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Femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensional microfluidics, micromechanics, microelectronics and microoptics embedded in the glass. Further, these microcomponents can be easily integrated in a single glass microchip by the simple procedure using the femtosecond laser. Thus, the femtosecond laser processing provides some advantages over conventional methods such as traditional semiconductor processing or soft lithography for fabrication of microfluidic, optofludic and lab-on-a-chip devices and thereby many researches on this topic are currently being carried out. This book presents a comprehensive review on the state of the art and future prospects of femtosecond laser processing for fabrication of microfluidics and optofludics including principle of femtosecond laser processing, detailed fabrication procedures of each microcomponent and practical applications to biochemical analysis.
Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.
Due to their flexible and efficient capabilities, lasers are often used over more traditional machining technologies, such as mechanical drilling and chemical etching, in manufacturing a wide variety of products, from medical implants, gyroscopes, and drug delivery catheters to aircraft engines, printed circuit boards, and fuel cells. Fundamentals
Femtosecond laser micromachining is a promising technology for micromachining of various engineering materials. The interaction mechanism of femtosecond laser pulses with matter is completely different compared to traditional lasers. This work presents a detailed study on the ablation of common engineering materials in air with femtosecond laser pulses. The single and multi-shot ablation threshold fluence and incubation coefficient of Nickel, SMA, Tungsten, PZT, Copper, Cobalt, Stainless Steel, Iron, Titanium, Brass and Aluminum are evaluated. The morphological changes on the material are discussed along with the identification of gentle and strong ablation phases.
To present their work in the field of micromachining, researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. Their articles will give you the opportunity to understand the concepts of micromachining of advanced materials. Surface texturing using pico- and femto-second laser micromachining is presented, as well as the silicon-based micromachining process for flexible electronics. You can learn about the CMOS compatible wet bulk micromachining process for MEMS applications and the physical process and plasma parameters in a radio frequency hybrid plasma system for thin-film production with ion assistance. Last but not least, study on the specific coefficient in the micromachining process and multiscale simulation of influence of surface defects on nanoindentation using quasi-continuum method provides us with an insight in modelling and the simulation of micromachining processes. The editors hope that this book will allow both professionals and readers not involved in the immediate field to understand and enjoy the topic.
LASER-ASSISTED MACHINING This unique book develops exhaustive engineering perceptions of different laser-assisted techniques, reviews the engineering context of different laser fabrication techniques, and describes the application of laser-assisted fabrication techniques. Lasers are essential in the area of material processing because they can produce coherent beams with little divergence. The fabrication process known as surface cladding includes joining (soldering, welding), material removal (laser-aided drilling, cutting, etc.), deformation (extrusion, bending), and material addition. Some remarkable advantages of laser-assisted material development include faster processing rates and preservation of essential alloying components. However, the lack of widespread understanding of various material phenomena and how laser parameters affect them prevents the technology from being widely accepted on an industrial scale. Among the subjects Laser-Assisted Machining covers include high-powered lasers in material processing applications, laser-based joining of metallic and non-metallic materials, direct laser cladding, laser surface processing, laser micro and nano processing, emerging laser materials processing techniques, solid-state lasers, laser cutting, drilling and piercing, laser welding, laser bending or forming, laser cleaning, laser automation and in-process sensing, femtosecond laser micromachining, laser-assisted micro-milling/grinding, laser-assisted jet electrochemical micro-machining, laser-assisted water jet micro-machining, hybrid laser-electrochemical micromachining process, quill and nonreciprocal ultrafast laser writing, laser surface engineering, ultrashort pulsed laser surface texturing, laser interference patterning systems, laser interference lithography, laser-guided discharge texturing. Audience The book will be used by researchers in the fields of manufacturing technology and materials science as well as engineers and high-level technicians for a better understanding of various innovative and novel techniques to cope with the need of micromachining, as well as microfabrication industries for successful implementation of microproduct manufacturing.
This handbook provides a comprehensive review of the entire field of laser micro and nano processing, including not only a detailed introduction to individual laser processing techniques but also the fundamentals of laser-matter interaction and lasers, optics, equipment, diagnostics, as well as monitoring and measurement techniques for laser processing. Consisting of 11 sections, each composed of 4 to 6 chapters written by leading experts in the relevant field. Each main part of the handbook is supervised by its own part editor(s) so that high-quality content as well as completeness are assured. The book provides essential scientific and technical information to researchers and engineers already working in the field as well as students and young scientists planning to work in the area in the future. Lasers found application in materials processing practically since their invention in 1960, and are currently used widely in manufacturing. The main driving force behind this fact is that the lasers can provide unique solutions in material processing with high quality, high efficiency, high flexibility, high resolution, versatility and low environmental load. Macro-processing based on thermal process using infrared lasers such as CO2 lasers has been the mainstream in the early stages, while research and development of micro- and nano-processing are becoming increasingly more active as short wavelength and/or short pulse width lasers have been developed. In particular, recent advances in ultrafast lasers have opened up a new avenue to laser material processing due to the capabilities of ultrahigh precision micro- and nanofabrication of diverse materials. This handbook is the first book covering the basics, the state-of-the-art and important applications of the dynamic and rapidly expanding discipline of laser micro- and nanoengineering. This comprehensive source makes readers familiar with a broad spectrum of approaches to solve all relevant problems in science and technology. This handbook is the ultimate desk reference for all people working in the field.
New chapters on bending and cleaning reflect the changes in the field since the last edition, completing the range of practical knowledge about the processes possible with lasers already familiar to users of this well-known text. Professor Steen's lively presentation is supported by a number of original cartoons by Patrick Wright and Noel Ford, which will bring a smile to your face and ease the learning process. From the reviews: "...well organized, and the text is very practical...The engineering community will find this book informative and useful." (OPTICS AND PHOTONICS NEWS, July/August 2005)
Femtosecond lasers enable materials processing of most any material with extremely high precision and negligible shock or thermal loading to the surrounding area Applications ranging from drilling teeth to cutting explosives to making high-aspect ratio cuts in metals with no heat-affected zone are made possible by this technology For material removal at reasonable rates, we developed a fully computer-controlled 15-Watt average power, 100-fs laser machining system.