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This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.
Liquid-Phase Epitaxy (LPE) is a technique used in the bulk growth of crystals, typically in semiconductor manufacturing, whereby the crystal is grown from a rich solution of the semiconductor onto a substrate in layers, each of which is formed by supersaturation or cooling. At least 50% of growth in the optoelectronics area is currently focussed on LPE. This book covers the bulk growth of semiconductors, i.e. silicon, gallium arsenide, cadmium mercury telluride, indium phosphide, indium antimonide, gallium nitride, cadmium zinc telluride, a range of wide-bandgap II-VI compounds, diamond and silicon carbide, and a wide range of oxides/fluorides (including sapphire and quartz) that are used in many industrial applications. A separate chapter is devoted to the fascinating field of growth in various forms of microgravity, an activity that is approximately 30-years old and which has revealed many interesting features, some of which have been very surprising to experimenters and theoreticians alike. Covers the most important materials within the field The contributors come from a wide variety of countries and include both academics and industrialists, to give a balanced treatment Builds-on an established series known in the community Highly pertinent to current and future developments in telecommunications and computer-processing industries.
In September, 1999, with the generous support of NATO, scientists from 18 different nations gathered in Katsiveli, Yalta, Ukraine at the NATO Advanced Research Workshop on Hydrogen Materials Science and Chemistry of Metal Hydrides to present their research and to discuss world energy problems and possible solutions, interactions of hydrogen with materials, the role of hydrogen in materials science, and the chemistry of metal hydrides. High level and highly professional presentations were accompanied by a great deal of discussion and debate of the issues from both fundamental and global perspectives. The result was a large number of new collaborations, new directions, and better understanding of energy and materials issues. The research presented at this meeting can be found in this volume. These papers range from global perspectives such as the new vision of energy and how hydrogen fits into that future, to reviews such as a look at nickel hydride over the last 40 years, to very specific current research. A large number of papers are included on hydrogen and materials. These papers include articles on properties such as superconductivity, diffusion EMF, magnetic properties, physico chemical properties, phase composition, and permeability as a result of the interaction with or incorporation of hydrogen. Also included are papers discussing the use of hydrogen as a processing or alloying agent. The use of hydrogen in the synthesis of battery electrode materials, composite materials, and alloys is also presented.
Semiconductor technologies continue to evolve and amaze us. New materials, new structures, new manufacturing tools, and new advancements in modelling and simulation form a breeding ground for novel high performance electronic and photonic devices. This book covers all aspects of semiconductor technology concerning materials, technological processes, and devices, including their modelling, design, integration, and manufacturing.
Writing in a clear and readable style, two leading women of the Jungian school of psychology present this legend as a living myth that is profoundly relevant to modern life. 17 illustrations.
Issues for 1973- cover the entire IEEE technical literature.