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Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.
Synthesis of nonequilibrium metallic phases has been an area of great interest to the materials processing community since early 1960. Inherent rapid cooling rates in laser processing are being used to engineer non-equilibrium microstructures which cannot be rivaled by other processes. This lecture will discuss the phenomena involved and its application in designing materials with tailored properties. What is non-equilibrium Synthesis? This is a synthesis method to produce binary or higher order materials where kinetics of the pro cess affects the transport of the constituent elements during phase transformation resulting in a composition or crystallographic configuration which is different from what is observed when the elements arranges themselves with the lowest possible Gibbs Free energy, which is the equilibrium condition. Figure 1 illustrates the phenomena. Phase diagram under equilibrium condition is illustrated by the solid line whereas the no-equilibrium phase diagram is represented by the dotted line. One can observe the shrinkage of the phase field under non-equilibrium condition. Any alloy composition between the solidus lines of the equilibrium and non-equilibrium phase diagram will be a non equilibrium alloys with extended solid solution.
Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser--matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas--solid, liquid--solid, and solid--solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. Students, engineers, and manufacturers alike will find this book an invaluable reference work for the state of the art in laser processing.
Dr. George P. Thomon, Nobel Laureate in Physics said, "We have labelled civilizations by the main materials which they have used: The Stone Age, the Bronze Age and the Iron Age ••• a civilization is both developed and limited by the materials at its disposal. Today, man lives on the boundary between the Iron Age and a New Materials Age." The ever more stringent requirements for materials to accomplish specific functions and withstand extreme conditions, as dictated by the needs of industry and defense, con tinue to spur ever more intensive research in Materials Science. According to the recent report "Trends and Opportunities in Materials Research" a vital goal of materials research is to design synthesize and fabricate in high yield, new materials with properties that can be pre dicted, varied and controlled. In the past this has been a fairly empirical process, but as we gain more comprehensive understanding of the behavior of matter on an atomic and molecular scale this goal becomes ever more attain able. An important recent trend is the increasing sophistication and power of theoretical approaches. Aided by the development of computers and versa tile numerical techniques, as well as concepts from statistical mechanics, theorists are beginning to confront the complexity of real materials. Important advances are expected through a concentrated attack on model systems in which the theorist, experimental scientist and engineer all work together towards designing new materials and controlling their properties.
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
This book discusses the physics of plasma initiation and reviews the features of dissipating, propagating plasmas. It deals with advances in diagnostics for high-energy, laser-fusion plasmas. The book reviews the basic physical processes, plasma characteristics of the "continuous optical discharge".
Materials processing with lasers is a rapidly expanding field which is increasingly captivating the attention of scientists, engineers and manufacturers alike. The aspect of most interest to scientists is provided by the basic interaction mechanisms between the intense light of a laser and materials exposed to a chemically reactive or nonreactive surrounding medium. Engineers and manufacturers see in the laser a new tool which will not only make manufacturing cheaper, faster, cleaner and more accurate but which also opens up entirely new technologies and manufacturing methods that are simply not available using existing techniques. Actual and potential applications range from laser machining to laser-induced materials transformation, coating, patterning, etc. , opening up the prospect of exciting new processing methods for micromechanics, metallurgy, integrated optics, semiconductor manufacture and chemical engineering. This book concentrates on the new and interdisciplinary field of 1 aser-i nduced chemicaZ process i ng of materi als. The techni que permits maskless single-step deposition of thin films of metals, semiconductors or insulators with lateral dimensions ranging from a few tenths of a micrometer up to several centimeters. Moreover, materials removal or synthesis, or surface modifications, such as oxidation, nitridation, reduction, metallization and doping, are also possible within similar dimensions. This book is meant as an introduction. It attempts to cater for the very broad range of specific interests which different groups of readers will have, and this thinking underlies the way in which the material has been arranged.
The second International Conference on Trends in Quantum Electron ics (TQE'85) was held in Bucharest at the National Centre for Physics in September 1985, and brought together more than 350 scientists from 22 countries. In accordance with the objectives established at the first conference, which was held in 1982 in conjunction with the third International Summer School in Coherent Optics, the second conference con centrated upon the central topics and chief directions of development in quantum electronics - which stands out as an area of science and technology that is currently expanding vigorously. On the other hand, it was also apparent that TQE'85 was primarily influenced by the worldwide celebration, in 1985, of the 25th anniversary of the laser - a moment of prime importance in the development of many frontline fields, including communications, chemistry, biology, health care and materials processing. A special session was devoted to this anniversary. In keeping with the dynamic spirit of the conference, the fine quality of the invited lectures and the other contributions set a high scientific standard for the proceedings. Mention should be made of the posters that were presented throughout the conference. These, together with the exhibition of books and journals and a display of specialized scientific equipment, did much to create a framework for effective communication and stimulating interaction, to the benefit of all the participants. Of invaluable help in the preparation of the conference was the collaboration of the International Scientific Advisory Committee.
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.