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“Nanowire Field Effect Transistor: Basic Principles and Applications” places an emphasis on the application aspects of nanowire field effect transistors (NWFET). Device physics and electronics are discussed in a compact manner, together with the p-n junction diode and MOSFET, the former as an essential element in NWFET and the latter as a general background of the FET. During this discussion, the photo-diode, solar cell, LED, LD, DRAM, flash EEPROM and sensors are highlighted to pave the way for similar applications of NWFET. Modeling is discussed in close analogy and comparison with MOSFETs. Contributors focus on processing, electrostatic discharge (ESD) and application of NWFET. This includes coverage of solar and memory cells, biological and chemical sensors, displays and atomic scale light emitting diodes. Appropriate for scientists and engineers interested in acquiring a working knowledge of NWFET as well as graduate students specializing in this subject.
This book focuses on foundry-based process technology that enables the fabrication of 3-D ICs. The core of the book discusses the technology platform for pre-packaging wafer lever 3-D ICs. However, this book does not include a detailed discussion of 3-D ICs design and 3-D packaging. This is an edited book based on chapters contributed by various experts in the field of wafer-level 3-D ICs process technology. They are from academia, research labs and industry.
The advancement of semiconductor technology has popularized the low power, economical and small form-factor solid state devices, such as those highly integrated and interconnected as the fundamental infrastructure for the internet of things (IoT). Due to its CMOS-compatibility and electrical interface, the biosensor utilizing field effect transistor (FET) as transducer has become the perfect candidate to interface directly with the chemical and biological properties of the physical world. Especially, nanowire (NW) FET biosensor has received great attention as a highly sensitive biosensing platform, benefiting from its increased surface-to-volume ratio. In this work, several challenges and key aspects of existing NW FET biosensor were studied, and solutions were proposed to address these problems. For example, the hydrolytic stability of the surface sensing element was evaluated and improved by a hydrolysis process, which led to a significant increase in the overall biosensor performance. Another challenge is the noise in the electric potential of the sensing solutions. A secondary reference electrode was introduced in the biosensing system, and its potential was used to subtract the noise from the measured sensor output. Compared to a reference FET, this approach greatly reduced the system complexity and requirement, yet still improved the limit of detection (LOD) by 50 – 70%. This work also involved careful investigation into the analyte sensitivity, which can be considerably affected by the charge buffering effect from the surface hydroxyl groups. Analytical studies and numerical simulations were carried out, revealing that both low pH sensitivity and large analyte buffer capacity are required to achieve a reasonable analyte sensitivity. The most significant portion of this work was the experimental demonstration of the digital biosensing concept with single serpentine NW FET biosensor. The majority of existing FET biosensors utilized the device as an analog transducer, which measures the captured analyte density to generate an output, and suffers from various noise factors, especially the nonspecific changes of the sensing solutions than cannot be reduced by averaging. Digital biosensor no longer depends on the amplitude of the sensor output and is therefore better immune from these noise factors. Instead, the individual binding event of single analyte is counted and analyzed statistically to determine the analyte concentration. The single serpentine NW FET is the ideal device design to achieve digital biosensing. It maintains the low noise level with the equivalently long channel, yet achieves a small footprint enough for binding of only a single analyte. The binding of analyte to multiple segments of the NW results in both higher sensitivity and binding avidity. The small footprint also enables high integration density of the individual digital biosensors into an array format, which is a responsive, highly sensitive, and cost-effective future biosensing platform.
Quasi one-dimensional (1-D) field-effect transistors (FET), such as Si nanowire FETs (Si NW-FETs), have shown promise for more aggressive channel length scaling, better electrostatic gate control, higher integration densities and low-power applications. At the same time, an accurate bench-marking of their performance remains a challenging task due to difficulties in definition of the exact channel length, gate capacitance and transconductance. In 1-D Si FETs, one also often observes a significant degradation of their mobility and on/off ratio. The goal of this study is to implement the idea of the FET performance enhancement while simultaneously performing a more rigorous data extraction. To achieve these goals, we fabricated dual-gate undoped Si NW-FETs with various NW diameters The Si NWs are grown by Au-catalyzed vapor-transport For our top-gate NW-FET, the subthreshold swing was determined to be 85-90 mV/decade, whereas the best subthreshold swings for Si NW-FETs until now were ~135-140 mV/decade. We achieved a ON/OFF current ratio of 10 7 due to improved electrostatic control and electron transport conditions inside the channel. This is on the higher end of any ON/OFF ratios thus far reported for NW FETs The hole mobility in our NW-FETs was around 250.400 cm[superscript 2] /Vs, according to different extraction procedures. In our mobility calculations we included the NW silicidation effect, which reduces the effective channel length. We calculated the top gate capacitance using Technology Computer Aided Design (TCAD) Sentaurus simulator, which gives more accurate value of capacitance of the NW over any analytical formulas. Thus we fabricate and rigorously study Si NW.s intrinsic properties which are very important for digital logic circuit application. In the second part of the study, we carried out simulation of Si NW FET devices to shed light on the carrier transport behavior that also explains experimental data.