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Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced. Focuses on the plasma chemistry of amorphous silicon-based materials Links fundamental growth kinetics with the resulting semiconductor film properties and performance of electronic devices produced Features an international group of contributors Provides the first comprehensive coverage of the subject, from deposition technology to materials characterization to applications and implementation in state-of-the-art devices
The Army Materials and Mechanics Research Center in cooperation with the Office of Sponsored Programs of Syracuse University has been conducting the Annual Sagamore Army Materials Research Conferences since 1954. The specific purpose of these conferences has been to bring together scientists and engineers from academic institutions, industry and government to explore in depth a subject of importance to the Department of Defense, the Army, and the scientific community. This 30th Sagamore Conference, entitled Innovations in Materials Processing, has attempted to focus on the inter disciplinary nature of materials processing, looking at recent advancements in the development of unit processes from a range of standpoints from the understanding and control of the under lying mechanisms through their application as part of a manufactur ing sequence. In between, the classic link between processing and materials properties is firmly established. A broad range of materials are treated in this manner: metals, ceramics, plastics, and composites. The interdisciplinary nature of materials processing exists through its involvement with the basic sciences, with, process and product design, with process control, and ultimately with manufacturing engineering. Materials processing is interdisciplinary in another sense, through its application within all materials disciplines. The industrial community (and the Army as its customer) is becoming increasingly concerned with producibility/reliability/ affordability issues in advanced product development. These concerns will be adequately addressed only by employing the full range of disciplines encompassed within the field of materials processing.
Hydrogenated, amorphous silicon (a-Si:H) is of great interest for thin film devices used, for example, for the transformation of photon energy and as semiconductor material. Important applications are thin film solar cells, thin film transistors for liquid crystal displays, photoreceptors for electrophotography and laser printing and image sensors. To improve and optimize the properties of the material for specific applications it is necessary to control the formation of the three dimensional network during the solidification process (bandgap engineering). Incorporation of hydrogen into the network reduces the density of defects near the middle of the bandgap (gap states) . For optimal performance a specific binding configuration should be realized. Distortions in the metastable silicon network, especially in the bond angle, are believed to be responsible for the tail states at the bandgap edges.
This comprehensive, detailed treatise on the physics and applications of the new emerging technology of amorphous semiconductors focuses on specific device research problems such as the optimization of device performance. The first part of the book presents hydrogenated amorphous silicon type alloys, whose applications include inexpensive solar cells, thin film transistors, image scanners, electrophotography, optical recording and gas sensors. The second part of the book discusses amorphous chalcogenides, whose applications include electrophotography, switching, and memory elements. This book will serve as an excellent reference source for solid state scientists and engineers, and as a useful self-contained introduction to the field for graduate students.