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This book, "Integrated Chemical Microsensor Systems in CMOS Technology", provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at students, scientists and engineers who are interested in gaining an introduction to the field of chemical sensing since all the necessary fundamental knowledge is included. However, as it provides detailed information on all important issues related to the realization of chemical microsensors in CMOS technology, it also addresses experts well familiar with the field. After a brief introduction, the fundamentals of chemical sensing are presented. Fabrication and processing steps that are commonly used in the semiconductor industry are then detailed followed by a short description of the microfabrication techniques, and of the CMOS substrate and materials. Thereafter, a comprehensive overview of semiconductor-based and CMOS-based transducer structures for chemical sensors is given. CMOS-technology is then introduced as platform technology, which enables the integration of these microtransducers with the necessary driving and signal conditioning circuitry on the same chip. In a next section, the development of monolithic multisensor arrays and fully developed microsystems with on-chip sensor control and standard interfaces is described. A short section on packaging shows that techniques from the semiconductor industry can be applied to chemical microsensor packaging. The book concludes with a brief outlook on future developments, such as the realization of more complex integrated microsensor systems and methods to interface biological materials, such as cells, with CMOS microelectronics.
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.
1.1 Overview of Lab-on-Chip Laboratory-on-Chip (LoC) is a multidisciplinary approach used for the miniaturization, integration and automation of biological assays or procedures in analytical chemistry [1–3]. Biology and chemistry are experimental sciences that are continuing to evolve and develop new protocols. Each protocol offers step-by-step laboratory instructions, lists of the necessary equipments and required biological and/or chemical substances [4–7]. A biological or chemical laboratory contains various pieces of equipment used for performing such protocols and, as shown in Fig. 1.1, the engineering aspect of LoC design is aiming to embed all these components in a single chip for single-purpose applications. 1.1.1 Main Objectives of LoC Systems Several clear advantages of this technology over conventional approaches, including portability, full automation, ease of operation, low sample consumption and fast assays time, make LoC suitable for many applications including. 1.1.1.1 Highly Throughput Screening To conduct an experiment, a researcher fills a well with the required biological or chemical analytes and keeps the sample in an incubator for some time to allowing the sample to react properly. Afterwards, any changes can be observed using a microscope. In order to quickly conduct millions of biochemical or pharmacolo- cal tests, the researchers will require an automated highly throughput screening (HTS) [8], comprised of a large array of wells, liquid handling devices (e.g., mic- channel, micropump and microvalves [9–11]), a fully controllable incubator and an integrated sensor array, along with the appropriate readout system.
The latest developments in chemical and biological sensor research and development. Topics include: 1. new selective species recognition surfaces and materials; 2. molecular recognition materials and approaches to minimize non-specific binding; 3. semi-selective species recognition materials; 4. novel methods for signal processing, signal amplification, and detection; 5. detection systems for multiple analytes in complex samples; 6. sensor arrays; and 7. analytical systems and approaches.
Solid State Gas Sensing offers insight into the principles, applications, and new trends in gas sensor technology. Developments in this field are rapidly advancing due to the recent and continuing impact of nanotechnology, and this book addresses the demand for small, reliable, inexpensive and portable systems for monitoring environmental concerns, indoor air quality, food quality, and many other specific applications. Working principles, including electrical, permittivity, field effect, electrochemical, optical, thermometric and mass (both quartz and cantilever types), are discussed, making the book valuable and accessible to a variety of researchers and engineers in the field of material science.
Beginning with an overview of nanomachining, this monograph introduces the relevant concepts from solid-state physics, thermodynamics, and lattice structures. It then covers modeling of thermal transport at the nanoscale and details simulations of different processes relevant to nanomachining. The final chapter summarizes the important points and discusses directions for future work to improve the modeling of nanomachining.
Chemical sensors are integral to the automation of myriad industrial processes, as well as everyday monitoring of such activities as public safety, engine performance, medical therapeutics, and many more. This massive reference work will cover all major categories of chemical sensor materials and devices, and their general functional usage...from monitoring and analyzing gases, to analyzing liquids and compounds of all kinds. This is THE reference work on sensors used for chemical detection and analysis. In this final volume of the Chemical Sensors will be found the latest in new chemical sensor applications including remote chemical sensing for such applications as atmosphere monitoring , new uses for electronic "noses" and "tongues," wireless chemical sensors, and new future directions for chemical sensors in industry, agriculture, and transportation.
This book covers the whole range of gas sensing aspects starting from basics, synthesis, processing, characterization, and application developments. All sub-topics within the domain of gas sensors such as active materials, novel nanomaterials, working mechanisms, fabrication techniques, computational approach, and development of microsensors, and latest advancements such as the Internet of Things (IoT) in gas sensors, and nanogenerators, are explained as well. Related manufacturing sections and proposed direction of future research are also reviewed. Features: Covers detailed state-of-the-art specific chemiresistive sensing materials. Presents novel nanomaterial platforms and concepts for resistive gas sensing. Reviews pertinent aspects of smart sensors and IoT sensing. Explains nanotechnology-enabled experimental findings, and future directions of smart gas sensing technology. Explores implication of latest advancements such as IoT in gas sensors, and nanogenerators. This book is aimed at academic researchers and professionals in sensors and actuators, nanotechnology, and materials science.
Green Sustainable Process for Chemical and Environmental Engineering and Science: Ionic Liquids as Green Solvents discusses the application of ionic liquids as environment-friendly solvents in the extraction, separation and purification of organic and inorganic compounds, as reaction media in biochemical and chemical reactions and catalysis, and in green organic and drug syntheses. It covers various industrial applications, from polymer synthesis, to biodiesel and lubrication, paint and pigments, water softening and dry-cleaning, ore refining, the nuclear industry, aerogels, fuel cells, and more. Specific sections cover hydrogenation, oxidation, hydroformylation, acylation, acetylation, dimerization, oligomerization, photochemical and cleavage of ethers reactions. The book's main emphasis lies in the extraction and separation of biomolecules, vitamins, proteins, enzymes, and DNA using ionic liquids as green solvents. High-performance thin layer chromatography and gas chromatography are also discussed. - Presents ionic liquids as an alternative to conventional solvents - Covers organic and drug synthesis using ionic liquids as a solvent - Outlines industrial product development using ionic liquid as a solvent - Includes methods for separation, purification and extraction of biomolecules - Outlines the use of ionic liquids in water, energy and environmental applications