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This volume, a continuation of the MEMS, NEMS, and molecular machines symposium of the 2002 MRS Fall Meeting, is devoted to the investigation of materials and device behavior at the micro-, nano-, and molecular scale as well as interdisciplinary work futhering the design and development of micro-, nano-, and molecular devices. New materials and fabrication techniques are introduced, and ongoing issues such as reliability, surface effects, processing and packaging, biocompatibility, and stability are discussed. Projects coupling micro-and nanoscale approaches to solve ongoing issues in the development of small-scale systems are featured. Topics include: nanotechnology; alternative fabrication techniques; micro- and nanofluidics; applied micro- and nanotechnology; mechanical properties; biotechnology and nanotechnology; alternative materials and metrology; and surface engineering and tribology.
This must-have book is the first self-contained summary of recent developments in the field of microscale nuclear magnetic resonance hardware, covering the entire technology from miniaturized detectors, the signal processing chain, and detection sequences. Chapters cover the latest advances in interventional NMR and implantable NMR sensors, as well as in using CMOS technology to manufacture miniaturized, highly scalable NMR detectors for NMR microscopy and high-throughput arrays of NMR spectroscopy detectors.
With its inclusion of the fundamentals, systems and applications, this reference provides readers with the basics of micro energy conversion along with expert knowledge on system electronics and real-life microdevices. The authors address different aspects of energy harvesting at the micro scale with a focus on miniaturized and microfabricated devices. Along the way they provide an overview of the field by compiling knowledge on the design, materials development, device realization and aspects of system integration, covering emerging technologies, as well as applications in power management, energy storage, medicine and low-power system electronics. In addition, they survey the energy harvesting principles based on chemical, thermal, mechanical, as well as hybrid and nanotechnology approaches. In unparalleled detail this volume presents the complete picture -- and a peek into the future -- of micro-powered microsystems.
Mikro- und Nanotechnik haben Wissenschaft und Forschung revolutioniert. In Zukunft werden sie auch den Alltag verändern. Nun liegt der erste Band einer neuen Buchreihe vor: Advanced Micro and Nano Systems 1. Henry Baltes und seine Co-Autoren knüpfen mit AMN an die Sensors Update-Reihe an. Das Autorenteam wurde um weitere Experten erweitert. AMN wird zwei Mal pro Jahr mit einem neuen Band die aktuellen Entwicklungen in der Mikro- und Nano-Welt begleiten. Die Erforschung und der Einsatz von Mikro- und Nanosystemen sind eines der brandaktuellen Themen im Wissenschaftsbereich. Die Forschungsergebnisse werden mehr und mehr auch konkret umgesetzt. Damit werden Mikro- und Nanotechnologie zu Wirtschaftsfaktoren. Aktuelle Entwicklungen, neue Technologien, Nano-Bauelemente und Systeme im Mikromaßstab - Advanced Micro and Nano Systems, die neue Buchreihe, wird Spiegel der spannenden und faszinierenden Mikro- und Nano-Welt sein. Zweimal pro Jahr wird es einen neuen AMN-Band geben. Die Autoren sind ausgewiesene Spezialisten. Zu den Herausgebern zählt Henry Baltes, Professor an der ETH Zürich. Er zeichnete bereits für die Bände der Sensors Update-Reihe verantwortlich. Die Artikel ermöglichen Neueinsteigern einen ersten Zugriff auf die Materie. Fachleute erhalten einen umfassenden Überblick. Anspruch der Herausgeber ist es, nicht nur die theoretischen Grundlagen von Mikro- und Nanosystemen zu reflektieren, sondern immer auch praktische Möglichkeiten und die Grenzen der Anwendung im Blick zu haben. Die AMN-Bände sind Handbücher und Nachschlagewerke in einem. Die Reihe richtet sich an Vertreter unterschiedlicher Fachrichtungen: Biologie, Chemie, Mathematik, Sensorindustrie und Materialwissenschaften.
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Micro- and nanosystems represent an area of major scientific and technological opportunity and challenge, with actual and potential applications in almost all fields of human activity. The aim of this book is to present the central concepts of dynamic control systems (modeling, estimation, observation, identification, feedback control) and to show how they can be adapted and applied to the development of novel very small-scale systems and their associated human interfaces. The application fields presented here come from micro- and nano-robotics, biochips, near-field microscopy (AFM and STM) and nano-systems networks. Alina Voda has assembled contributions from leading experts at top research universities to produce the first overview of the major role that control systems science will play in the development of micro and nano-science and technologies.
Providing a detailed overview of the fundamentals and latest developments in the field of energy autonomous microsystems, this book delivers an in-depth study of the applications in the fields of health and usage monitoring in aeronautics, medical implants, and home automation, drawing out the main specifications on such systems. Introductory information on photovoltaic, thermal and mechanical energy harvesting, and conversion, is given, along with the latest results in these fields. This book also provides a state of the art of ultra-low power sensor interfaces, digital signal processing and wireless communications. In addition, energy optimizations at the sensor node and sensors network levels are discussed, thus completing this overview. This book details the challenges and latest techniques available to readers who are interested in this field. A major strength of this book is that the first three chapters are application orientated and thus, by setting the landscape, introduce the technical chapters. There is also a good balance between the technical application, covering all the system-related aspects and, within each chapter, details on the physics, materials and technologies associated with electronics. Contents Introduction. Introduction to Energy Autonomous Micro and Nano Systems and Presentation of Contributions, Marc Belleville and Cyril Condemine. 1. Sensors at the Core of Building Control, Gilles Chabanis, Laurent Chiesi, Hynek Raisigel, Isabelle Ressejac and Véronique Boutin. 2. Toward Energy Autonomous MedicalImplants, Raymond Campagnolo and Daniel Kroiss. 3. Energy Autonomous Systems in Aeronautic Applications, Thomas Becker, Jirka Klaue and Martin Kluge. 4. Energy Harvesting by Photovoltaic Effect, Emmanuelle Rouvière, Simon Perraud, Cyril Condemine and Guy Waltisperger. 5. Mechanical Energy Harvesting, Ghislain Despesse, Jean Jacques Chaillout, Sébastien Boisseau and Claire Jean-Mistral. 6. Thermal Energy Harvesting, Tristan Caroff, Emmanuelle Rouvière and Jérôme Willemin. 7. Lithium Micro-Batteries, Raphaël Salot. 8. Ultra-Low-Power Sensors, Pascal Nouet, Norbert Dumas, Laurent Latorre and Frédérick Mailly. 9. Ultra-Low-Power Signal Processing in Autonomous Systems, Christian Piguet. 10. Ultra-Low-Power Radio Frequency Communications and Protocols, Eric Mercier. 11. Energy Management in an Autonomous Microsystem, Jean-Frédéric Christmann, Edith Beigne, Cyril Condemine, Jérôme Willemin and Christian Piguet. 12. Optimizing Energy Efficiency of Sensor Networks, Olivier Sentieys and Olivier Berder.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Inkjet-based Micromanufacturing Inkjet technology goes way beyond putting ink on paper: it enables simpler, faster and more reliable manufacturing processes in the fields of micro- and nanotechnology. Modern inkjet heads are per se precision instruments that deposit droplets of fluids on a variety of surfaces in programmable, repeating patterns, allowing, after suitable modifications and adaptations, the manufacturing of devices such as thin-film transistors, polymer-based displays and photovoltaic elements. Moreover, inkjet technology facilitates the large-scale production of flexible RFID transponders needed, eg, for automated logistics and miniaturized sensors for applications in health surveillance. The book gives an introduction to inkjet-based micromanufacturing, followed by an overview of the underlying theories and models, which provides the basis for a full understanding and a successful usage of inkjet-based methods in current microsystems research and development Overview of Inkjet-based Micromanufacturing: Thermal Inkjet Theory and Modeling Post-Printing Processes for Inorganic Inks for Plastic Electronics Applications Inkjet Ink Formulations Inkjet Fabrication of Printed Circuit Boards Antennas for Radio Frequency Identification Tags Inkjet Printing for MEMS
Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies. Of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.