of micromachining technologies, with an emphasis on nontraditional approaches and recent advances in each, the volume discusses the ultrasonic micromachining processes for producing a variety of micro-shapes, such as micro-holes, micro-slots, and micro-walls, as well as assisted hybrid micromachining with ultrasonic vibration of the tool or workpiece, all which help to improve precision and to advance research. Computer-aided design and computer-aided manufacturing dental micromachining technologies are discussed. Micro-electrical discharge machining, laser micro grooving, and laser micromachining are among the advanced micro-manufacturing processes addressed as well. The volume also covers the use of an electrochemical micromachining method to improve micro texturing and the use of nano-additives to enhance MQL and micromachining process optimization.
Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. - Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications - Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM - Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)