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Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.
The worlds most comprehensive and up-to-date collection of Multidisciplinary Micro and Nano technical papers. Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems. Micro and Nano Fluidic Systems, MEMS, System Optimization, MEMS Applications and Characterization, Advanced Numerics, Process Modeling, Quantum Effects, Quantum Devices, Spintronics, Atomistic of Silicon Processing, Advanced Semiconductors, Circuit Modeling, Compact Modeling. Papers taken from the 2001 MSM, Hilton Head Island, USA, March. 2001.
For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-efficient and methodical manner. A wealth of examples and problems solidify students’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking.