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The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.
Functional Dielectrics for Electronics: Fundamentals of Conversion Properties presents an overview of the nature of electrical polarization, dielectric nonlinearity, electrical charge transfer mechanisms, thermal properties, the nature of high permittivity, low-loss thermostability and other functional dielectrics. The book describes the intrinsic mechanisms of electrical polarization and the energy transformations in non-centrosymmetric crystals that are responsible for converting thermal, mechanical, optical and other impacts into electrical signals. In addition, the book reviews the main physical processes that provide electrical, mechanoelectrical, thermoelectrical and other conversion phenomena in polar crystals. Detailed descriptions are given to electrical manifestations of polar-sensitivity in the crystals, the interaction of polarization with conductivity, the anomalies in thermal expansion coefficient and main peculiarities of heat transfer in polar-sensitive crystals.
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.* Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume* written by renowned experts in the field* Provides an up-to-date starting point in this young research field.
Metal-dielectric interfaces are ubiquitous in modern electronics. As advanced gigascale electronic devices continue to shrink, the stability of these interfaces is becoming an increasingly important issue that has a profound impact on the operational reliability of these devices. In this book, the authors present the basic science underlying the thermal and electrical stability of metal-dielectric interfaces and its relationship to the operation of advanced interconnect systems in gigascale electronics. Interface phenomena, including chemical reactions between metals and dielectrics, metallic-atom diffusion, and ion drift, are discussed based on fundamental physical and chemical principles. Schematic diagrams are provided throughout the book to illustrate interface phenomena and the principles that govern them. Metal-Dielectric Interfaces in Gigascale Electronics provides a unifying approach to the diverse and sometimes contradictory test results that are reported in the literature on metal-dielectric interfaces. The goal is to provide readers with a clear account of the relationship between interface science and its applications in interconnect structures. The material presented here will also be of interest to those engaged in field-effect transistor and memristor device research, as well as university researchers and industrial scientists working in the areas of electronic materials processing, semiconductor manufacturing, memory chips, and IC design.
Functional Dielectrics for Electronics: Fundamentals of Conversion Properties presents an overview of the nature of electrical polarization, dielectric nonlinearity, electrical charge transfer mechanisms, thermal properties, the nature of high permittivity, low-loss thermostability and other functional dielectrics. The book describes the intrinsic mechanisms of electrical polarization and the energy transformations in non-centrosymmetric crystals that are responsible for converting thermal, mechanical, optical and other impacts into electrical signals. In addition, the book reviews the main physical processes that provide electrical, mechanoelectrical, thermoelectrical and other conversion phenomena in polar crystals. Detailed descriptions are given to electrical manifestations of polar-sensitivity in the crystals, the interaction of polarization with conductivity, the anomalies in thermal expansion coefficient and main peculiarities of heat transfer in polar-sensitive crystals. - Provides readers with a fundamental understanding of polar dielectric materials and their physical processes - Includes different models of polar sensitivity and experimental confirmation of these models - Discusses thermal expansion, heat transfer, dielectric nonlinearity and other important aspects for electronics applications
Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology. Topics include: an extensive review of Moore's Law, the classical regime for SiO2 gate dielectrics; the transition to silicon oxynitride gate dielectrics; the transition to high-K gate dielectrics (including the drive towards equivalent oxide thickness in the single-digit nanometer regime); and future directions and issues for ultimate technology generation scaling. The vision, wisdom, and experience of the team of authors will make this book a timely, relevant, and interesting, resource focusing on fundamentals of the 45 nm Technology Generation and beyond.
Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for
Mechanical and thermal properties are reviewed and electrical and magnetic properties are emphasized. Basics of symmetry and internal structure of crystals and the main properties of metals, dielectrics, semiconductors, and magnetic materials are discussed. The theory and modern experimental data are presented, as well as the specifications of materials that are necessary for practical application in electronics. The modern state of research in nanophysics of metals, magnetic materials, dielectrics and semiconductors is taken into account, with particular attention to the influence of structure on the physical properties of nano-materials. The book uses simplified mathematical treatment of theories, while emphasis is placed on the basic concepts of physical phenomena in electronic materials. Most chapters are devoted to the advanced scientific and technological problems of electronic materials; in addition, some new insights into theoretical facts relevant to technical devices are presented. Electronic Materials is an essential reference for newcomers to the field of electronics, providing a fundamental understanding of important basic and advanced concepts in electronic materials science. Provides important overview of the fundamentals of electronic materials properties significant for device applications along with advanced and applied concepts essential to those working in the field of electronics Takes a simplified and mathematical approach to theories essential to the understanding of electronic materials and summarizes important takeaways at the end of each chapter Interweaves modern experimental data and research in topics such as nanophysics, nanomaterials and dielectrics
A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these materials over conventional materials and also addresses the issues that accompany their integration into existing production technologies. Aimed at academia and industry alike, this monograph combines introductory parts for newcomers to the field as well as advanced sections with directly applicable solutions for experienced researchers and developers in materials science, physics and electrical engineering.