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InP thin films were deposited by planar reactive deposition on recrystallized CdS (RXCdS) and semi-insulating (100) InP substrates and evaluated as potential layers for an all-thin-film solar cell. One objective of this period was to grow InP on RXCdS at a substrate temperature which is high enough to permit the growth of p-type material but yet low enough to permit the epitaxial growth of large grains. Films prepared on RXCdS at approximately 330°C contained a mixture of grains having both large and submicron lateral dimensions. Be-doped epitaxial films, deposited on semi-insulating InP at 330°C, showed both n- and p-type behavior. Films prepared at higher temperatures with a freshly Be-charged indium source were p-type. However, at these temperatures, layers prepared after several runs with the same source were n-type. Analyses of the indium source and films were initiated to determine the cause of the transient doping.
Thin-film InP/CdS structures were prepared by depositing, in sequence, ITO on a low-cost glass substrate, CdS on the ITO by thermal evaporation, and InP on the CdS by planar reactive deposition (PRD). Films of CdS, 15 .mu.m thick, were recrystallized in flowing H2/H2S at 500°C. Lateral dimensions of typical grains were 50.mu.m with values up to 200 .mu.m. The sheet resistance of the recrystallized CdS (RXCdS) was lowered from greater than 105 .cap omega./O = cm2 to values as low as 16 .cap omega./O = cm2 by annealing in either H2 Cd atmospheres. Epitaxy of InP was undertaken on (100) InP at a substrate temperature of 320°C. Room-temperature electron mobilities of about 2000 cm2/V-sec were found. Mobilities and hole concentrations of 60 cm2/V-sec and 1017 cm-3, respectively, were achieved with Be-doped films. P-type films with hole concentrations as high as a few times 1018cm-3 were achieved with increased doping. Be-doped InP was deposited onto the RXCdS/ITO/GLASS substrate to form a thin-film cell. However, p-type InP could not be prepared with CdS as a substrat4e, presumably due to interdiffusion or vapor transport of sulfur. Consequently, blocking action and a photovoltage could only be achieved using a gold Schottky barrier on the InP/RXCdS/ITO/GLASS structure. Plans for the next quarter include determining whether n-type doping from the CdS occurs by either interdiffusion or vapor transport, characterizing InP epitaxy on the RXCdS, and preparing additional thin-film structures.
InP thin films were deposited by planar reactive deposition on recyrstallized CdS (RXCdS) and semi-insulating (100) InP substrates and evaluated as potential layers for an all-thin-film solar cell. Films prepared on RXCdS at approximately 330°C contained a mixture of grains having both large and submicron lateral dimensions. SIMS analysis showed the interdiffusion profiles to be well behaved and, within the resolution of the analysis, no significant difference in the profiles between structures prepared at 330°C and 380°C. Be-doped epitaxial films, deposited on semi-insulating InP at 330°C, showed both n- and p-type behavior. Films prepared at higher and lower temperatures with a freshly Be-charged In source were p-type and n-type, respectively; the n-type behavior is associated with an excess of n-type native defects. SIMS analyses confirmed the presence of Be in all Be-doped films. Growth with deviation from stoichiometry was initiated at 330°C to reduce the concentration of native defects. Growth of Be-doped films at higher substrate temperature with the same Be-doped source after several runs eventually resulted in n-type films. Analyses of the In source and films were initiated to determine the cause of the transient doping. As an alternative to Be doping, p-type Zn-doped InP films were prepared on InP semi-insulating substrates with room-temperature carrier concentration and mobilities of 6 x 1016 cm−3, and 80 cm2/Vsec, respectively.
Thin films (approx. 1 .mu.m thick) and large grains (approx. 40 x 40 .mu.m) of InP were epitaxially deposited on low-cost recrystallized CdS (RXCdS) substrates at 280°C by planar reactive deposition. At 380°C, a 0.4- to 1.0-.mu.m-thick In-Cd-S transition layer between the InP and the RXCdS degrades the quality of the InP epitaxy. However, p-type InP films were prepared at this temperature by Be-doping and capping the entire RXCdS substrate with InP. Large grains of CdTe (approx. 40 .mu.m) were also deposited on RXCdS substrates at 460°C by physical vapor deposition. The grain size of the RXCdS is typically 40 .mu.m. However, during this period we prepared RXCdS with grains having dimensions up to 300 .mu.m.
Indium phosphide/cadmium sulfide solar cells with AM2 efficiencies up to 7% were prepared by the deposition of CdS on single crystals of InP. When an intermediate layer of n-type InP was deposited by the planar reactive deposition (PRD) technique, 3% efficiencies were obtained. Reduced efficiencies were obtained when an intermediate layer of p-type Mn-doped InP was used as the light-absorbing layer. Manganese, acting as a deep center at 0.25 eV and introduced in concentrations of about 10/sup 18/ cm/sup -3/, may act as recombination and tunneling centers, thus limiting the efficiency of the cells. These results suggest that, to improve cell efficiency, either the Mn doping must be reduced or the purity of films must be improved. Methods of improving the purity of the films are suggested. Incorporating Zn as a dopant in the form of diethylzinc is proposed to provide a shallow center to replace Mn. An evaluation of thin films of InP prepared by PRD onto thin films of CdS and InP and sapphire substrates indicated that the InP grain boundaries are n-type, which results in intolerable high current paths through all-thin-film polycrystalline cells. Incorporating Zn as a dopant by diethylzinc is also proposed to provide a graded p to p/sup +/ structure, which would block the current at the grain boundaries. A recently implemented chemomechanical polishing technique has yielded smooth surfaces and complete coverage over single crystals of CdS.