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This work describes the improvement in thermal management of InP double heterojunction bipolar transistors (DHBTs) fabricated with a transferred-substrate process. The availability of nanocrystalline CVD diamond-on-silicon (Si) handle substrates makes it possible to introduce a 10 µm diamond layer into the InP HBT MMIC stack with BCB-embedded transistors, passive elements and metal interconnects using an adhesive wafer-to-wafer bond process with subsequent removal of the Si host-substrate. Vertical thermal via connections through the diamond and BCB were created by applying inductively coupled plasma etching with oxygen plasma and electroplating. Electrical characterization of transistors after diamond transfer showed no degradation in RF characteristics and an improvement in DC behavior. A reduction in thermal resistance by 74% from 4.2 K/mW to 1.1 K/mW was observed, which to the author’s knowledge is the lowest thermal resistance for 1-finger InP HBTs with 0.8×5 µm2 emitter area. Significant reduction of thermal resistance of multi-finger devices was achieved: from 4.1 K/mW down to 0.7 K/mW for 2-finger HBTs and from 1.53 K/mW down to the recordly small 0.54 K/mW for 3-finger devices. Based on the developed diamond heat spreader technology, the designed medium-power amplifier delivers a maximum output power of 20 dBm representing the improvement of 4 dBm. Moreover, stable operation of a high-power amplifier with maximum output power of 23 dBm was reached.
Quantum cascade lasers (QCLs) are attractive for high-resolution spectroscopy because they can provide high power and a narrow linewidth. They are particularly promising in the terahertz (THz) range since they can be used as local oscillators for heterodyne detection as well as transmitters for direct detection. However, THz QCL-based technologies are still under development and are limited by the lack of frequency tunability as well as the frequency and output power stability for free-running operation. In this dissertation, frequency tuning and linewidth of THz QCLs are studied in detail by using rotational spectroscopic features of molecular species. In molecular spectroscopy, the Doppler eff ect broadens the spectral lines of molecules in the gas phase at thermal equilibrium. Saturated absorption spectroscopy has been performed that allows for sub-Doppler resolution of the spectral features. One possible application is QCL frequency stabilization based on the Lamb dip. Since the tunability of the emission frequency is an essential requirement to use THz QCL for high-resolution spectroscopy, a new method has been developed that relies on near-infrared (NIR) optical excitation of the QCL rear-facet. A wide tuning range has been achieved by using this approach. The scheme is straightforward to implement, and the approach can be readily applied to a large class of THz QCLs. The frequency and output stability of the local oscillator has a direct impact on the performance and consistency of the heterodyne spectroscopy. A technique has been developed for a simultaneous stabilization of the frequency and output power by taking advantage of the frequency and power regulation by NIR excitation. The results presented in this thesis will enable the routine use of THz QCLs for spectroscopic applications in the near future.
During the past years, wireless communication systems have been rapidly advancing to meet the high data-rate requirements of various emerging applications. However, the existing transceivers have typically been demonstrated using CMOS-compatible technologies that deliver a relatively low equivalent isotropic radiated power in a small unit cell. Moreover, the particular device characteristics are limiting the linear region for operation. Therefore, the main focus of this dissertation is to present and discuss new design methods for transceivers to solve these issues. To reduce the complexity of the transceiver module for further phased-array scaling, a low-noise power amplifier design approach is designed using a 0.15-μm GaN-on-SiC high-electron mobility transistor technology (HEMT). Utilizing a traded off interstage matching topology between loss and bandwidth, the conversion loss induced by the matching network could be effectively reduced. A stacked-FET configuration was adopted to enhance the power handling of the RF switch. Further improvement on the isolation bandwidth was investigated using theoretical analysis on the intrinsic effect of the passive HEMTs. With the successful implementation of the RF front-end circuits, transceiver modules were integrated on Rogers RO3010 substrate. The planar dual exponentially tapered slot antenna phased-array system showed a compact size with simple biasing network compared to the conventional transceiver approach. The presented T/R module was characterized with an over-the-air test at a distance of 1 m, overcoming the free space path loss of 64 dB. It also shows a high flexibility for further integration with a larger number of array systems, which is very promising for future 5G communication systems.
This work is about two-step epitaxial growth using metalorganic vapor-phase epitaxy (MOVPE) for the realization of edge-emitting near-infrared laser diodes. The fabricated gallium arsenide-based devices fall into two categories: high-power lasers (watt range, multimodal) and tunable lasers (milliwatt range, monomodal). Common to both cases is that surface contamination – particularly that due to oxygen – needs to be removed before regrowth. Thus, in-situ etching with carbon tetrabromide (CBr4) is first studied. The experimental results include kinetic data, the effects of different etching conditions as well as substrate characteristics, and the effectiveness in reducing surface contamination. These investigations pave the way to devices based on 2-step epitaxy combined with in-situ etching. Correspondingly, thermally-tuned SG-DBR lasers operating around 975 nm have been successfully realized, obtaining a tuning range of 21 nm. In addition, the possibility of using electronic tuning in similar devices has been explored. High-power broad-area lasers have also been realized, using two-step epitaxy combined with ex-situ and in-situ etching, to create a buried, shallow “mesa” containing the active zone. This approach allows introducing lateral electrical and optical confinement, and – simultaneously – non-absorbing mirrors at the laser facets. Additionally, a different strategy to create a buried current aperture is presented, which is based on ion implantation followed by epitaxial regrowth. This enables to improve device performance and simultaneously introduce non-absorbing mirrors at the facets with correspondingly increased reliability.
A compact and portable laser light source emitting in the wavelength range between 210 nm and 230 nm would enable numerous applications outside of laboratory environments, such as sterilization and disinfection of medical equipment, water purification or gas and air analysis using absorption spectroscopy. Such a source is also highly attractive for the identification and quantification of proteins and biomolecules by means of laser-induced fluorescence or Raman spectroscopy. In this thesis, a novel concept to realize such a compact and portable laser light source with low power consumption and an emission around 222 nm is investigated. The developed concept is based on single-pass frequency doubling of a commercially available high-power GaN laser diode emitting in the blue spectral range. Due to the low frequency doubling conversion efficiencies in this wavelength range of about 10-4 W-1, a laser diode with high optical output power above 1 W is required as pump source. Moreover, it has to exhibit narrowband emission in the range of the acceptance bandwidth of the applied nonlinear BBO crystal. Since GaN-based high-power laser diodes typically show broad emission spectra of Δλ = 1…2 nm, stabilizing and narrowing their wavelength by using external wavelength-selective elements is investigated and presented for the first time. With the understanding for the novel concept gained in this work, a compact ultraviolet laser light source was realized. It has a power consumption of less than 10 W and is exceptionally robust due to its immoveable components. The demonstrated output power of 160 μW enables numerous industrial and everyday applications for which previous laser systems have been too complex and overly cost- and energy-intensive.
This work aims at designing and characterizing diode laser based master oscillator power amplifier (MOPA) systems, which are targeted to be implemented into micro light detection and ranging (LIDAR) or differential absorption LIDAR (DIAL) systems for water vapor and aerosol detections. These light sources operate in the ns-pulse regime at a repetition rate of 25 kHz, leading to a resolution in the meter range in an altitude of 6 km. The monolithic MOPA, where Master Oscillator (MO) and Power Amplifier (PA) are integrated on one single chip, operates at 1064 nm wavelength. A peak power of 16.3 W with a pulse width of 3 ns was obtained. A spectral linewidth of about 150 pm and a side mode suppression ratio (SMSR) of 30 dB was observed. A ratio of 9% between the amplified spontaneous emission (ASE) and the laser was estimated. These spectral properties fulfill the requirements for aerosol detection. The hybrid MOPA systems have separate chips for MO and PA. Different hybrid MOPA systems provide a stabilized wavelength at 1064 nm, a tunable wavelength around 975 nm and a dual wavelength around 964 nm. They therefore enable to detect a well-defined absorption line, scan over absorption line and switch between on/off line in DIAL applications, respectively. Their spectral linewidth is below 10 pm, limited by the resolution of the spectrum analyzer. An SMSR of more than 50 dB for the MO and of more than 37 dB for the whole MOPA was reached. A ratio between ASE and laser below 1% was estimated. These spectral properties meet the requirements for water vapor absorption lines detection at atmospheric condition. Diode laser based MOPA systems were therefore proven to be potential light sources for micro-pulse-LIDAR systems – the basis for a new generation of ultra-compact, low-cost systems.
Broad-area lasers are edge-emitting semiconductor lasers with a wide lateral emission aperture. This feature enables high output powers but also diminishes the lateral beam quality and results in their inherently non-stationary behavior. Research in the area is driven by application, and the main objective is to increase the brightness, which includes both output power and lateral beam quality. To understand the underlying spatio-temporal phenomena and to apply this knowledge in order to reduce costs for brightness optimization, a self-consistent simulation tool taking all essential processes into account is vital. Firstly, in this work a quasi-three-dimensional opto-electronic and thermal model is presented that describes essential qualitative characteristics of real devices well. Time-dependent traveling-wave equations are utilized to characterize the inherently non-stationary optical fields, which are coupled to dynamic rate equations for the excess carriers in the active region. This model is extended by an injection-current-density model to accurately include lateral current spreading and spatial hole burning. Furthermore, a temperature model is presented that includes short-time local heating near the active region as well as the formation of a stationary temperature profile. Secondly, the reasons of brightness degradation, i.e. the origins of power saturation and the spatially modulated field profile, are investigated. And lastly, designs that mitigate those effects limiting the lateral brightness under pulsed and continuous-wave operation are discussed. Amongst those designs a novel “chessboard laser” is presented that utilizes longitudinal-lateral gain-loss modulation and an additional phase tailoring to obtain a very low far-field divergence.
To enable the fabrication of high performance ultraviolet (UV) light-emitting diodes (LEDs) this work aims at improving the quality of AlN base layers on sapphire substrates. The main issues for UV LEDs are still a limited internal quantum efficiency due to a high amount of threading dislocations along with a limited light extraction efficiency due to total internal reflection at the AlN/sapphire interface. Therefore, high-temperature annealing of AlN/sapphire layers and growth on nanopatterned sapphire substrates were comprehensively investigated. High-temperature annealing was applied to AlN layers of different strain and thickness grown by metalorganic vapour phase epitaxy (MOVPE). The threading dislocation density could be successfully reduced by more than one order of magnitude down to 6 × 108 cm-2. Wave optical simulations of UV LEDs on nanopatterned sapphire substrates (NPSS) were conducted and showed a potential increase in light extraction efficiency compared to a planar substrate. The optimized MOVPE growth process on sapphire nanopillars and sapphire nanoholes resulted in a fully coalesced and atomically smooth AlN surface. The threading dislocation density was reduced to 1 ×109 cm-2 for AlN on both nanopillars and nanoholes. UVC LEDs emitting at 265 nm wavelength were grown on top of the developed templates. Increased internal efficiency was obtained by reduced dislocation density and more efficient light extraction was achieved on NPSS in case of a transparent heterostructure and reflective contacts. Thus, the developed templates yield considerable improvement in light output compared to conventional templates.
This work presents progress in the root-cause analysis of power saturation mechanisms in continuous wave (CW) driven GaAs-based high-power broad area diode lasers operated at 935 nm. Target is to increase efficiency at high optical CW powers by epitaxial design. The novel extreme triple asymmetric (ETAS) design was developed and patented within this work to equip diode lasers that use an extremely thin p-waveguide with a high modal gain. An iterative variation of diode lasers employing ETAS designs was used to experimentally clarify the impact of modal gain on the temperature dependence of internal differential quantum efficiency (IDQE) and optical loss. High modal gain leads to increased free carrier absorption from the active region. However, less power saturation is observed, which must then be attributed to an improved temperature sensitivity of the IDQE. The effect of longitudinal spatial hole burning (LSHB) leads to above average non-linear carrier loss at the back facet of the device. At high CW currents the junction temperature rises. Therefore, not only the asymmetry of the carrier profile increases but also the average carrier density in order to compensate for the decreased material gain and increased threshold gain. This carrier non-pinning effect above threshold is found in this work to enhance the impact of LSHB already at low currents, leading to rapid degradation of IDQE with temperature. This finding puts LSHB into a new context for CW-driven devices as it emphasizes the importance of low carrier densities at threshold. The carrier density was effectively reduced by applying the novel ETAS design. This enabled diode lasers to be realized that show minimized degradation of IDQE with temperature and therefore improved performance in CW operation.
ndustrial laser systems for material processing applications rely on the availability of highly efficient, high-brightness diode lasers. GaAs-based broad-area laser bars play a vital role in such applications as pump sources for high-beam-quality solid-state lasers and, increasingly, as direct processing tools. This work studies 940 nm-laser bars emitting 1 kW optical power at room temperature, identifying those physical mechanisms that are currently limiting electrical-to-optical conversion efficiency as well as lateral beam quality. In the process, several diagnostic studies on bars with varied lateral-longitudinal design were carried out. The effects of technological measures for performance optimization were analyzed, yielding a new benchmark in efficiency and lateral divergence. The studies into altered resonator lengths of 4 and 6 mm as well as fill factors between 69 and 87 % successfully reduce both the voltage dropping across the device and power saturation at high currents, enabling 66 % efficiency at the operation point. Concrete measures how to reach efficiencies ≥70 % are presented thereafter, showing that doubling the efficiency value of the first 1 kW-demonstration in 2007 – amounting to 35 % – is in near reach. Investigation of the beam quality bases on a herein proposed and realized concept, in which the far field is resolved for each individual bar emitter. In this way, it is possible to determine how far-field profiles vary along the bar width and how much these variations affect the overall bar far-field. Further, such effects specific to bar structures can be separated into non-thermal and thermal influences. The effect of mechanical chip deformation (bar smile) as well as neighboring-emitter interaction has been investigated for the first time in active kW-class devices, yielding a lateral divergence as low as 8.8° at the operation point.