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Metrology is an integral part of the structure of today’s world: navigation and telecommunications require highly accurate time and frequency standards; human health and safety relies on authoritative measurements in diagnosis and treatment, as does food production and trade; global climate studies also depend on reliable and consistent data. Moreover, international trade practices increasingly require institutions to display demonstrated conformity to written standards and specifications. As such, having relevant and reliable results of measurements and tests in compliance with mutually recognised standards can be a technical, commercial and statutory necessity for a company. This book, the results of a working group from the French College of Metrology and featuring chapters written by a range of experts from a variety of European countries, gives a comprehensive and international treatment of the subject. Academics involved in metrology as well as people involved in the metrology capacities of companies and institutions will find this book of great interest.
Applied Metrology for Manufacturing Engineering, stands out from traditional works due to its educational aspect. Illustrated by tutorials and laboratory models, it is accessible to users of non-specialists in the fields of design and manufacturing. Chapters can be viewed independently of each other. This book focuses on technical geometric and dimensional tolerances as well as mechanical testing and quality control. It also provides references and solved examples to help professionals and teachers to adapt their models to specific cases. It reflects recent developments in ISO and GPS standards and focuses on training that goes hand in hand with the progress of practical work and workshops dealing with measurement and dimensioning.
The subject of this book is surface metrology, in particular two major aspects: surface texture and roundness. It has taken a long time for manufacturing engineers and designers to realise the usefulness of these features in quality of conformance and quality of design. Unfortunately this awareness has come at a time when engineers versed in the use and specification of surfaces are at a premium. Traditionally surface metrology usage has been dictated by engineers who have served long and demanding apprenticeships, usually in parallel with studies leading to technician-level qualifications. Such people understood the processes and the achievable accuracies of machine tools, thereby enabling them to match production capability with design requirements. This synergy, has been made possible by the understanding of adherence to careful metrological procedures and a detailed knowledge of surface measuring instruments and their operation, in addition to wider inspection room techniques. With the demise in the UK of polytechnics and technical colleges, this source of skilled technicians has all but dried up. The shortfall has been made up of semi skilled craftsmen, or inexperienced graduates who cannot be expected to satisfy tradition al or new technology needs. Miniaturisation, for example, has had a pro found effect. Engineering parts are now routinely being made with nanometre surface texture and fiatness. At these molecular and atomic scales, the engineer has to be a physicist.
The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.
Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. Includes example spreadsheets of measurement uncertainty analysis--specifically, precision, matching, and relative accuracy.
Optical Metrology is a rapidly expanding field i'n both its scientific foundations and technological developments, being of major concern to measurements, quality control, non-destructive tes ting and in fundamental research. In order to define the state-of-the-art, and to evaluate pre sent accomplishments, whilst giving an appraisal of how each of the particular topics will evolve the Optical Metrology-anAdvancedStudy Institute was organized with a concourse of the world's acknowledged experts. Thus, the Institute provided a forum for tutorial reviews blended with topics of current research in the form of a progressive and comprehensive presentation of recent promising developments, lea ding techniques and instrumentation in incoherent and coherent optics for Metrology, Sensing and Control in Science, Industry and Biomedici ne. Optical Metrology is a very broad field which is highly inter disciplinary in its applications, and in its scientific and technolo gical background. It is related to such diverse disciplines as physi cal and chemical sciences, engineering, electronics, computer scien ces, biological sciences and theoretical sciences, such as statistics. Although there was an emphasis on photomechanics and industri al applications, a marked diversity was reflected in the different background and interests of the participants. The vitality and viabi lity of the discipline was enhanced not only by the encouraging number of young scientists and industrialists participating and authoring, but also by the remarkably promising prospects found in x the practical applications supported by advanced electronic hybridi zation.
​This handbook provides comprehensive and up-to-date information on the topic of scientific, industrial and legal metrology. It discusses the state-of-art review of various metrological aspects pertaining to redefinition of SI Units and their implications, applications of time and frequency metrology, certified reference materials, industrial metrology, industry 4.0, metrology in additive manufacturing, digital transformations in metrology, soft metrology and cyber security, optics in metrology, nano-metrology, metrology for advanced communication, environmental metrology, metrology in biomedical engineering, legal metrology and global trade, ionizing radiation metrology, advanced techniques in evaluation of measurement uncertainty, etc. The book has contributed chapters from world’s leading metrologists and experts on the diversified metrological theme. The internationally recognized team of editors adopt a consistent and systematic approach and writing style, including ample cross reference among topics, offering readers a user-friendly knowledgebase greater than the sum of its parts, perfect for frequent consultation. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only metrology but also mechanical/material science, optics, physics, chemistry, biomedical and more. This handbook is ideal for academic and professional readers in the traditional and emerging areas of metrology and related fields.
Manufacturing, reduced to its simplest form, involves the sequencing of product forms through a number of different processes. Each individual step, known as an unit manufacturing process, can be viewed as the fundamental building block of a nation's manufacturing capability. A committee of the National Research Council has prepared a report to help define national priorities for research in unit processes. It contains an organizing framework for unit process families, criteria for determining the criticality of a process or manufacturing technology, examples of research opportunities, and a prioritized list of enabling technologies that can lead to the manufacture of products of superior quality at competitive costs. The study was performed under the sponsorship of the National Science Foundation and the Defense Department's Manufacturing Technology Program.