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Doctoral Thesis / Dissertation from the year 2013 in the subject Design (Industry, Graphics, Fashion), grade: N/A, Cranfield University, language: English, abstract: This work aims at the advancement of state-of-art accelerometer design and optimization methodology by developing an ear-plug accelerometer for race car drivers based on a novel mechanical principle. The accelerometer is used for the measurements of head acceleration when an injurious event occurs. Main requirements for such sensor are miniaturization (2×2 mm), because the device must be placed into the driver earpiece, and its measurement accuracy (i.e. high sensitivity, low crosstalk and low nonlinearity) since the device is used for safety monitoring purpose. A micro-electro-mechanical system (MEMS)-based (bulk micromachined) piezoresistive accelerometer was selected as enabling technology for the development of the sensor. The primary accelerometer elements that can be manipulated during the design stage are: the sensing element (piezoresistors), the micromechanical structure and the measurements circuit. Each of these elements has been specifically designed in order to maximize the sensor performance and to achieve the miniaturization required for the studied application. To achieve accelerometer high sensitivity and miniaturization silicon nanowires (SiNWs) as nanometer scale piezoresistors are adopted as sensing elements. Currently this technology is at an infancy stage, but very promising through the exploitation of the “Giant piezoresistance effect” of SiNWs. This work then measures the potential of the SiNWs as nanoscale piezoresistors by calculating the major performance indexes, both electrical and mechanical, of the novel accelerometer. The results clearly demonstrate that the use of nanoscale piezoresistors boosts the sensitivity by 30 times in comparison to conventional microscale piezoresistors. A feasibility study on nanowires fabrication by both top-down and bottom-up approaches is also carried out. The micromechanical structure used for the design of the accelerometer is an optimized highly symmetric geometry chosen for its self-cancelling property. This work, for the first time, presents an optimization process of the accelerometer micromechanical structure based on a novel mechanical principle, which simultaneously increases the sensitivity and reduces the cross-sensitivity progressively. In the open literature among highly symmetric geometries no other study has to date reported enhancement of the electrical sensitivity and reduction of the cross-talk at the same time.
This work aims at the advancement of state-of-art accelerometer design and optimization methodology by developing an ear-plug accelerometer for race car drivers based on a novel mechanical principle. The accelerometer is used for the measurements of head acceleration when an injurious event occurs. Main requirements for such sensor are miniaturization (2×2 mm), because the device must be placed into the driver earpiece, and its measurement accuracy (i.e. high sensitivity, low crosstalk and low nonlinearity) since the device is used for safety monitoring purpose. A micro-electro-mechanical system (MEMS)-based (bulk micromachined) piezoresistive accelerometer was selected as enabling technology for the development of the sensor. The primary accelerometer elements that can be manipulated during the design stage are: the sensing element (piezoresistors), the micromechanical structure and the measurements circuit. Each of these elements has been specifically designed in order to maximize the sensor performance and to achieve the miniaturization required for the studied application. To achieve accelerometer high sensitivity and miniaturization silicon nanowires (SiNWs) as nanometer scale piezoresistors are adopted as sensing elements. Currently this technology is at an infancy stage, but very promising through the exploitation of the "Giant piezoresistance effect" of SiNWs. This work then measures the potential of the SiNWs as nanoscale piezoresistors by calculating the major performance indexes, both electrical and mechanical, of the novel accelerometer. The results clearly demonstrate that the use of nanoscale piezoresistors boosts the sensitivity by 30 times in comparison to conventional microscale piezoresistors. A feasibility study on nanowires fabrication by both top-down and bottom-up approaches is also carried out. The micromechanical structure used for the design of the accelerometer is an optimized highly symmetric geometry chosen for its self-cancelling property. This work, for the first time, presents an optimization process of the accelerometer micromechanical structure based on a novel mechanical principle, which simultaneously increases the sensitivity and reduces the cross-sensitivity progressively. In the open literature among highly symmetric geometries no other study has to date reported enhancement of the electrical sensitivity and reduction of the cross-talk at the same time. Moreover the novel mechanical principle represents advancement in the accelerometer design and optimization methodology by studying the influence of a uniform mass moment of inertia of the accelerometer proof mass on the sensor performance. Finally, an optimal accelerometer design is proposed and an optimized measurement circuit is also specifically designed to maximize the performance of the accelerometer. The new proposed accelerometer design is capable of increasing the sensor sensitivity of all axes, in particular the Z-axis increases of almost 5 times in respect to the current state-of-art-technology in piezoresistive accelerometer. This occurs thanks to the particular newly developed approach of combination of beams, proof mass geometry and measurement circuit design, together with the use of silicon nanowires as nanoscale piezoresistors. Furthermore the cross-sensitivity is simultaneously minimized for a maximal performance. The sum of the cross-sensitivity of all axes is equal to 0.4%, well below the more than 5% of the state-of-art technology counterpart reported in the literature. Future work is finally outlined and includes the electro-mechanical characterization of the silicon nanowires and the fabrication of the proposed accelerometer prototype that embeds bottom up SiNWs as nanoscale piezoresistors.
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
Implantable sensing, whether used for transient or long-term monitoring of in vivo physiological, bio-electrical, bio-chemical and metabolic changes, is a rapidly advancing field of research and development. Underpinned by increasingly small, smart and energy efficient designs, they become an integral part of surgical prostheses or implants for both acute and chronic conditions, supporting optimised, context aware sensing, feedback, or stimulation with due consideration of system level impact. From sensor design, fabrication, on-node processing with application specific integrated circuits, to power optimisation, wireless data paths and security, this book provides a detailed explanation of both the theories and practical considerations of developing novel implantable sensors. Other topics covered by the book include sensor embodiment and flexible electronics, implantable optical sensors and power harvesting. Implantable Sensors and Systems – from Theory to Practice is an important reference for those working in the field of medical devices. The structure of the book is carefully prepared so that it can also be used as an introductory reference for those about to enter into this exciting research and developing field.
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
This volume covers the various sensors related to automotive and aerospace sectors, discussing their properties as well as how they are realized, calibrated and deployed. Written by experts in the field, it provides a ready reference to product developers, researchers and students working on sensor design and fabrication, and provides perspective on both current and future research.
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.
MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.
Part I introduces the basic "Principles and Methods of Force Measurement" according to a classification into a dozen of force transducers types: resistive, inductive, capacitive, piezoelectric, electromagnetic, electrodynamic, magnetoelastic, galvanomagnetic (Hall-effect), vibrating wires, (micro)resonators, acoustic and gyroscopic. Two special chapters refer to force balance techniques and to combined methods in force measurement. Part II discusses the "(Strain Gauge) Force Transducers Components", evolving from the classical force transducer to the digital / intelligent one, with the incorporation of three subsystems (sensors, electromechanics and informatics). The elastic element (EE) is the "heart" of the force transducer and basically determines its performance. A 12-type elastic element classification is proposed (stretched / compressed column or tube, bending beam, bending and/or torsion shaft, middle bent bar with fixed ends, shear beam, bending ring, yoke or frame, diaphragm, axial-stressed torus, axisymmetrical and voluminous EE), with emphasis on the optimum location of the strain gauges. The main properties of the associated Wheatstone bridge, best suited for the parametrical transducers, are examined, together with the appropriate electronic circuits for SGFTs. The handbook fills a gap in the field of Force Measurement, both experts and newcomers, no matter of their particular interest, finding a lot of useful and valuable subjects in the area of Force Transducers; in fact, it is the first specialized monograph in this inter- and multidisciplinary field.
This first of its kind text enables today’s students to understand current and future energy challenges, to acquire skills for selecting and using materials and manufacturing processes in the design of energy systems, and to develop a cross-functional approach to materials, mechanics, electronics and processes of energy production. While taking economic and regulatory aspects into account, this textbook provides a comprehensive introduction to the range of materials used for advanced energy systems, including fossil, nuclear, solar, bio, wind, geothermal, ocean and hydropower, hydrogen, and nuclear, as well as thermal energy storage and electrochemical storage in fuel cells. A separate chapter is devoted to emerging energy harvesting systems. Integrated coverage includes the application of scientific and engineering principles to materials that enable different types of energy systems. Properties, performance, modeling, fabrication, characterization and application of structural, functional and hybrid materials are described for each energy system. Readers will appreciate the complex relationships among materials selection, optimizing design, and component operating conditions in each energy system. Research and development trends of novel emerging materials for future hybrid energy systems are also considered. Each chapter is basically a self-contained unit, easily enabling instructors to adapt the book for coursework. This textbook is suitable for students in science and engineering who seek to obtain a comprehensive understanding of different energy processes, and how materials enable energy harvesting, conversion, and storage. In setting forth the latest advances and new frontiers of research, the text also serves as a comprehensive reference on energy materials for experienced materials scientists, engineers, and physicists. Includes pedagogical features such as in-depth side bars, worked-out and end-of- chapter exercises, and many references to further reading Provides comprehensive coverage of materials-based solutions for major and emerging energy systems Brings together diverse subject matter by integrating theory with engaging insights