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This book gives a survey of the physics and fabrication of carbon nanotubes and their applications in optics, electronics, chemistry and biotechnology. It focuses on the structural characterization of various carbon nanotubes, fabrication of vertically or parallel aligned carbon nanotubes on substrates or in composites, physical properties for their alignment, and applications of aligned carbon nanotubes in field emission, optical antennas, light transmission, solar cells, chemical devices, bio-devices, and many others. Major fabrication methods are illustrated in detail, particularly the most widely used PECVD growth technique on which various device integration schemes are based, followed by applications such as electrical interconnects, nanodiodes, optical antennas, and nanocoax solar cells, whereas current limitations and challenges are also be discussed to lay the foundation for future developments.
Last, a thermal annealing to the Si/CNT composite results in the formation of silicon carbide nanowires (SiCNWs). This combination of annealing and Si/CNTs yields a unique fabrication approach resulting in porous three dimensional silicon carbide structures with precise control over shape and porosity.
Carbon Nanotube Field Effect Transistor (CNFET) technology has received a lot of attention in the past few years as a promising extension to silicon-CMOS for future digital logic integrated circuits. While recent research has advanced CNFET technology past many important milestones, robust and scalable solutions must be developed to realize the full potential of CNFETs. Thus, this thesis aims to develop a suite of techniques, spanning from material synthesis to circuit solutions, compatible with very-large-scale integration (VLSI). Specifically, to enable the real-world engineering of carbon nanotube integrated circuits, this thesis presents (1) wafer-scale aligned CNT growth, (2) wafer-scale CNT Transfer, (3) wafer-scale device and circuit fabrication techniques, and (4) ACCNT, a VLSI-compatible circuit design solution to surmounting the problem of metallic CNTs. These techniques culminated in the successful demonstration of CNT transistors, inverters, and NAND logic gates on a wafer scale. Furthermore, this thesis sheds light on important design considerations for the demonstration of a simple CNT "computer" and suggests a few critical directions for future work in the field of carbon nanotube technology. In contributing the above, this thesis hopes to propel carbon nanotube technology forward towards the vision of robust, large-scale integrated circuits using high-density carbon nanotubes.
This thesis is devoted to the fabrication of carbon nanotube structures for microelectronics packaging applications with an emphasis on fundamental studies of nanotube growth and assembly, wetting of nanotube structures, and nanotube-based composites. A CVD process is developed that allows controlled growth of a variety of CNT structures, such as CNT films, bundles, and stacks. Use of an Al2O3 support enhances the Fe catalyst activity by increasing the CNT growth rate by nearly two orders of magnitude under the same growth conditions. By introducing a trace amount of weak oxidants into the CVD chamber during CNT growth, aligned CNT ends can be opened and/or functionalized, depending on the selection of oxidants. By varying the growth temperature, CNT growth can be performed in a gas diffusion- or kinetics-controlled regime. To overcome the challenges that impede implementation of CNTs in circuitry, a CNT transfer process was proposed to assemble aligned CNT structures (films, stacks & bundles) at low temperature which ensures compatibility with current microelectronics fabrication sequences and technology. Field emission and electrical testing of the as-assembled CNT devices indicate good electrical contact between CNTs and solder and a very low contact resistance across CNT/solder interfaces. For attachment of CNTs and other applications (e.g. composites), wetting of nanotube structures was studied. Two model surfaces with two-tier scale roughness were fabricated by controlled growth of CNT arrays followed by coating with fluorocarbon layers formed by plasma polymerization to study roughness geometric effects on superhydrophobicity. Due to the hydrophobicity of nanotube structures, electrowetting was investigated to reduce the hydrophobicity of aligned CNTs by controllably reducing the interfacial tension between carbon nanotubes (CNTs) and liquids. Electrowetting can greatly reduce the contact angle of liquids on the surfaces of aligned CNT films. However, contact angle saturation still occurs.
This book provides a single-source reference on the use of carbon nanotubes (CNTs) as interconnect material for horizontal, on-chip and 3D interconnects. The authors demonstrate the uses of bundles of CNTs, as innovative conducting material to fabricate interconnect through-silicon vias (TSVs), in order to improve the performance, reliability and integration of 3D integrated circuits (ICs). This book will be first to provide a coherent overview of exploiting carbon nanotubes for 3D interconnects covering aspects from processing, modeling, simulation, characterization and applications. Coverage also includes a thorough presentation of the application of CNTs as horizontal on-chip interconnects which can potentially revolutionize the nanoelectronics industry. This book is a must-read for anyone interested in the state-of-the-art on exploiting carbon nanotubes for interconnects for both 2D and 3D integrated circuits.
Graphene, Carbon Nanotubes, and Nanostructures: Techniques and Applications offers a comprehensive review of groundbreaking research in nanofabrication technology and explores myriad applications that this technology has enabled. The book examines the historical evolution and emerging trends of nanofabrication and supplies an analytical understanding of some of the most important underlying nanofabrication technologies, with an emphasis on graphene, carbon nanotubes (CNTs), and nanowires. Featuring contributions by experts from academia and industry around the world, this book presents cutting-edge nanofabrication research in a wide range of areas. Topics include: CNT electrodynamics and signal propagation models Electronic structure calculations of a graphene–hexagonal boron nitride interface to aid the understanding of experimental devices based on these heterostructures How a laser field would modify the electronic structure and transport response of graphene, to generate bandgaps The fabrication of transparent CNT electrodes for organic light-emitting diodes Direct graphene growth on dielectric substrates, and potential applications in electronic and spintronic devices CNTs as a promising candidate for next-generation interconnect conductors CMOS–CNT integration approaches, including the promising localized heating CNT synthesis method CNTs in electrochemical and optical biosensors The synthesis of diamondoids by pulsed laser ablation plasmas generated in supercritical fluids, and possible applications The use of DNA nanostructures in lithography CMOS-compatible silicon nanowire biosensors The use of titanium oxide-B nanowires to detect explosive vapors The properties of protective layers on silver nanoparticles for ink-jet printing Nanostructured thin-film production using microreactors A one-stop reference for professionals, researchers, and graduate students working in nanofabrication, this book will also be useful for investors who want an overview of the current nanofabrication landscape.
Industrial Applications of Carbon Nanotubes covers the current applications of carbon nanotubes in various industry sectors, from the military to visual display products, and energy harvesting and storage. It also assesses the opportunities and challenges for increased commercialization and manufacturing of carbon nanotubes in the years ahead. Real-life case studies illustrate how carbon nanotubes are used in each industry sector covered, providing a valuable resource for scientists and engineers who are involved and/or interested in carbon nanotubes in both academia and industry. The book serves as a comprehensive guide to the varied uses of carbon nanotubes for specialists in many related fields, including chemistry, physics, biology, and textiles. Explains how carbon nanotubes can be used to improve the efficiency and performance of industrial products Includes real-life case studies to illustrate how carbon nanotubes have been successfully employed Explores how carbon nanotubes could be mass-manufactured in the future, and outlines the challenges that need to be overcome
This book provides a complete overview of the field of carbon nanotube electronics. It covers materials and physical properties, synthesis and fabrication processes, devices and circuits, modeling, and finally novel applications of nanotube-based electronics. The book introduces fundamental device physics and circuit concepts of 1-D electronics. At the same time it provides specific examples of the state-of-the-art nanotube devices.
Carbon nanotubes (CNTs), discovered in 1991, have been a subject of intensive research for a wide range of applications. In the past decades, although carbon nanotubes have undergone massive research, considering the success of silicon, it has, nonetheless, been difficult to appreciate the potential influence of carbon nanotubes in current technology. The main objective of this book is therefore to give a wide variety of possible applications of carbon nanotubes in many industries related to electron device technology. This should allow the user to better appreciate the potential of these innovating nanometer sized materials. Readers of this book should have a good background on electron devices and semiconductor device physics as this book presents excellent results on possible device applications of carbon nanotubes. This book begins with an analysis on fabrication techniques, followed by a study on current models, and it presents a significant amount of work on different devices and applications available to current technology.