Ludmila Eckertová
Published: 1992-06
Total Pages: 336
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In an area of ever increasing interest, this volume comprises the invited papers from well known and respected workers in the field. It covers the characterization of thin films using a variety of techniques including scanning electron microscopy, scanning tunnelling microscopy, transmission electron microscopy, x-ray diffraction and electron probe microanalysis. The main applications of this specialized field in sensors, hard coatings and microelectronics are discussed.