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The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially great possibilities in the submicron region. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so.
Introduction to Electron and Ion Optics provides the theoretical background needed to understand the subject matter and even be helpful in laboratory works. Seven major parts comprise the book where each focuses on a certain aspect or field. The book begins with an introduction to the general principles about electron and ion optics, specifically as basis for the design of the optical components used in particle analyzers and accelerators. The following parts tackle different aspects such as geometrical optics; scaling rules and dispersion coefficients; fields (paraxial, sector, fringing, quadrupole); lenses (electrostatic, immersion, unipotential, etc.); analyzers (electrostatic, spherical, etc.); and space charge and beam production. Towards the last part of the book, there is an exercises section where various problems are given for the reader to answer. This book caters to students specifically in the field of physics.
The three volumes in the PRINCIPLES OF ELECTRON OPTICS Series constitute the first comprehensive treatment of electron optics in over forty years. While Volumes 1 and 2 are devoted to geometrical optics, Volume 3 is concerned with wave optics and effects due to wave length. Subjects covered include:Derivation of the laws of electron propagation from SchrUdinger's equationImage formation and the notion of resolutionThe interaction between specimens and electronsImage processingElectron holography and interferenceCoherence, brightness, and the spectral functionTogether, these works comprise a unique and informative treatment of the subject. Volume 3, like its predecessors, will provide readers with both a textbook and an invaluable reference source.
Advances in Imaging and Electron Physics, Volume 227 in the Advances in Imaging and Electron Physics series, merges two long-running serials, Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. The series features articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science, digital image processing, electromagnetic wave propagation, electron microscopy and the computing methods used in all these domains. - Provides the authority and expertise of leading contributors from an international board of authors - Presents the latest release in the Advances in Imaging and Electron Physics series
Written by a pioneer in the field, this overview of charged particle optics provides a solid introduction to the subject area for all physicists wishing to design their own apparatus or better understand the instruments with which they work. It begins by introducing electrostatic lenses and fields used for acceleration, focusing and deflection of ions or electrons. Subsequent chapters give detailed descriptions of electrostatic deflection elements, uniform and non-uniform magnetic sector fields, image aberrations, and, finally, fringe field confinement.
Focusing of Charged Particles, Volume II presents the aspects of particle optics, including the electron, the ion optical domains, and the accelerator field. This book provides a detailed analysis of the principles of the laws of propagation of beams. Comprised of three parts encompassing three chapters, this volume starts with an overview of how a beam of charged particles traverses a region that is at a uniform, constant, electrostatic potential. This book then discusses the principle of charge repulsion effect by which the space charge of the beam modifies the potential in the region that it traverses. Other chapters examine the general design techniques and performances obtainable for electron guns applicable for use in initiating a beam for linear beam tubes that is given in a condensed form. The last chapter deals with the two stable charged particles that can be accelerated, namely, protons and electrons. This book is a valuable resource to physicists, accelerator experts, and experimenters in search of interactions in the detector target.
With the growing proliferation of nanotechnologies, powerful imaging technologies are being developed to operate at the sub-nanometer scale. The newest edition of a bestseller, the Handbook of Charged Particle Optics, Second Edition provides essential background information for the design and operation of high resolution focused probe instruments. The book’s unique approach covers both the theoretical and practical knowledge of high resolution probe forming instruments. The second edition features new chapters on aberration correction and applications of gas phase field ionization sources. With the inclusion of additional references to past and present work in the field, this second edition offers perfectly calibrated coverage of the field’s cutting-edge technologies with added insight into how they work. Written by the leading research scientists, the second edition of the Handbook of Charged Particle Optics is a complete guide to understanding, designing, and using high resolution probe instrumentation.
In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.
This resource covering all theoretical aspects of modern geometrical charged-particle optics is aimed at anyone involved in the design of electron optical instruments and beam-guiding systems for charged particles.